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    • 1. 发明授权
    • 면형 자기센서 및 다차원 자장해석용 면형 자기센서
    • 형형자기센서및다차원자장해석용면형자기센서
    • KR100438059B1
    • 2004-07-02
    • KR1020010043849
    • 2001-07-20
    • 가부시키가이샤 데루타 쓰-링
    • 혼다시게오야마네히데유끼에노끼요시미와가따시게끼
    • H01L43/12G01R33/09H01F10/14
    • G01R33/10Y10T428/11
    • A plane magnetic sensor or a plane magnetic sensor for a multidimensional magnetic field analysis which can measure a magnetic field over a wide area in a short time is provided. A plane magnetic sensor 10 according to the present invention comprises a sensing layer 11 made of a magnetoresistance effect film formed in a planar state with an arbitrary size, to pass a current therethrough due to a tunneling effect only when voltage reaches or exceeds a predetermined value, and to change its resistance value to show a giant magnetoresistance effect when directions of magnetization of magnetic fine particles change according to the strength of a magnetic field, and conductor layers 12, 13 laminated on respective surfaces of the magnetoresistance effect film and are made of a plurality of line conductor films 12a, 13a formed in linear shapes along directions of the respective surfaces with predetermined intervals therebetween. The line conductor films 12a of one conductor layer 12 and the line conductor films 13a of the other conductor layer 13 are arranged to intersect to each other in plan view, with the magnetoresistance effect film therebetween.
    • 提供了一种用于多维磁场分析的平面磁传感器或平面磁传感器,其能够在短时间内在广阔的区域上测量磁场。 根据本发明的平面磁传感器10包括由平面状态形成的具有任意尺寸的磁阻效应膜构成的检测层11,仅当电压达到或超过预定值时才由于隧道效应而使电流通过其中 ,并且当磁性微粒的磁化方向根据磁场的强度而改变时,改变其电阻值以显示巨大的磁阻效应,以及层叠在磁阻效应膜的各个表面上并且由 多个线状导体膜12a,13a,沿着各个面的方向以规定的间隔形成为直线状。 一个导体层12的线路导体膜12a和另一个导体层13的线路导体膜13a在平面图中彼此交叉布置,其间具有磁阻效应膜。 <图像>
    • 2. 发明公开
    • 면형 자기센서 및 다차원 자장해석용 면형 자기센서
    • 用于分析多维磁场的平面磁传感器和平面磁传感器
    • KR1020020008782A
    • 2002-01-31
    • KR1020010043849
    • 2001-07-20
    • 가부시키가이샤 데루타 쓰-링
    • 혼다시게오야마네히데유끼에노끼요시미와가따시게끼
    • H01L43/12G01R33/09H01F10/14
    • G01R33/10Y10T428/11
    • PURPOSE: To measure magnetic field strength over a wide range in a short time. CONSTITUTION: A planar magnetic sensor 10 is provided with a sensing layer 11, which consists of a magnetic resistance effect film with an arbitrarily sized planar formation, where a resistance value of the layer 11 is changed and a giant magnetic resistance effect is provided by changing the magnetization direction of magnetic fine particles due to the strength of magnetic field with a current that flows by a tunnel effect in the case of a voltage of a prescribed value or more than, and conductor layers 12, 13, which consist of a plurality of linear-shape conductors films 12a, 13a that are formed linear with a prescribed space along the direction of each face with lamination in each face of the magnetic resistance effect film. Each linear conductor film 12a that constitutes one layer 12 of the layers 12, 13 and each linear conductor film 13a that constitutes the other layer 13 are arranged so that both the films 12a, 13a have a positional relation such that the films 12a, 13a hold the magnetic resistance effect film between the films 12a, 13a and mutually cross in a plan view.
    • 目的:在短时间内测量宽范围内的磁场强度。 构成:平面磁传感器10设置有感测层11,感测层11由具有任意尺寸的平面形成的磁阻效应膜组成,其中层11的电阻值改变并且通过改变来提供巨大的磁阻效应 磁性细颗粒的磁化方向由于在具有规定值以上的电压的情况下以通过隧道效应流动的电流的磁场的强度,导体层12,13由多个 线状导体膜12a,13a,其在磁阻效应膜的每个面中沿着每个面的方向与规定的空间线性地层叠。 构成层12,13的一层12和构成另一层13的每个线状导体膜13a的每个线性导体膜12a被布置成使得两个膜12a,13a具有位置关系,使得膜12a,13a保持 膜12a,13a之间的磁阻效应膜在平面图中相互交叉。