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1. 发明专利

JP4354059B2 Standard gas generator 有权
公开(公告)号：JP4354059B2
公开(公告)日：2009-10-28
申请号：JP31737799
申请日：1999-11-08
申请人：株式会社堀場エステック
发明人：正守佐仲 , 洋西里
IPC分类号： G01N1/00
摘要： PROBLEM TO BE SOLVED: To provide a reference gas generator capable of providing a reference gas using many kinds of liquid materials as raw materials and continuously providing the reference gas over a wide concentration range. SOLUTION: A liquid material supplying line 2 having a liquid flowmeter 8 for measuring the flow rate of a liquid material LM and a first diluted gas line 3 having a gas flow controller 14 for controlling the flow rate of a diluted gas DG1 having the function as a carrier gas are connected in parallel to an evaporator 1 for evaporating a liquid. A generated gas line 4 for carrying a gas G generated therein together with the diluted gas DG1 is connected to the evaporator 1. This generated gas line 4 is provided with a gas flow controller 19, and a second diluted gas line 20 having a gas flow controller 23 for controlling the flow rate of a diluted gas DG2 is connected to the downstream from the gas flow controller 19 of the generated gas line 4.

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