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    • 1. 发明申请
    • 被処理物の表面処理方法およびその処理装置
    • 用于表面处理处理对象的方法和装置
    • WO2003042434A1
    • 2003-05-22
    • PCT/JP2002/011203
    • 2002-10-29
    • 旭エンジニアリング株式会社吉田 英夫宮田 清蔵曽根 正人佐藤 信義
    • 吉田 英夫宮田 清蔵曽根 正人佐藤 信義
    • C25D17/00
    • B08B3/14C25D5/00C25D5/08C25D17/00C25D21/04H01L21/02052H01L21/2885H01L21/32134
    • A method and a device for the surface treatment of a treated object, the method comprising the steps of leading surface treating fluid into a reaction tank (4) capable of storing the treated object, applying surface treatment to the treated object, leading the surface treating fluid into a separating tank (14), and circulating the surface treating fluid, after contaminants are removed, into the reaction tank (4), wherein, when the treated object is surface−treated, the circulating routes of the surface treating fluid including the reaction tank (4) are allowed to communicate with each other to always circulate the surface treating fluid in the circulating routes, whereby the method and the device can be suitably used for electrochemical treatment of the treated object, a contact between the treated object and the atmosphere can be avoided, the surface of the treated object can be accurately and uniformly activated, metal ions can be satisfactorily deposited, the supply and discharge of the surface treating fluid and treating fluid can be reasonably performed, the effective use of these fluids and the discharge thereof to the outside of a system can be stopped, a reasonable system, an increase in productivity, and a mass−production can be realized, an electrochemical treatment operation can be reasonably and safely performed, a reduction in size and cost of equipment can be performed, and maintenance can be conveniently performed.
    • 一种用于表面处理被处理物体的方法和装置,所述方法包括以下步骤:使表面处理流体进入能够储存被处理物体的反应罐(4),对被处理物进行表面处理,使表面处理 流体进入分离罐(14),并且在去除污染物之后使表面处理流体循环进入反应罐(4),其中当处理过的物体进行表面处理时,表面处理流体的循环路径包括 使反应槽(4)彼此连通,以使循环路线中的表面处理流体循环,由此该方法和装置可以适用于处理对象的电化学处理,处理对象与 可以避免气氛,被处理物体的表面可以精确均匀地活化,金属离子可以令人满意地沉积,供给和排出 可以合理地进行表面处理流体和处理流体的流动,可以有效地利用这些流体并将其排出到系统的外部,可以实现合理的系统,生产率的提高和批量生产 ,可以合理,安全地进行电化学处理操作,可以实现设备的尺寸和成本的降低,并且可以方便地进行维护。