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    • 4. 发明专利
    • Aberration correction method and aberration correction device for scanning transmission electron microscope
    • 用于扫描传输电子显微镜的检测校正方法和异常校正装置
    • JP2012022971A
    • 2012-02-02
    • JP2010161673
    • 2010-07-16
    • Jeol LtdUniv Of Tokyo国立大学法人 東京大学日本電子株式会社
    • SHIBATA NAOYASAWADA HIDEAKIKONO YUJI
    • H01J37/153H01J37/22H01J37/244H01J37/28
    • PROBLEM TO BE SOLVED: To provide an aberration correction method and an aberration correction device that minimize a time lag accompanying change in aberration and have high calculation accuracy of an aberration coefficient in high resolution observation.SOLUTION: A scanning transmission electron microscope having an aberration corrector makes an electron beam incident on a detector with plural detection faces, simultaneously picks up a dark field image by the electron beam and a bright field image including angle information of the electron beam for each of the detection faces, calculates an aberration coefficient from the plural bright field images with the dark field image as a position reference of an observed image, and controls the aberration corrector on the basis of the calculated aberration coefficient so as to reduce aberration.
    • 解决的问题:提供一种像差校正方法和像差校正装置,其使伴随像差变化的时滞最小化,并且在高分辨率观察中具有高的像差系数的计算精度。 解决方案:具有像差校正器的扫描透射电子显微镜使电子束入射到具有多个检测面的检测器上,同时通过电子束拾取暗场图像和包括电子束的角度信息的明视场图像 对于每个检测面,从具有暗场图像的多个亮场图像中计算像差系数作为观察图像的位置参考,并且基于计算的像差系数控制像差校正器,以减少像差。 版权所有(C)2012,JPO&INPIT
    • 5. 发明专利
    • Transmission electron microscope
    • 传输电子显微镜
    • JP2010212233A
    • 2010-09-24
    • JP2010026242
    • 2010-02-09
    • Jeol LtdUniv Of Tokyo国立大学法人 東京大学日本電子株式会社
    • SHIBATA NAOYAINAMI WATARUSAWADA HIDEAKI
    • H01J37/244
    • PROBLEM TO BE SOLVED: To provide a transmission electron microscope particularly capable of processing a shape of a photodetector into an optional shape by using an optical fiber as a photoconductive medium.
      SOLUTION: The transmission electron microscope enabled to obtain a high-angled scattering image and a dark field image from transmitted electrons which transmit a sample piece 50 is provided with a scintillator 1 for converting the transmitted electron signal which transmits the sample piece 50 into a light signal and an optical fiber 20 which connects the light signal output of the scintillator with a photodetector 30. A connection part between the optical fiber 20 and the photodetector 30 is structured to be processed into an optional shape.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种特别能够通过使用光纤作为感光介质将光电检测器的形状加工成可选形状的透射电子显微镜。 解决方案:能够从透射样品50的透射电子获得高角散射图像和暗场图像的透射电子显微镜设置有用于转换透射样品片50的透射电子信号的闪烁体1 将光信号和光纤20连接,该光纤20将闪烁体的光信号输出与光电检测器30连接。光纤20和光电检测器30之间的连接部分被构造成可选的形状。 版权所有(C)2010,JPO&INPIT
    • 6. 发明专利
    • Transmission electron microscope, and its control method
    • 传输电子显微镜及其控制方法
    • JP2007242514A
    • 2007-09-20
    • JP2006065806
    • 2006-03-10
    • Jeol LtdUniv Of Tokyo国立大学法人 東京大学日本電子株式会社
    • SHIBATA NAOYASAWADA HIDEAKI
    • H01J37/147H01J37/153H01J37/26
    • PROBLEM TO BE SOLVED: To provide a transmission electron microscope which electrically performs a tilt adjustment impossible for a person or a sample tilt mechanism to control, and achieves a precise tilt adjustment.
      SOLUTION: An electron beam E generated and accelerated by an electron gun 1 connected to a high voltage power source is focused by a focusing lens 3 formed of condenser lenses, tilted by two stages of deflection coils of a deflection part 4, and applied to a sample 5a on a sample setting table in a sample room 5. The electron beam having passed through the sample 5a put and held on the sample setting table enters an objective lens 6. An aberration corrector 7 corrects aberration caused in the objective lens 6.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供电气执行人或样品倾斜机构不可能的倾斜调节的透射电子显微镜以进行控制,并且实现精确的倾斜调节。 解决方案:通过连接到高压电源的电子枪1产生和加速的电子束E被由聚光透镜形成的聚焦透镜3聚焦,聚光透镜3由偏转部分4的两级偏转线圈倾斜,并且 施加到样品室5中的样品设置台上的样品5a。放置并保持在样品设置台上的通过样品5a的电子束进入物镜6.像差校正器7校正在物镜中引起的像差 6.版权所有(C)2007,JPO&INPIT
    • 7. 发明专利
    • Adjustment method of multiple division stem detector
    • 多级干扰检测器的调整方法
    • JP2011243516A
    • 2011-12-01
    • JP2010116906
    • 2010-05-21
    • Jeol LtdUniv Of Tokyo国立大学法人 東京大学日本電子株式会社
    • SHIBATA NAOYAKONO YUJISAWADA HIDEAKI
    • H01J37/244
    • PROBLEM TO BE SOLVED: To precisely and easily conduct the gain and off-set adjustments of a multiple division STEM detector.SOLUTION: An electron beam having uniform current density is radiated to the entire detection surface DF of a circular scintillator 601 disposed on the optical axis of a scanning transmission electron microscope, and each of photomultiplier tubes 603 receives light output from the scintillator 601 via an optical fiber bundle 602. And, the intensity of a detection signal output from each photomultiplier tube 603 is measured and then the gain and off-set of the multiple division STEM detector are adjusted for each of detection regions DR, which is obtained by dividing the detection surface DF of the scintillator 601 in a radial direction and an angle direction, so that the intensity of the detection signal output from each photomultiplier tube 603 is proportional to the area of each detection region DR.
    • 要解决的问题:精确和轻松地进行多分割STEM检测器的增益和偏移调整。 解决方案:具有均匀电流密度的电子束照射到设置在扫描透射电子显微镜的光轴上的环形闪烁器601的整个检测表面DF,并且每个光电倍增管603接收从闪烁器601输出的光 测量从各个光电倍增管603输出的检测信号的强度,然后对每个检测区域DR调整多个分割STEM检测器的增益和偏移量,该检测区域DR由 将闪烁体601的检测面DF沿径向和角度方向分割,使得从各个光电倍增管603输出的检测信号的强度与各检测区域DR的面积成比例。 版权所有(C)2012,JPO&INPIT