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    • 3. 发明授权
    • 미세바늘 어레이 제조용 금형과 이 금형의 제조방법 및, 이금형을 이용한 미세바늘 어레이
    • 用于制造麦克风阵列的模具,用于制造麦克风模具的方法和使用麦克风模具制造的麦克风阵列
    • KR100943157B1
    • 2010-02-17
    • KR1020080096347
    • 2008-10-01
    • 김창현이창규
    • 김창현이창규이혜진
    • A61M37/00
    • A61M37/0015A61M2037/0053
    • PURPOSE: A mold for manufacturing a fine needle array, a method for manufacturing the fine needle mold, and a fine needle array manufactured using the fine needle mold are provided, which can obtain a fine needle pattern by forming the tip of the fine needle into sharp incline. CONSTITUTION: A method for manufacturing a fine needle mold includes a step(S1) for coating the upper side of the base with photoresist; a step(S2) for engraving the fine needle pattern on the photoresist layer by aligning a mask in which a lot of patterns corresponding to the fine needle are formed, exposing it to UV and developing it; a step(S3) for processing in order to pointedly slope the tip of the fine needle pattern by cutting the tip of the fine needle pattern; a step(S4,S5) for forming a plating layer on the base and photoresist fine needle pattern image; and a step(S6) for obtaining the base mold from the plating layer in which the fine needle pattern is engraved.
    • 目的:提供一种细针阵列的制造用模具,精细针模的制造方法以及使用该细针模制造的细针阵列,其能够通过将细针的前端形成为细针而获得细针图案 锋利倾斜 构成:精细针模的制造方法包括:用光刻胶涂布基材的上侧的工序(S1) 通过对准形成有与细针相对应的大量图案的掩模将其曝光到紫外线并使其显影的步骤(S2),用于在光致抗蚀剂层上雕刻细针图案; 用于通过切割细针图案的尖端来尖锐地斜切细针图案的尖端的步骤(S3) 用于在基底上形成镀层的步骤(S4,S5)和光致抗蚀剂细针图案图像; 以及从蚀刻细针图案的镀层获得基模的工序(S6)。