会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明专利
    • Sensor device
    • JP5194510B2
    • 2013-05-08
    • JP2007082895
    • 2007-03-27
    • パナソニック株式会社
    • 宜志 竹川裕二 鈴木徹 馬場崇史 奥戸
    • G01C19/56G01J1/02G01J5/20G01P15/08H01L29/84
    • PROBLEM TO BE SOLVED: To provide a sensor device capable of measuring a degree of vacuum in an inside of the sensor device (sealed space). SOLUTION: This sensor device is provided with the sealed space sealed in a vacuum condition, and is provided, in the sealed space, with a sensor part and a vacuum gage for measuring the degree of vacuum in the sealed space. The sealed space is formed by joining a plurality of substrates, and ambient temperature junction is used for the joining. The sensor device is provided, in particular, with a sensor substrate having at least one part of the sensor part, and a frame-like frame part arranged in its outside, a support substrate joined to the frame part over the full circumference of the frame part in the sensor substrate, in one surface side of the sensor substrate, and a sealing substrate joined to the frame part over the full circumference of the frame part in the sensor substrate, in the other surface side of the sensor substrate, and the sealed space is a space formed of the frame part, the support substrate and the sealing substrate. COPYRIGHT: (C)2009,JPO&INPIT
    • 5. 发明专利
    • Acceleration sensor
    • JP4965547B2
    • 2012-07-04
    • JP2008300004
    • 2008-11-25
    • パナソニック株式会社
    • 仁 吉田裕二 鈴木
    • G01P15/125G01P15/18H01L29/84
    • PROBLEM TO BE SOLVED: To eliminate the difference in the detection sensitivity between two directions, without requiring much manufacturing time. SOLUTION: An acceleration sensor includes: movable electrodes 4 and 5 in a rectangular shape; a pair of beam sections 6a and 6b and a pair of beam sections 7a and 7b, connected substantially at the centers of two opposing sides of each of the movable electrodes 4 and 5, to swayingly support the movable electrodes 4 and 5; fixed electrodes facing predetermined gaps, in between to one side and the other side of the surface of each of the movable electrodes 4 and 5, respectively, with respect to the straight lines connecting the pair of beam sections 6a and 6b and the beam sections 7a and 7b as border lines; recesses 11a(13a), 11b(13b), 11c(13c), and 11d(13d), and a recess 12(14), formed on one side and on the other side of the rear face of each of the movable electrodes 4 and 5, with respect to the straight lines connecting the pair of beam sections 6a and 6b and the beam sections 7a and 7b as border lines; and metallic materials 17 embedded in the recesses 12(14). COPYRIGHT: (C)2010,JPO&INPIT
    • 6. 发明专利
    • Acceleration sensor
    • JP4965546B2
    • 2012-07-04
    • JP2008299989
    • 2008-11-25
    • パナソニック株式会社
    • 英喜 上田仁 吉田全史 岡田伸行 茨裕二 鈴木
    • G01P15/125G01P15/18H01L29/84
    • PROBLEM TO BE SOLVED: To eliminate the difference in detection sensitivity between two directions, without requiring manufacturing much time. SOLUTION: The acceleration sensor includes: movable electrodes 4 and 5 in a rectangular shape; a pair of beam sections 6a and 6b and a pair of beam sections 7a and 7b which are connected nearly to the centers of opposing two sides of each of the movable electrodes 4 and 5, to swayingly support the movable electrodes 4 and 5; fixed electrodes facing predetermined gaps, in between to one side and the other side of the surface of each of the movable electrode 4 and 5, respectively, with respect to the straight lines connecting one pair of beam sections 6a and 6b and the beam sections 7a and 7b as border lines; and recesses 11a(13a), 11b(13b), 11c(13c), and 11d(13d) and a recess 12(14), formed on one side and on the other side of the rear face of each of the movable electrodes 4 and 5 respectively, with respect to the straight lines connecting the pair of beam sections 6a and 6b and the beam sections 7a and 7b as border lines. According to such a structure, the detection sensitivities for x-direction and z-direction accelerations can be made equal, without increasing the thickness of the movable electrode 4 and 5. COPYRIGHT: (C)2010,JPO&INPIT