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    • 5. 发明专利
    • Polarization detector
    • JP3377406B2
    • 2003-02-17
    • JP13729397
    • 1997-05-27
    • シャープ株式会社
    • 圭男 吉田裕之 山本
    • G02B6/34G02B6/126H01L31/0232
    • PROBLEM TO BE SOLVED: To provide a polarized light detector low in price, high in coupling efficiency and high in reliability. SOLUTION: A prism coupler 10 is supported by an adhesive layer 13 in a pattern shape which has a linear edge formed and is properly thick. A prism surface and the surface of a light guide layer 7 are processed with plasma. A dielectric layer 6 is an NSG film, a PSG film, a BPSG film, or their laminate. A tapered waveguide 9 is made smooth by polishing, etc., and arranged at a proper position about an optical detector. A protection layer 5 formed of a low-pressure CVD silicon nitride film and a reflection preventive layer 12 formed of a plasma CVD silicon nitride film are provided. The area surrounded with an upper-layer step part 4a formed when an impurity diffusion area 2 of the optical detector is manufactured is made larger than its photodetection area 3 and a light guide element and the photodetection area 3 are provided within the range surrounded with the upper-layer step part 4a.