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1. 发明授权

US08216654B2 Components for a film-forming device and method for cleaning the same 有权
标题翻译：用于成膜装置的部件及其清洁方法
公开(公告)号：US08216654B2
公开(公告)日：2012-07-10
申请号：US10538856
申请日：2004-02-18
申请人： Akisuke Hirata , Shinji Isoda , Yutaka Kadowaki , Katsuhiko Mushiake
发明人： Akisuke Hirata , Shinji Isoda , Yutaka Kadowaki , Katsuhiko Mushiake
IPC分类号： B23B3/02
CPC分类号： C23C14/564 , C23C14/0005 , C23C16/4401 , C23C16/4404 , C23C16/4407 , C23C30/00 , C23F13/00 , C25F5/00 , Y10T428/12139 , Y10T428/12569 , Y10T428/21 , Y10T428/252 , Y10T428/256
摘要： There are provided a film forming equipment component having a structure in which an deposited film d formed on the component can be separated from the component for a time period shorter than the prior art to reduce damage due to a cleaning fluid S, and a method of cleaning such a component. A metal film layer 2 electrochemically less noble than the matrix metal material 1 of the aforementioned component is formed on the surface of the matrix metal material 1 through thermal spraying, vapor depositing, sputtering, laminating or other process. Alternatively, a second metal film layer 3 electrochemically more noble than the aforementioned matrix metal material 1 is formed on the surface of the metal film layer 2 through said thermal spraying or other process. Thus, a local cell is formed between the metal film layer 2 and the matrix metal material 1 or the second metal film layer 3. Therefore, the deposited film d can be separated from the matrix metal material 1 for an extremely shortened time period, without damaging the matrix metal material 1 itself from the cleaning fluid S.
摘要翻译：提供了一种成膜设备部件，其具有这样一种结构，其中在组件上形成的沉积膜d可以比现有技术短的时间段与部件分离，以减少由清洗液S引起的损坏的方法清洗这样一个组件。通过热喷涂，气相沉积，溅射，层压或其它工艺在基体金属材料1的表面上形成电化学上比上述组分的基体金属材料1更不贵的金属膜层2。或者，通过所述热喷涂或其它工艺在金属膜层2的表面上形成比上述基体金属材料1电化学更高的第二金属膜层3。因此，在金属膜层2和基体金属材料1或第二金属膜层3之间形成局部电池。因此，沉积膜d可以在极短的时间内与基体金属材料1分离，而没有从清洗液S破坏基质金属材料1本身。

2. 发明申请

US20110041760A1 METHOD FOR THE PRODUCTION OF WATER-REACTIVE AL FILM AND CONSTITUENT MEMBER FOR FILM-FORMING CHAMBER 审中-公开
标题翻译：水膜反渗膜生产方法及成膜室成型方法
公开(公告)号：US20110041760A1
公开(公告)日：2011-02-24
申请号：US12989974
申请日：2009-04-27
申请人： Yutaka Kadowaki , Tomoko Saitou , Keng Weng Lim , Katsuhiko Mushiake
发明人： Yutaka Kadowaki , Tomoko Saitou , Keng Weng Lim , Katsuhiko Mushiake
IPC分类号： B05C21/00 , C21D1/00 , B32B15/04
CPC分类号： C23C4/12 , C22C21/00 , C23C4/08 , C23C4/18 , C23C4/185 , C23C14/564 , C23C16/4404
摘要： Herein disclosed are a method for the production of a water-reactive Al film comprising the steps of melting a material which contains 4NAl or 5NAl as an Al raw material and added In in an amount ranging from 2 to 5% by mass on the basis of the mass of the Al raw material in such a manner that the composition of the material becomes uniform; thermally spraying the resulting molten material on the surface of a base material according to the flame spraying technique; and solidifying the sprayed molten material through quenching to thus form an Al film in which In is uniformly dispersed in Al crystalline grains; and a constituent member for a film-forming chamber, which is provided, on the surface, with the water-reactive Al film.
摘要翻译：本文公开了一种制备水反应性Al膜的方法，包括以下步骤：将含有4NA1或5NA1的材料作为Al原料熔化，并以基于2〜5质量％的量添加In Al原料的质量使得材料的组成变得均匀; 根据火焰喷涂技术将所得熔融材料热喷涂在基材表面上; 并通过淬火固化喷射的熔融材料，从而形成其中In均匀分散在Al晶粒中的Al膜; 以及在表面上设置有水反应性Al膜的成膜室的构成部件。

3. 发明授权

US08715404B2 Water-reactive Al composite material, water-reactive Al film, process for the production of the Al film, and constituent member for film-forming chamber 有权
标题翻译：水反应性Al复合材料，水反应性Al膜，制备Al膜的方法和成膜室的构成部件
公开(公告)号：US08715404B2
公开(公告)日：2014-05-06
申请号：US12990141
申请日：2009-04-27
申请人： Yutaka Kadowaki , Tomoko Saitou , Keng Weng Lim , Katsuhiko Mushiake
发明人： Yutaka Kadowaki , Tomoko Saitou , Keng Weng Lim , Katsuhiko Mushiake
IPC分类号： C09D1/00 , B05D1/02
CPC分类号： C23C4/06 , C22C21/00 , C22C21/02 , C23C4/08 , C23C4/18 , C23C14/564 , C23C16/4404
摘要： Herein disclosed are a water-reactive Al composite material which comprises 4NAI or 5NAI containing added In in an amount ranging from 2 to 5% by mass; and added Si and Si as an impurity in a total amount ranging from 0.04 to 0.6% by mass on the basis of the amount of Al; a thermally sprayed Al film prepared using this material; a method for the production of such an Al film; and a constituent member for a film-forming chamber, which is provided with this thermally sprayed Al film on the surface thereof.
摘要翻译：本文公开了一种水反应性Al复合材料，其包含含有2〜5质量％的量的添加In的4NAI或5NAI; 基于Al的量，添加总量为0.04〜0.6质量％的Si和Si作为杂质; 使用该材料制备的喷镀Al膜; 制造这种Al膜的方法; 以及在其表面上设置有该喷镀Al膜的成膜室的构成部件。

4. 发明申请

US20110036267A1 WATER-REACTIVE AL COMPOSITE MATERIAL, WATER-REACTIVE AL FILM, PROCESS FOR THE PRODUCTION OF THE AL FILM , AND CONSTITUENT MEMBER FOR FILM-FORMING CHAMBER 有权
标题翻译：水反应性复合材料，水反应性膜，生产铝膜的方法和成膜室的构成部件
公开(公告)号：US20110036267A1
公开(公告)日：2011-02-17
申请号：US12990141
申请日：2009-04-27
申请人： Yutaka Kadowaki , Tomoko Saitou , Keng Weng Lim , Katsuhiko Mushiake
发明人： Yutaka Kadowaki , Tomoko Saitou , Keng Weng Lim , Katsuhiko Mushiake
IPC分类号： C09D1/00 , B05D1/02
CPC分类号： C23C4/06 , C22C21/00 , C22C21/02 , C23C4/08 , C23C4/18 , C23C14/564 , C23C16/4404
摘要： Herein disclosed are a water-reactive Al composite material which comprises 4NAl or 5NAl containing added In in an amount ranging from 2 to 5% by mass; and added Si and Si as an impurity in a total amount ranging from 0.04 to 0.6% by mass on the basis of the amount of Al; a thermally sprayed Al film prepared using this material; a method for the production of such an Al film; and a constituent member for a film-forming chamber, which is provided with this thermally sprayed Al film on the surface thereof.
摘要翻译：本文公开了一种水反应性Al复合材料，其包含含有2〜5质量％的量的添加In的4NA1或5NA1; 基于Al的量，添加总量为0.04〜0.6质量％的Si和Si作为杂质; 使用该材料制备的喷镀Al膜; 制造这种Al膜的方法; 以及在其表面上设置有该喷镀Al膜的成膜室的构成部件。

5. 发明申请

US20060240271A1 A1 composite material being crumbled with water, a1 film and a1 power comprising the material and methods for preparation thereof, constitutional member for film-forming chamber method for recovering film-forming material 有权
标题翻译： A1复合材料被水粉碎，a1膜和a1粉末包含该材料及其制备方法，用于回收成膜材料的成膜室方法
公开(公告)号：US20060240271A1
公开(公告)日：2006-10-26
申请号：US10549034
申请日：2005-03-04
申请人： Akisuke Hirata , Shinji Isoda , Yutaka Kadowaki , Katsuhiko Mushiake
发明人： Akisuke Hirata , Shinji Isoda , Yutaka Kadowaki , Katsuhiko Mushiake
IPC分类号： B22F7/04 , B05D1/08
CPC分类号： B22F1/025 , B22F2999/00 , C23C4/08 , C23C4/185 , Y10S428/933 , Y10S428/937 , Y10T156/19 , Y10T428/12063 , Y10T428/12181 , Y10T428/12681 , Y10T428/12736 , B22F9/082 , B22F1/0085
摘要： In An Al composite material collapsible in the presence of moisture, the external surface of small pieces or powder constructed from a single or a plurality of crystalline grains of Al or an Al alloy is covered with a film of a low melting point metal or alloy selected from the group consisting of In, Sn, combinations of In and Sn, and alloys thereof. The content of the foregoing low melting point metal or alloy ranges from 0.1 to 20% by mass on the basis of the total mass of the composite material. A material obtained by adding a low melting point metal in an amount specified above to, for instance, Al and then fusing and melting the resulting mixture is quenched and solidified within a non-oxidizing atmosphere to thus form an Al composite material. An Al film, an Al spray-coated film and Al powder can be prepared from the foregoing Al composite material. A component member for a film-forming chamber is also provided, which is provided with a water-collapsible Al film on the surface thereof. Film-forming operations are continued over a long period of time using the component member for a film-forming chamber provided with the water-collapsible Al film and then film-forming materials can be recovered from the component member on which the film-forming materials are deposited in a substantial thickness.
摘要翻译：在存在水分的铝复合材料中，由Al或Al合金的单个或多个晶粒构成的小块或粉末的外表面被选择的低熔点金属或合金膜覆盖由In，Sn，In和Sn的组合组成的组及其合金组成。前述低熔点金属或合金的含量基于复合材料的总质量为0.1〜20质量％。将上述量的低熔点金属加入到例如Al中然后使所得混合物熔融和熔融而获得的材料在非氧化性气氛中淬火固化，从而形成Al复合材料。可以由上述Al复合材料制备Al膜，Al喷镀膜和Al粉末。还提供了一种用于成膜室的部件，其表面上设置有水可折叠的Al膜。使用具有水溶性Al膜的成膜室的成分构件长时间地进行成膜操作，然后可以从成膜材料的成膜材料回收成膜材料以相当大的厚度沉积。

6. 发明授权

US08945296B2 Water-reactive Al-based composite material, water-reactive Al-based thermally sprayed film, process for production of such Al-based thermally sprayed film, and constituent member for film-forming chamber 有权
标题翻译：水反应性Al系复合材料，水反应性Al系喷镀膜，这种Al系喷镀膜的制造方法以及成膜室的构成部件
公开(公告)号：US08945296B2
公开(公告)日：2015-02-03
申请号：US13818253
申请日：2011-08-12
申请人： Yutaka Kadowaki , Tomoko Saitou , Katsuhiko Mushiake
发明人： Yutaka Kadowaki , Tomoko Saitou , Katsuhiko Mushiake
IPC分类号： C09D1/00 , B05D1/40 , C22C21/00 , C23C4/06 , C23C14/56 , C23C16/44
CPC分类号： C09D1/00 , C22C21/00 , C23C4/06 , C23C14/564 , C23C16/4404
摘要： Herein provided are a water-reactive Al-based composite material which is characterized in that it is produced by incorporating, into Al, 2.0 to 3.5% by mass of In, 0.2 to 0.5% by mass of Si and 0.13 to 0.25% by mass of Ti, and which can be dissolved in water through the reaction thereof in a water-containing atmosphere; a water-reactive Al-based thermally sprayed film produced using this composite material; a method for the production of this Al-based thermally sprayed film; and a constituent member for a film-forming chamber which is provided with this Al-based thermally sprayed film on the surface thereof.
摘要翻译：本发明提供一种水反应性Al系复合材料，其特征在于，通过将Al，2.0〜3.5质量％的In，0.2〜0.5质量％的Si和0.13〜0.25质量％的Ti，并且其可以在含水气氛中通过其反应溶解在水中; 使用该复合材料制造的水反应性Al系热喷涂膜; 该Al基热喷涂膜的制造方法; 以及在其表面上设置有该Al系喷镀膜的成膜室的构成部件。

7. 发明申请

US20130145961A1 WATER-REACTIVE AL-BASED COMPOSITE MATERIAL, WATER-REACTIVE AL-BASED THERMALLY SPRAYED FILM, PROCESS FOR PRODUCTION OF SUCH AL-BASED THERMALLY SPRAYED FILM, AND CONSTITUENT MEMBER FOR FILM-FORMING CHAMBER 有权
标题翻译：水反应性碱性复合材料，水反应性基于热的喷涂膜，用于生产这种基于AL的热喷涂膜的方法和用于成膜室的构成部件
公开(公告)号：US20130145961A1
公开(公告)日：2013-06-13
申请号：US13818253
申请日：2011-08-12
申请人： Yutaka Kadowaki , Tomoko Saitou , Katsuhiko Mushiake
发明人： Yutaka Kadowaki , Tomoko Saitou , Katsuhiko Mushiake
IPC分类号： C09D1/00
CPC分类号： C09D1/00 , C22C21/00 , C23C4/06 , C23C14/564 , C23C16/4404
摘要： Herein provided are a water-reactive Al-based composite material which is characterized in that it is produced by incorporating, into Al, 2.0 to 3.5% by mass of In, 0.2 to 0.5% by mass of Si and 0.13 to 0.25% by mass of Ti, and which can be dissolved in water through the reaction thereof in a water-containing atmosphere; a water-reactive Al-based thermally sprayed film produced using this composite material; a method for the production of this Al-based thermally sprayed film; and a constituent member for a film-forming chamber which is provided with this Al-based thermally sprayed film on the surface thereof.
摘要翻译：本发明提供一种水反应性Al系复合材料，其特征在于，通过将Al，2.0〜3.5质量％的In，0.2〜0.5质量％的Si和0.13〜0.25质量％的Ti，并且其可以在含水气氛中通过其反应溶解在水中; 使用该复合材料制造的水反应性Al系热喷涂膜; 该Al基热喷涂膜的制造方法; 以及在其表面上设置有该Al系喷镀膜的成膜室的构成部件。

8. 发明申请

US20110200481A1 WATER-COLLAPSIBLE Al COMPOSITE MATERIAL, Al FILM AND Al POWDER CONSISTING OF THIS MATERIAL, AND METHODS FOR PREPARATION THEREOF, AS WELL AS COMPONENT MEMBERS FOR CONSTITUTING FILM-FORMING CHAMBERS AND METHOD FOR THE RECOVERY OF FILM-FORMING MATERIALS 审中-公开
公开(公告)号：US20110200481A1
公开(公告)日：2011-08-18
申请号：US13091866
申请日：2011-04-21
申请人： Akisuke HIRATA , Shinji Isoda , Yutaka Kadowaki , Katsuhiko Mushiake
发明人： Akisuke HIRATA , Shinji Isoda , Yutaka Kadowaki , Katsuhiko Mushiake
IPC分类号： C22C21/00 , C23C4/08
CPC分类号： B22F1/025 , B22F2999/00 , C23C4/08 , C23C4/185 , Y10S428/933 , Y10S428/937 , Y10T156/19 , Y10T428/12063 , Y10T428/12181 , Y10T428/12681 , Y10T428/12736 , B22F9/082 , B22F1/0085
摘要： In An Al composite material collapsible in the presence of moisture, the external surface of small pieces or powder constructed from a single or a plurality of crystalline grains of Al or an Al alloy is covered with a film of a low melting point metal or alloy selected from the group consisting of In, Sn, combinations of In and Sn, and alloys thereof. The content of the foregoing low melting point metal or alloy ranges from 0.1 to 20% by mass on the basis of the total mass of the composite material. A material obtained by adding a low melting point metal in an amount specified above to, for instance, Al and then fusing and melting the resulting mixture is quenched and solidified within a non-oxidizing atmosphere to thus form an Al composite material. An Al film, an Al spray-coated film and Al powder can be prepared from the foregoing Al composite material. A component member for a film-forming chamber is also provided, which is provided with a water-collapsible Al film on the surface thereof. Film-forming operations are continued over a long period of time using the component member for a film-forming chamber provided with the water-collapsible Al film and then film-forming materials can be recovered from the component member on which the film-forming materials are deposited in a substantial thickness.

9. 发明申请

US20110192546A1 WATER-COLLAPSIBLE Al COMPOSITE MATERIAL, Al FILM AND Al POWDER CONSISTING OF THIS MATERIAL, AND METHODS FOR PREPARATION THEREOF, AS WELL AS COMPONENT MEMBERS FOR CONSTITUTING FILM-FORMING CHAMBERS AND METHOD FOR THE RECOVERY OF FILM-FORMING MATERIALS 审中-公开
标题翻译：水溶性Al复合材料，Al膜和Al粉末的材料及其制备方法，以及作为构成膜形成元件的组分成员以及回收成膜材料的方法
公开(公告)号：US20110192546A1
公开(公告)日：2011-08-11
申请号：US13091878
申请日：2011-04-21
申请人： Akisuke HIRATA , Shinji Isoda , Yutaka Kadowaki , Katsuhiko Mushiake
发明人： Akisuke HIRATA , Shinji Isoda , Yutaka Kadowaki , Katsuhiko Mushiake
IPC分类号： B32B38/10 , C23C4/08
CPC分类号： B22F1/025 , B22F2999/00 , C23C4/08 , C23C4/185 , Y10S428/933 , Y10S428/937 , Y10T156/19 , Y10T428/12063 , Y10T428/12181 , Y10T428/12681 , Y10T428/12736 , B22F9/082 , B22F1/0085
摘要： In An Al composite material collapsible in the presence of moisture, the external surface of small pieces or powder constructed from a single or a plurality of crystalline grains of Al or an Al alloy is covered with a film of a low melting point metal or alloy selected from the group consisting of In, Sn, combinations of In and Sn, and alloys thereof. The content of the foregoing low melting point metal or alloy ranges from 0.1 to 20% by mass on the basis of the total mass of the composite material. A material obtained by adding a low melting point metal in an amount specified above to, for instance, Al and then fusing and melting the resulting mixture is quenched and solidified within a non-oxidizing atmosphere to thus form an Al composite material. An Al film, an Al spray-coated film and Al powder can be prepared from the foregoing Al composite material. A component member for a film-forming chamber is also provided, which is provided with a water-collapsible Al film on the surface thereof. Film-forming operations are continued over a long period of time using the component member for a film-forming chamber provided with the water-collapsible Al film and then film-forming materials can be recovered from the component member on which the film-forming materials are deposited in a substantial thickness.
摘要翻译：在存在水分的铝复合材料中，由Al或Al合金的单个或多个晶粒构成的小块或粉末的外表面被选择的低熔点金属或合金膜覆盖由In，Sn，In和Sn的组合组成的组及其合金组成。前述低熔点金属或合金的含量基于复合材料的总质量为0.1〜20质量％。将上述量的低熔点金属加入到例如Al中然后使所得混合物熔融和熔融而获得的材料在非氧化性气氛中淬火固化，从而形成Al复合材料。可以由上述Al复合材料制备Al膜，Al喷镀膜和Al粉末。还提供了一种用于成膜室的部件，其表面上设置有水可折叠的Al膜。使用具有水溶性Al膜的成膜室的成分构件长时间地进行成膜操作，然后可以从成膜材料的成膜材料回收成膜材料以相当大的厚度沉积。

10. 发明授权

US07951463B2 Water collapsible aluminum film 有权
标题翻译：水可折叠铝膜
公开(公告)号：US07951463B2
公开(公告)日：2011-05-31
申请号：US10549034
申请日：2005-03-04
申请人： Akisuke Hirata , Shinji Isoda , Yutaka Kadowaki , Katsuhiko Mushiake
发明人： Akisuke Hirata , Shinji Isoda , Yutaka Kadowaki , Katsuhiko Mushiake
IPC分类号： B32B15/20
CPC分类号： B22F1/025 , B22F2999/00 , C23C4/08 , C23C4/185 , Y10S428/933 , Y10S428/937 , Y10T156/19 , Y10T428/12063 , Y10T428/12181 , Y10T428/12681 , Y10T428/12736 , B22F9/082 , B22F1/0085
摘要： In an Al composite material collapsible in the presence of moisture, the external surface of small pieces or powder constructed from a single or a plurality of crystalline grains of Al or an Al alloy is covered with a film of a low melting point metal or alloy selected from the group consisting of In, Sn, combinations of In and Sn, and alloys thereof. The content of the foregoing low melting point metal or alloy ranges from 0.1 to 20% by mass on the basis of the total mass of the composite material. A component member for a film-forming chamber is also provided, which is provided with a water-collapsible Al film on the surface thereof. Film-forming operations are continued over a long period of time using the component member for a film-forming chamber provided with the water-collapsible Al film and then film-forming materials can be recovered from the component member on which the film-forming materials are deposited in a substantial thickness.
摘要翻译：在存在水分的铝复合材料中，由Al或Al合金的单个或多个晶粒构成的小块或粉末的外表面被选择的低熔点金属或合金膜覆盖由In，Sn，In和Sn的组合组成的组及其合金组成。前述低熔点金属或合金的含量基于复合材料的总质量为0.1〜20质量％。还提供了一种用于成膜室的部件，其表面上设置有水可折叠的Al膜。使用具有水溶性Al膜的成膜室的成分构件长时间地进行成膜操作，然后可以从成膜材料的成膜材料回收成膜材料以相当大的厚度沉积。

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