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1. 发明授权

US4545684A Alignment mark detecting apparatus and method 失效
标题翻译：对准标记检测装置和方法
公开(公告)号：US4545684A
公开(公告)日：1985-10-08
申请号：US435958
申请日：1982-10-22
申请人： Yoichi Kuroki , Yukihiro Yoshinari , Ryozo Hiraga
发明人： Yoichi Kuroki , Yukihiro Yoshinari , Ryozo Hiraga
IPC分类号： H01L21/30 , G03F9/00 , H01L21/027 , G01B11/00
CPC分类号： G03F9/7069 , G03F9/7076
摘要： Alignment is effected between a mask having a plurality of first alignment marks, a wafer having a plurality of second alignment marks, alignment marks for another step juxtaposed with respect to the second alignment marks and a reference mark indicating the boundary between the second alignment marks and the alignment marks for another step. Alignment is effected by detecting device for detecting the first and second alignment marks and the reference mark and putting out a signal stream, and an electrical circuit for effecting the introduction of signals from the signal stream in accordance with a predetermined timing, extracting from the signal stream a signal regarding the reference mark and effecting the introduction of signals from the again detected signal stream at a timing changed in accordance with the signal regarding the reference mark.
摘要翻译：在具有多个第一对准标记的掩模，具有多个第二对准标记的晶片，相对于第二对准标记并置的另一个步骤的对准标记和指示第二对准标记和第二对准标记之间的边界的参考标记之间进行对准对准标记为另一步。通过用于检测第一和第二对准标记和参考标记并输出信号流的检测装置实现对准，以及用于根据预定定时从信号流引入信号的电路，从信号提取流出关于参考标记的信号，并且在根据关于参考标记的信号改变的定时处理来自再次检测到的信号流的信号的引入。

2. 发明授权

US6032879A Fuel injector for use in internal combustion engine 失效
标题翻译：燃油喷射器用于内燃机
公开(公告)号：US6032879A
公开(公告)日：2000-03-07
申请号：US8599
申请日：1998-01-16
申请人： Yasunaga Hamada , Hideo Tatsumi , Kenichi Gunji , Yukihiro Yoshinari
发明人： Yasunaga Hamada , Hideo Tatsumi , Kenichi Gunji , Yukihiro Yoshinari
IPC分类号： F02M51/06
CPC分类号： F02M51/0625 , F02M51/0614 , F02M51/0664 , F02M51/0667 , F02M51/0682
摘要： When an electromagnetic coil receives an electric supply, a stationary core, a yoke, and a movable core form a magnetic circuit. The movable core is attracted to a side of the stationary core against the force provided by a return spring member. A fuel passage for injection of fuel is then opened. Axial direction stepwise differences are formed on the movable core. One end face of the stationary core opposes the stepwise difference through a first gap. A projection portion of the yoke is provided toward an inner side of the yoke. This projection portion opposes a position of a side to provide an axial direction magnetic attraction through a second gap. By the provision of the first and second gaps, plural axial direction magnetic attraction gaps are formed and become a part of the magnetic circuit. By increasing a magnetic attraction efficiency of the movable core, an improvement in performance of a fuel injector and a fuel injector having a compact size and a light weight structure can be attained.
摘要翻译：当电磁线圈接收电源时，固定铁芯，磁轭和可动铁芯形成磁路。可动芯被克服由复位弹簧构件提供的力吸引到固定铁芯的一侧。然后打开用于喷射燃料的燃料通道。在可动铁芯上形成轴向逐步的差异。固定芯的一个端面通过第一间隙与阶梯差相对。轭架的突出部朝向轭架的内侧设置。该突出部分与一侧的位置相对，以通过第二间隙提供轴向磁吸引。通过设置第一和第二间隙，形成多个轴向磁吸引间隙并成为磁路的一部分。通过提高可动铁心的磁吸引效率，可以实现具有小型化和轻质结构的燃料喷射器和燃料喷射器的性能的提高。

3. 发明授权

US4553845A Device for and method of aligning two bodies 失效
标题翻译：两个物体对准的装置和方法
公开(公告)号：US4553845A
公开(公告)日：1985-11-19
申请号：US435960
申请日：1982-10-22
申请人： Yoichi Kuroki , Yukihiro Yoshinari , Ryozo Hiraga
发明人： Yoichi Kuroki , Yukihiro Yoshinari , Ryozo Hiraga
IPC分类号： H01L21/30 , G03F9/00 , H01L21/027 , H01L21/68 , G01B11/00
CPC分类号： G03F9/7088
摘要： An alignment apparatus for aligning a mask having a first mark comprising first mark elements and a wafer having a second mark comprising second mark elements different in width from the first mark elements, comprises a moving mechanism for moving the wafer, a sensor for detecting the first and second marks and putting out a detection signal stream, a signal processing circuit for receiving the detection signal stream, discriminating between the first mark elements and the second mark elements in accordance with their respective pulse widths and creating a discrimination signal and creating a spacing signal regarding a plurality of spacings between the first mark elements and the second mark elements, and a drive circuit for driving the moving mechanism in response to the discrimination signal and the spacing signal. When the first and second mark elements overlap each other or come close to each other and the signals of the two elements cannot be separated, the wafer is moved by a predetermined amount, whereafter detection of the marks is again effected.
摘要翻译：用于对准具有包括第一标记元件的第一标记的掩模和具有包括具有与第一标记元件不同宽度的第二标记元件的第二标记的晶片的对准装置包括用于移动晶片的移动机构，用于检测第一标记元件的传感器第二标记和放出检测信号流，用于接收检测信号流的信号处理电路，根据它们各自的脉冲宽度区分第一标记元件和第二标记元件，并产生鉴别信号并产生间隔信号关于第一标记元件和第二标记元件之间的多个间隔，以及用于响应于判别信号和间隔信号而驱动移动机构的驱动电路。当第一和第二标记元件彼此重叠或彼此靠近并且两个元件的信号不能分离时，晶片移动预定量，此后再次检测到标记。

4. 发明授权

US4504148A System for detecting a signal for aligning two bodies and signal _processing method 失效
标题翻译：用于检测用于对准两个体的信号的系统和信号处理方法
公开(公告)号：US4504148A
公开(公告)日：1985-03-12
申请号：US435959
申请日：1982-10-22
申请人： Yoichi Kuroki , Yukihiro Yoshinari , Ryozo Hiraga
发明人： Yoichi Kuroki , Yukihiro Yoshinari , Ryozo Hiraga
IPC分类号： G01B11/00 , G03F9/00 , H01L21/027 , H01L21/30
CPC分类号： G03F9/7076
摘要： Disclosed is a system to be used with a wafer provided with at least one first alignment mark and a mask provided with a plurality of second alignment marks and which is provided with a detecting device for sensing the first and second alignment marks and putting out detection signals, a signal producing circuit producing a comparison signal, and a signal comparing and producing circuit for comparing the pulse width of the comparison signal with the pulse width of the detection signals and producing a plurality of substitute signals when the pulse width of the detection signal is greater than the pulse width of the comparison signal and wherein when the first and second alignment marks have come close to each other or partly overlapped each other, the respective alignment marks are discriminated.
摘要翻译：公开了一种与设置有至少一个第一对准标记的晶片和设置有多个第二对准标记的掩模一起使用的系统，并且设置有用于感测第一和第二对准标记并输出检测信号的检测装置产生比较信号的信号产生电路，以及用于将比较信号的脉冲宽度与检测信号的脉冲宽度进行比较的信号比较和产生电路，并且当检测信号的脉冲宽度为大于比较信号的脉冲宽度，并且其中当第一和第二对准标记彼此靠近或部分彼此重叠时，鉴别各个对准标记。

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