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1. 发明授权

US07969172B2 Probing method and probing program 有权
标题翻译：探测方法和探测程序
公开(公告)号：US07969172B2
公开(公告)日：2011-06-28
申请号：US12536761
申请日：2009-08-06
申请人： Hideaki Tanaka , Yukihiko Fukasawa
发明人： Hideaki Tanaka , Yukihiko Fukasawa
IPC分类号： G01R31/20
CPC分类号： G01R31/2891
摘要： Disclosed is a probing method including, when the probes are configured to make contact with a chip row including four chips continuously arranged in an oblique direction so that the probe card test four chips at a time, finding a first reference oblique chip row extending in the oblique direction and containing a center chip positioned at the center of the wafer and a plurality of first additional oblique chip rows arranged in parallel with the first reference oblique chip row at an upper side of the first reference oblique chip row, and setting contact positions between the probes and the first oblique chip rows wherein the contact positions are positions of the probes obtained by shifting the probes; setting contact positions between the probes and the second oblique chip rows in an opposite direction to a first step; and setting a plurality of index group and test order.
摘要翻译：本发明公开了一种探测方法，其特征在于，在将所述探针配置为与包含连续配置在倾斜方向上的四个芯片的芯片行进行接触的情况下，使得所述探针卡一次测试四个芯片，并且包含位于晶片中心的中心芯片和多个第一附加倾斜芯片行，该第一附加倾斜芯片行与第一参考斜芯片行平行布置在第一参考斜芯片行的上侧，并且设置在第一参考斜芯片列的上侧之间的接触位置探针和第一倾斜芯片排，其中接触位置是通过移动探针而获得的探针的位置; 在与第一步相反的方向上设置探针与第二倾斜芯片排之间的接触位置; 并设置多个索引组和测试顺序。

2. 发明授权

US4945424A Power switching arrangement for video camera apparatus 失效
标题翻译：摄像机电源开关装置
公开(公告)号：US4945424A
公开(公告)日：1990-07-31
申请号：US305282
申请日：1989-02-01
申请人： Keiichiro Hiroki , Yukihiko Fukasawa , Ken Yamauchi
发明人： Keiichiro Hiroki , Yukihiko Fukasawa , Ken Yamauchi
IPC分类号： H04N5/225 , H04N5/232 , H04N5/44 , H04N5/63 , H04N5/765 , H04N7/18
CPC分类号： H04N7/18 , H04N5/232 , H04N5/765 , Y10S358/906
摘要： Video camera apparatus includes image pick-up equipment, video recording and/or reproducing apparatus, display equipment, and an electronic view finder. In the apparatus, independent power on-off switches are provided in the image pick-up equipment and the video recording and/or reproducing equipment, respectively, and a selecting switch is provided for selecting a television tuner or an external input, and an input of the video recording and/or reproducing equipment. Switching on-off (operation-turn off) of the display equipment or the electronic view finder is automatically controlled in accordance with operation of these switches.
摘要翻译：视频摄像装置包括图像拾取设备，视频记录和/或再现设备，显示设备和电子取景器。在该装置中，分别在摄像设备和视频记录和/或再现设备中提供独立的电源开关，并且提供用于选择电视调谐器或外部输入的选择开关，以及输入的视频记录和/或再现设备。根据这些开关的操作自动控制显示设备或电子取景器的开关（操作关闭）。

3. 发明授权

US6111421A Probe method and apparatus for inspecting an object 有权
标题翻译：用于检查物体的探测方法和装置
公开(公告)号：US6111421A
公开(公告)日：2000-08-29
申请号：US168382
申请日：1998-10-08
申请人： Shigeaki Takahashi , Yukihiko Fukasawa
发明人： Shigeaki Takahashi , Yukihiko Fukasawa
IPC分类号： G01R31/28 , G01R31/02
CPC分类号： G01R31/2868 , G01R31/2887 , G01R31/2867 , G01R31/2874 , G01R31/2891
摘要： A probe method is disclosed which inspects the electrical characteristics of an object to be inspected (wafer W) by bringing the electrodes of the object to be inspected placed on a main chuck and probes of a probe card into contact with each other. The main chuck is movable in the X, Y, Z, and .theta. directions and heated to a predetermined inspection temperature. The main chuck retreats to a position separated from the inspection position during high-temperature inspection. The time (retreat time) during which the main chuck stays retreated is calculated by a retreat time calculating mechanism. A preheat execute determination mechanism determines whether the probe card and probes are to be preheated on the basis of the retreat time. When it is determined that preheating is necessary, a preheat time calculation mechanism calculates the preheat execute time. Preheating is executed during the preheat execute time determined by a preheat end determination mechanism, and misalignment of the probes is corrected.
摘要翻译：公开了一种探针方法，其通过将被检查物体的电极放置在主卡盘和探针卡片的探针上而彼此接触来检查被检查物体（晶片W）的电特性。主夹头可在X，Y，Z和θ方向上移动并加热到预定的检查温度。在高温检查期间，主卡盘退回到与检查位置分离的位置。通过撤退时间计算机制计算主卡盘停留时间（撤退时间）。预热执行确定机构基于撤回时间来确定探针卡和探针是否被预热。当确定需要预热时，预热时间计算机构计算预热执行时间。在由预热端确定机构确定的预热执行时间期间执行预热，并且校正探针的未对准。

4. 发明授权

US06963208B2 Probe device, probe card channel information creation program, and probe card information creation device 有权
标题翻译：探针设备，探测卡通道信息创建程序和探测卡信息创建设备
公开(公告)号：US06963208B2
公开(公告)日：2005-11-08
申请号：US11038026
申请日：2005-01-21
申请人： Yukihiko Fukasawa , Hironobu Abe
发明人： Yukihiko Fukasawa , Hironobu Abe
IPC分类号： G01R1/06 , G01R1/073 , G01R31/28 , G01R31/319 , G01R35/00 , H01L21/66 , G01R31/02
CPC分类号： G01R31/31926 , G01R1/07342 , G01R31/31905 , G01R35/00
摘要： A probe device includes a supporting member for supporting the probe card having a plurality of channels. Each of the channels has a group of probes which are brought into contact with plural electrode pads of one of objects to be inspected. The probe device further includes a channel information creation unit for creating channel information containing a layout of a group of the plurality of channels and an identification number of each of the channels and transmitting the created channel information to a controller, a channel information memory unit for storing the channel information received from the channel information creation unit, and an object layout memory unit for storing layout information of the objects. The controller performs an inspection of the objects based on the channel information stored in the channel information memory unit and the layout information of the objects stored in the object layout memory unit.
摘要翻译：探针装置包括用于支撑具有多个通道的探针卡的支撑构件。每个通道具有一组探针，其与要检查的对象之一的多个电极焊盘接触。探测装置还包括：频道信息创建单元，用于创建包含多个频道的组的布局的信道信息和每个频道的标识号，并将创建的频道信息发送到控制器;频道信息存储单元，用于存储从频道信息创建单元接收的频道信息，以及对象布局存储单元，用于存储对象的布局信息。控制器基于存储在通道信息存储单元中的通道信息和存储在对象布局存储单元中的对象的布局信息来执行对象的检查。

5. 发明申请

US20100033200A1 PROBING METHOD AND PROBING PROGRAM 有权
标题翻译：探索方法和探索计划
公开(公告)号：US20100033200A1
公开(公告)日：2010-02-11
申请号：US12536761
申请日：2009-08-06
申请人： Hideaki Tanaka , Yukihiko Fukasawa
发明人： Hideaki Tanaka , Yukihiko Fukasawa
IPC分类号： G01R31/02 , G01M19/00
CPC分类号： G01R31/2891
摘要： Disclosed is a probing method including, when the probes are configured to make contact with a chip row including four chips continuously arranged in an oblique direction so that the probe card test four chips at a time, finding a first reference oblique chip row extending in the oblique direction and containing a center chip positioned at the center of the wafer and a plurality of first additional oblique chip rows arranged in parallel with the first reference oblique chip row at an upper side of the first reference oblique chip row, and setting contact positions between the probes and the first oblique chip rows wherein the contact positions are positions of the probes obtained by shifting the probes; setting contact positions between the probes and the second oblique chip rows in an opposite direction to a first step; and setting a plurality of index group and test order.
摘要翻译：本发明公开了一种探测方法，其特征在于，在将所述探针配置为与包含连续配置在倾斜方向上的四个芯片的芯片行进行接触的情况下，使得所述探针卡一次测试四个芯片，并且包含位于晶片中心的中心芯片和多个第一附加倾斜芯片行，该第一附加倾斜芯片行与第一参考斜芯片行平行布置在第一参考斜芯片行的上侧，并且设置在第一参考斜芯片列的上侧之间的接触位置探针和第一倾斜芯片排，其中接触位置是通过移动探针而获得的探针的位置; 在与第一步相反的方向上设置探针与第二倾斜芯片排之间的接触位置; 并设置多个索引组和测试顺序。

6. 发明申请

US20050140380A1 Probe device, probe card channel information creation program, and probe card information creation device 有权
公开(公告)号：US20050140380A1
公开(公告)日：2005-06-30
申请号：US11038026
申请日：2005-01-21
申请人： Yukihiko Fukasawa , Hironobu Abe
发明人： Yukihiko Fukasawa , Hironobu Abe
IPC分类号： G01R1/06 , G01R1/073 , G01R31/28 , G01R31/319 , G01R35/00 , H01L21/66 , G01R31/02
CPC分类号： G01R31/31926 , G01R1/07342 , G01R31/31905 , G01R35/00
摘要： A probe device includes a supporting member for supporting the probe card having a plurality of channels. Each of the channels has a group of probes which are brought into contact with plural electrode pads of one of objects to be inspected. The probe device further includes a channel information creation unit for creating channel information containing a layout of a group of the plurality of channels and an identification number of each of the channels and transmitting the created channel information to a controller, a channel information memory unit for storing the channel information received from the channel information creation unit, and an object layout memory unit for storing layout information of the objects. The controller performs an inspection of the objects based on the channel information stored in the channel information memory unit and the layout information of the objects stored in the object layout memory unit.

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