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    • 7. 发明授权
    • Resist pattern, process for the formation of the same, and process for the formation of wiring pattern
    • 抗蚀剂图案,形成相同的工艺,以及形成布线图案的工艺
    • US06340635B1
    • 2002-01-22
    • US09433891
    • 1999-11-04
    • Yuji ToyotaYoshihiro KoshidoMasayuki Hasegawa
    • Yuji ToyotaYoshihiro KoshidoMasayuki Hasegawa
    • H01L2144
    • H05K3/108G03F7/00H01L21/0272H01L21/0274H05K3/0082H05K3/048H05K2203/056Y10S438/947Y10S438/948Y10S438/949Y10S438/951Y10S438/952
    • A process for the formation of a wiring pattern, which includes the steps of: exposing a resist through a photomask, the photomask having a pattern whose line width is equal to or less than a resolution limit; and developing the exposed resist to form a resist pattern having groove depressions on the surface thereof, the depressions not reaching the back of the resist pattern. The resist may be a positive resist in which case the resist pattern is formed on an underplate feed film; a plating metal is precipitated on the feed film in a region not covered by the resist pattern; the resist pattern is stripped after the precipitation; and the feed film is selectively removed in a region not covered by the plating metal. Alternatively, the resist may be a negative resist in which case the resist pattern is formed on a substrate; a metallic material is deposited on the resist pattern and the substrate; and the resist is stripped from the substrate to remove the overlying metallic material.
    • 一种用于形成布线图案的方法,其包括以下步骤:通过光掩模曝光抗蚀剂,所述光掩模具有线宽度等于或小于分辨率限度的图案; 并且显影所述曝光的抗蚀剂以在其表面上形成具有凹槽凹陷的抗蚀剂图案,所述凹陷未到达所述抗蚀剂图案的背面。 抗蚀剂可以是正性抗蚀剂,在这种情况下,抗蚀剂图案形成在底板进料膜上; 电镀金属在未被抗蚀剂图案覆盖的区域中在进料膜上沉淀; 沉淀后去除抗蚀剂图案; 并且在未被电镀金属覆盖的区域中选择性地除去进料膜。 或者,抗蚀剂可以是负性抗蚀剂,在这种情况下,抗蚀剂图案形成在基材上; 在抗蚀剂图案和基板上沉积金属材料; 并且将抗蚀剂从衬底剥离以除去上覆的金属材料。