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1. 发明授权

US08544317B2 Semiconductor processing apparatus with simultaneously movable stages 有权
标题翻译：半导体处理装置具有同步可动级
公开(公告)号：US08544317B2
公开(公告)日：2013-10-01
申请号：US12576526
申请日：2009-10-09
申请人： Yu-Fu Lin , Yung-Cheng Chen , Heng-Jen Lee , Chin-Hsiang Lin
发明人： Yu-Fu Lin , Yung-Cheng Chen , Heng-Jen Lee , Chin-Hsiang Lin
IPC分类号： B23Q17/09 , G01N19/02
CPC分类号： H01L21/68785 , B82Y10/00 , B82Y40/00 , G03F7/70525 , G03F7/70725 , G03F7/70733 , G03F7/70766 , H01J37/3174 , H01L21/68
摘要： A method and apparatus provide for simultaneously moving multiple semiconductor wafers in opposite directions while simultaneously performing processing operations on each of the wafers. The semiconductor wafers are orientated in coplanar fashion and are disposed on stages that simultaneously translate in opposite directions to produce a net system momentum of zero. The die of the respective semiconductor wafers are processed in the same spatial sequence with respect to a global alignment feature of the semiconductor wafer. A balance mass is not needed to counteract the motion of a stage because the opposite motions of the respective stages cancel each other.
摘要翻译：一种方法和装置提供同时在相反方向上移动多个半导体晶片，同时对每个晶片执行处理操作。半导体晶片以共面方式取向，并且设置在同时沿相反方向平移的阶段上，以产生零的系统动量。相对于半导体晶片的全局对准特征，对相应的半导体晶片的管芯进行相同的空间序列处理。不需要平衡质量来抵消舞台的运动，因为各个舞台的相反运动彼此抵消。

2. 发明授权

US07098978B2 Wide-viewing angle liquid crystal display 有权
标题翻译：宽视角液晶显示屏
公开(公告)号：US07098978B2
公开(公告)日：2006-08-29
申请号：US10914351
申请日：2004-08-09
申请人： Chien-Hua Chen , Yu-Fu Lin , Jung-Lieh Hsu , Ruei-Liang Luo
发明人： Chien-Hua Chen , Yu-Fu Lin , Jung-Lieh Hsu , Ruei-Liang Luo
IPC分类号： G02F1/1337
CPC分类号： G02F1/133707 , G02F1/1393
摘要： A wide-viewing angle LCD comprises a first substrate and a second substrate disposed opposite each other with a liquid crystal layer disposed therebetween. A first electrode is disposed on the interior of the first substrate. A first protrusion or slit structure with a first pattern is formed on the first electrode. A second electrode is disposed on the interior of the second substrate. A second protrusion or slit structure with a second pattern is formed on the second electrode. The first and second patterns constitute a third pattern with at least one intersection.
摘要翻译：宽视角LCD包括第一基板和彼此相对布置的第二基板，其间设置有液晶层。第一电极设置在第一基板的内部。在第一电极上形成具有第一图案的第一突起或狭缝结构。第二电极设置在第二基板的内部。具有第二图案的第二突起或狭缝结构形成在第二电极上。第一和第二图案构成具有至少一个交点的第三图案。

3. 发明授权

US08518634B2 Cleaning process for semiconductor device fabrication 有权
标题翻译：半导体器件制造的清洁工艺
公开(公告)号：US08518634B2
公开(公告)日：2013-08-27
申请号：US13022931
申请日：2011-02-08
申请人： Ming-Hsi Yeh , Yu-Fu Lin , Shao-Yen Ku , Chi-Ming Yang , Chin-Hsiang Lin
发明人： Ming-Hsi Yeh , Yu-Fu Lin , Shao-Yen Ku , Chi-Ming Yang , Chin-Hsiang Lin
IPC分类号： G03F7/26 , G03F7/40
CPC分类号： G03F7/40 , H01L21/0273 , H01L21/32139 , H01L21/823814 , H01L21/823828
摘要： A method of making an integrated circuit is provided. The method includes providing a substrate having a photosensitive layer. The photosensitive layer is exposed to a radiation beam. The exposed photosensitive layer is developed in a first chamber. In the first chamber, a cleaning process is performed on the developed photosensitive layer. The cleaning process includes using a rinse solution including at least one of ozone, hydrogen peroxide, and oxalic acid.
摘要翻译：提供一种制造集成电路的方法。该方法包括提供具有感光层的基底。感光层暴露于辐射束。曝光的感光层在第一室中显影。在第一室中，对显影的感光层进行清洁处理。清洁方法包括使用包括臭氧，过氧化氢和草酸中的至少一种的冲洗溶液。

4. 发明申请

US20110083496A1 SEMICONDUCTOR PROCESSING APPARATUS WITH SIMULTANEOUSLY MOVABLE STAGES 有权
标题翻译：半导体加工设备与同时可移动的阶段
公开(公告)号：US20110083496A1
公开(公告)日：2011-04-14
申请号：US12576526
申请日：2009-10-09
申请人： Yu-Fu LIN , Yung-Cheng CHEN , Heng-Jen LEE , Chin-Hsiang LIN
发明人： Yu-Fu LIN , Yung-Cheng CHEN , Heng-Jen LEE , Chin-Hsiang LIN
IPC分类号： G01N33/00 , G01N21/55 , G03B27/52
CPC分类号： H01L21/68785 , B82Y10/00 , B82Y40/00 , G03F7/70525 , G03F7/70725 , G03F7/70733 , G03F7/70766 , H01J37/3174 , H01L21/68
摘要： A method and apparatus provide for simultaneously moving multiple semiconductor wafers in opposite directions while simultaneously performing processing operations on each of the wafers. The semiconductor wafers are orientated in coplanar fashion and are disposed on stages that simultaneously translate in opposite directions to produce a net system momentum of zero. The die of the respective semiconductor wafers are processed in the same spatial sequence with respect to a global alignment feature of the semiconductor wafer. A balance mass is not needed to counteract the motion of a stage because the opposite motions of the respective stages cancel each other.
摘要翻译：一种方法和装置提供同时在相反方向上移动多个半导体晶片，同时对每个晶片执行处理操作。半导体晶片以共面方式取向，并且设置在同时沿相反方向平移的阶段上，以产生零的系统动量。相对于半导体晶片的全局对准特征，对相应的半导体晶片的管芯进行相同的空间序列处理。不需要平衡质量来抵消舞台的运动，因为各个舞台的相反运动彼此抵消。

5. 发明申请

US20050219452A1 Wide-viewing angle liquid crystal display 有权
标题翻译：宽视角液晶显示屏
公开(公告)号：US20050219452A1
公开(公告)日：2005-10-06
申请号：US10914351
申请日：2004-08-09
申请人： Chien-Hua Chen , Yu-Fu Lin , Jung-Lieh Hsu , Ruei-Liang Luo
发明人： Chien-Hua Chen , Yu-Fu Lin , Jung-Lieh Hsu , Ruei-Liang Luo
IPC分类号： G02F1/1337 , G02F1/1333 , G02F1/1343 , G02F1/139
CPC分类号： G02F1/133707 , G02F1/1393
摘要： A wide-viewing angle LCD comprises a first substrate and a second substrate disposed opposite each other with a liquid crystal layer disposed therebetween. A first electrode is disposed on the interior of the first substrate. A first protrusion or slit structure with a first pattern is formed on the first electrode. A second electrode is disposed on the interior of the second substrate. A second protrusion or slit structure with a second pattern is formed on the second electrode. The first and second patterns constitute a third pattern with at least one intersection.
摘要翻译：宽视角LCD包括第一基板和彼此相对布置的第二基板，其间设置有液晶层。第一电极设置在第一基板的内部。在第一电极上形成具有第一图案的第一突起或狭缝结构。第二电极设置在第二基板的内部。具有第二图案的第二突起或狭缝结构形成在第二电极上。第一和第二图案构成具有至少一个交点的第三图案。

6. 发明申请

US20120202156A1 CLEANING PROCESS FOR SEMICONDUCTOR DEVICE FABRICATION 有权
标题翻译：用于半导体器件制造的清洁工艺
公开(公告)号：US20120202156A1
公开(公告)日：2012-08-09
申请号：US13022931
申请日：2011-02-08
申请人： Ming-Hsi Yeh , Yu-Fu Lin , Shao-Yen Ku , Chi-Ming Yang , Chin-Hsiang Lin
发明人： Ming-Hsi Yeh , Yu-Fu Lin , Shao-Yen Ku , Chi-Ming Yang , Chin-Hsiang Lin
IPC分类号： G03F7/20
CPC分类号： G03F7/40 , H01L21/0273 , H01L21/32139 , H01L21/823814 , H01L21/823828
摘要： A method of making an integrated circuit is provided. The method includes providing a substrate having a photosensitive layer. The photosensitive layer is exposed to a radiation beam. The exposed photosensitive layer is developed in a first chamber. In the first chamber, a cleaning process is performed on the developed photosensitive layer. The cleaning process includes using a rinse solution including at least one of ozone, hydrogen peroxide, and oxalic acid.
摘要翻译：提供一种制造集成电路的方法。该方法包括提供具有感光层的基底。感光层暴露于辐射束。曝光的感光层在第一室中显影。在第一室中，对显影的感光层进行清洁处理。清洁方法包括使用包括臭氧，过氧化氢和草酸中的至少一种的冲洗溶液。

7. 发明申请

US20050200782A1 MULTI-DOMAIN VERTICAL ALIGNMENT LIQUID CRYSTAL DISPLAY 审中-公开
标题翻译：多域垂直对准液晶显示
公开(公告)号：US20050200782A1
公开(公告)日：2005-09-15
申请号：US10905932
申请日：2005-01-27
申请人： Chien-Hua Chen , Yu-Fu Lin , Jung-Lieh Hsu
发明人： Chien-Hua Chen , Yu-Fu Lin , Jung-Lieh Hsu
IPC分类号： G02F1/1337
CPC分类号： G02F1/133707 , G02F1/133753 , G02F1/1393
摘要： A multi-domain vertical alignment (MVA) liquid crystal display (LCD) comprising a first substrate, a second substrate and a liquid crystal layer disposed between the first substrate and the second substrate is provided. A plurality of first protrusions including a plurality of radiation-shaped protrusions arranged in stripe is formed over the first substrate. In addition, a plurality of second protrusions including stripe protrusions is formed over the second substrate. The first protrusions and the second protrusions are interlaced correspondingly. Since the radiation-shaped protrusions arranged in stripe are disposed over the first substrate, the liquid crystal molecules of the LCD may have more tilt directions. Thus, the range of the viewing angle of the LCD is increased.
摘要翻译：提供了包括第一基板，第二基板和设置在第一基板和第二基板之间的液晶层的多域垂直取向（MVA）液晶显示器（LCD）。在第一基板上形成包括多个以条状排列的辐射状突起的第一突起。此外，在第二基板上形成包括条纹突起的多个第二突起。第一突起和第二突起相互交错。由于设置在第一基板上的辐射状突起，所以LCD的液晶分子可以具有更多的倾斜方向。因此，LCD的视角的范围增加。

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