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    • 4. 发明申请
    • Substrate inspection device and substrate inspecting method
    • 基板检查装置和基板检查方法
    • US20060017452A1
    • 2006-01-26
    • US11182017
    • 2005-07-15
    • Masami YamamotoYoshio Tsuji
    • Masami YamamotoYoshio Tsuji
    • G01R31/02
    • G01R31/2853G01R31/2812G01R31/309G01R31/311
    • A laser beam irradiation unit irradiates a laser beam on a top surface pattern portion of a wiring to be inspected among plural wirings formed on a substrate, with an intensity high enough to cause laser abrasion or two-photon absorption at the irradiated portion. A D.C. power supply applies, via an ammeter, a predetermined voltage between an electrode portion that traps electrons released from the top surface portion and a contact prove pressed against a bottom surface pattern of the wiring. An open circuit state and a short-circuit state of the wiring are judged using a current value measured in the ammeter. It is thus possible to inspect a wiring for an open circuit and a short-circuit easily without bringing a probe into contact with the lands of wirings on a top surface of the substrate to be inspected.
    • 激光束照射单元将激光束照射到形成在基板上的多个布线中的待检查布线的顶面图案部分上,其强度足够高以致在照射部分处引起激光磨损或双光子吸收。 直流电源通过电流计施加在捕获从顶表面部分释放的电子的电极部分和接触部件之间的预定电压,该接触部被压靠在布线的底表面图案上。 使用在电流表中测量的电流值来判断布线的开路状态和短路状态。 因此,可以容易地检查用于开路的布线和短路的布线,而不会使探针与要检查的基板的顶表面上的布线区域接触。
    • 6. 发明授权
    • Substrate inspection device and substrate inspecting method
    • 基板检查装置和基板检查方法
    • US07202690B2
    • 2007-04-10
    • US11182017
    • 2005-07-15
    • Masami YamamotoYoshio Tsuji
    • Masami YamamotoYoshio Tsuji
    • G01R31/00G01R31/305G01R31/302G01R31/02
    • G01R31/2853G01R31/2812G01R31/309G01R31/311
    • A laser beam irradiation unit irradiates a laser beam on a top surface pattern portion of a wiring to be inspected among plural wirings formed on a substrate, with an intensity high enough to cause laser abrasion or two-photon absorption at the irradiated portion. A D.C. power supply applies, via an ammeter, a predetermined voltage between an electrode portion that traps electrons released from the top surface portion and a contact prove pressed against a bottom surface pattern of the wiring. An open circuit state and a short-circuit state of the wiring are judged using a current value measured in the ammeter. It is thus possible to inspect a wiring for an open circuit and a short-circuit easily without bringing a probe into contact with the lands of wirings on a top surface of the substrate to be inspected.
    • 激光束照射单元将激光束照射到形成在基板上的多个布线中的待检查布线的顶面图案部分上,其强度足够高以致在照射部分处引起激光磨损或双光子吸收。 直流电源通过电流计施加在捕获从顶表面部分释放的电子的电极部分和接触部件之间的预定电压,该接触部被压靠在布线的底表面图案上。 使用在电流表中测量的电流值来判断布线的开路状态和短路状态。 因此,可以容易地检查用于开路的布线和短路的布线,而不会使探针与要检查的基板的顶表面上的布线区域接触。
    • 7. 发明授权
    • Forced air unit
    • 强制空气装置
    • US4313493A
    • 1982-02-02
    • US112230
    • 1980-01-15
    • Akira KawaseMasao TakouchiYoshio TsujiSadao MitsumeriSusumu Miyazaki
    • Akira KawaseMasao TakouchiYoshio TsujiSadao MitsumeriSusumu Miyazaki
    • F24F1/00F28D1/02F24H3/06
    • F28D1/024F24F1/0007F24F1/0022Y10S165/303
    • A forced air unit comprising a front cover member, a rear cover member connected to and spaced from said front cover member defining a unit housing therebetween having a width and a housing periphery. A heat exchanger is disposed around the entire periphery of the housing with a centrifugal fan rotatably mounted in the housing with an axis extending in the width direction thereof. The fan has a central inlet area and an annular outlet area with a motor mounted in the central inlet area for rotating the fan to draw air axially inwardly toward the inlet area and radially outwardly through the annular outlet area. A fan cover is disposed over the fan within the housing with an inlet opening positioned over the inlet area of the fan. The fan housing has an outlet opening covering a portion of the housing periphery with the remainder of the housing periphery acting as an inlet.
    • 一种强制空气单元,包括前盖构件,与所述前盖构件连接并与所述前盖构件间隔开的后盖构件,其间具有宽度和外壳周边的单元壳体。 热交换器围绕壳体的整个周边设置有离心风扇,该离心式风扇可旋转地安装在壳体中,轴向在其宽度方向上延伸。 风扇具有中心入口区域和环形出口区域,电机安装在中心入口区域中,用于使风扇旋转以沿空气轴向向内朝向入口区域抽吸空气,并且径向向外通过环形出口区域。 风扇盖设置在壳体内的风扇上方,其中入口开口位于风扇的入口区域上方。 风扇壳体具有覆盖壳体周边的一部分的出口开口,壳体周边的其余部分用作入口。
    • 8. 发明授权
    • Heat-sensitive copying method for preparation of printing stencils
    • 用于制备印刷模版的热敏复印方法
    • US4091727A
    • 1978-05-30
    • US593185
    • 1975-07-07
    • Takanori HasegawaYoshio Tsuji
    • Takanori HasegawaYoshio Tsuji
    • B41N1/24B41C1/14
    • B41C1/148
    • A stencil sheet having a thin stretched thermoplastic resin film supported on an ink pervious porous substrate is positioned on an original manuscript in a manner such that the film may be in close contact with the imaged side of the manuscript. The assembly is then irradiated by a light which is rich in rays having a wavelength ranging from 0.7 to 1.2 microns and has a flash duration of from 10.sup.-4 to 10.sup.-3 second. A xenon-filled electronic flash discharge tube is found to be the most suitable light source. Stencil openings formed thereby on the film surface are excellent in definition and free from marginal swelling therearound. The stencil prepared by this method can produce copies of 2000 or more which correspond exactly with the original manuscript.
    • 支撑在油墨透过性多孔质基材上的具有薄拉伸热塑性树脂薄膜的蜡纸以这样的方式被定位在原稿上,使得薄膜可以与原稿的成像面紧密接触。 然后将该组件用富含光线的光照射,该光线具有0.7-1.2微米的波长,并且具有10-4至10-3秒的闪光持续时间。 发现充满氙气的电子闪光放电管是最合适的光源。 因此,在膜表面上形成的模板孔的定义优异且不存在边缘溶胀。 通过该方法制备的模具可以生产2000份或更多份与原稿完全对应的副本。