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    • 3. 发明授权
    • Reflection type optical apparatus
    • 反射式光学装置
    • US5039214A
    • 1991-08-13
    • US333464
    • 1989-04-05
    • Shin-ichi NagataYoshinori SezakiTomiji Hotta
    • Shin-ichi NagataYoshinori SezakiTomiji Hotta
    • G02B21/00G02B21/08G02B27/28
    • G02B21/082G02B21/00G02B27/28
    • A beam splitter, a first polarizing plate and a quarterwave plate are provided in that order on the optical axis of an image formation lens between an image formation plane and an objective lens. The first polarizing plate comprises a non-polarizing region for transmitting illuminating light and reflected light and a polarizing region provided to enclose the non-polarizing region for transmitting the illuminating light but limiting the reflected light which is rendered out of phase with the illuminating light by the quarterwave plate. Thus, the angular aperture of the illuminating light can be increased and an irradiated plane can be observed with no hindrance even if the same is inferior in flatness, while illuminance of the irradiated plane can be sufficiently ensured. At the same time, the angular aperture of the objective lens can be reduced, and the depth of focus Q is increased.
    • 光束分离器,第一偏振板和四分之一波片在该图像形成透镜的光轴上在图像形成平面和物镜之间依次设置。 第一偏振板包括用于透射照明光和反射光的非偏振区域和偏振区域,该偏振区域被设置为包围用于透射照明光的非偏振区域,但是限制与照明光不同相位的反射光 四分之一波片。 因此,能够提高照明光的角度孔径,即使在平坦度上差的同时也能够无障碍地观察照射面,能够充分确保照射面的照度。 同时,可以减小物镜的角度孔径,并且增加焦点深度Q。