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1. 发明授权

US5523568A Image signal processing method in scanning electron microscope and device thereof 失效
标题翻译：扫描电子显微镜中的图像信号处理方法及其装置
公开(公告)号：US5523568A
公开(公告)日：1996-06-04
申请号：US149577
申请日：1993-11-09
申请人： Yoshiharu Ichikawa , Yoshiaki Kashimura
发明人： Yoshiharu Ichikawa , Yoshiaki Kashimura
IPC分类号： G06T1/00 , G06T5/00 , H01J37/147 , H01J37/22 , H01J37/28 , H01J37/256
CPC分类号： H01J37/222 , H01J2237/226 , H01J2237/282
摘要： An image signal processing method in which inspection of a specimen is performed based on the image data collected for the wafer or other specimen by scanning a pilot specimen in a scanning electron microscope, prior to the scanning of the specimen to be inspected. The number of scans of the specimen to be inspected can be reduced, the dose of the primary electrons irradiated can be reduced, and high-quality image data can be obtained in a short time. For a pilot specimen, the image data are collected by making multiple scans in a scanning electron microscope 1. From the obtained image data, the evaluated relative feature function ERFF of an electro-optical cylinder of a scanning electron microscope 1 is calculated (step S01). For the specimen as the inspection object, the image data are collected in a number of scans less than that for the aforementioned pilot specimen in a scanning electron microscope 1. The degraded image of the image data is then corrected using the evaluated relative feature function ERFF of the electro-optical cylinder of the scanning electron microscope (step S02).
摘要翻译：一种图像信号处理方法，其中在扫描待检查样本之前，通过在扫描电子显微镜中扫描导向样本，基于对晶片或其他样本采集的图像数据进行样本的检查。可以减少要检查的样本的扫描次数，可以减少照射的一次电子的剂量，并且可以在短时间内获得高质量的图像数据。对于试验样本，通过在扫描电子显微镜1中进行多次扫描来收集图像数据。从所获得的图像数据中，计算扫描电子显微镜1的电光柱的评估的相对特征函数ERFF（步骤S01 ）。对于作为检查对象的样本，在扫描电子显微镜1中，以比上述导频样本小的扫描次数来收集图像数据。然后使用评估的相对特征函数ERFF来校正图像数据的劣化图像的扫描电子显微镜（步骤S02）。

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