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1. 发明授权

US5679960A Compact display device 失效
标题翻译：紧凑型显示设备
公开(公告)号：US5679960A
公开(公告)日：1997-10-21
申请号：US296927
申请日：1994-08-31
申请人： Yoshiaki Akama
发明人： Yoshiaki Akama
IPC分类号： H01J1/304 , H01J3/02 , H01J9/02 , H01J29/04 , H01J31/12 , H01L29/80 , H01J1/46
CPC分类号： H01J9/025 , H01J3/022
摘要： A device for emitting electrons, comprising a substrate, an insulating film formed on a surface of the substrate and having a recess, an emitter electrode formed on the insulating film and having an edge portion located at the recess, the edge portion of the emitter electrode being formed in the form of an arch within a plane perpendicular to the surface of the substrate so as to be sharpened toward a distal end of the emitter electrode, the edge portion of the emitter electrode being sharpened also in a planar direction parallel to the surface of the substrate toward the distal end of the emitter electrode so as to have a linear portion at the distal end, and the edge portion of the emitter electrode being adapted to emit electrons from the linear portion when an electric field is applied to the edge portion of the emitter electrode, and a gate electrode formed on the insulating structure and having an edge portion located at the recess and opposing the edge portion of the emitter electrode via a gap, the edge portion of the gate electrode being adapted to apply an electric field to the linear portion of the emitter electrode via the gap when a potential difference is given between the gate electrode and the emitter electrode.
摘要翻译：一种用于发射电子的装置，包括基板，形成在基板的表面上并具有凹部的绝缘膜，形成在绝缘膜上并具有位于凹部处的边缘部分的发射极，发射极的边缘部分在与基板的表面垂直的平面内形成拱形，朝向发射电极的远端被锐化，发射电极的边缘部分也在平行于表面的平面方向上被锐化的基板朝向发射极的远端，以便在远端具有直线部分，并且当电场施加到边缘部分时，发射电极的边缘部分适于从线性部分发射电子以及形成在所述绝缘结构上并具有位于所述凹部处的边缘部分并且与所述发射极电极的边缘部分相对的栅电极经由间隙经过栅极电极和发射极电极之间的电位差时，栅电极的边缘部分经由该间隙向发射电极的直线部分施加电场。

2. 发明授权

US5509843A Method and apparatus for manufacturing needle shaped materials and method for manufacturing a microemitter 失效
标题翻译：用于制造针状材料的方法和装置及其制造方法
公开(公告)号：US5509843A
公开(公告)日：1996-04-23
申请号：US246332
申请日：1994-05-19
申请人： Yoshiaki Akama
发明人： Yoshiaki Akama
IPC分类号： H01J1/30 , H01J1/304 , H01J3/02 , H01J9/02
CPC分类号： H01J9/025 , H01J3/022 , H01J2209/0226
摘要： A method and apparatus exists for manufacturing needle-shaped materials for use as microemitters, wherein a light beam output from a light source is split into a plurality of beams and the split light beams are focused by an optical system and directed into a chamber having a gas containing electroconductive molecules. The electroconductive molecules are degraded through excitation by the beams directed into the chamber to deposit needle-shaped materials on a substrate disposed in the chamber. By so doing, a plurality of needle-shaped materials are simultaneously produced on the substrate in accordance with a corresponding number of beams obtained through splitting.
摘要翻译：存在用于制造用作微型显示器的针状材料的方法和装置，其中从光源输出的光束被分成多个光束，并且分束光束被光学系统聚焦并被引导到具有含有导电分子的气体。导电分子通过被引导到室中的光束的激发而降解，以将针状材料沉积在设置在腔室中的基底上。通过这样做，根据通过分割获得的相应数量的光束在基板上同时产生多个针状材料。

3. 发明授权

US5903092A Device for emitting electrons 失效
标题翻译：用于发射电子的装置
公开(公告)号：US5903092A
公开(公告)日：1999-05-11
申请号：US443320
申请日：1995-05-17
申请人： Yoshiaki Akama
发明人： Yoshiaki Akama
IPC分类号： H01J1/304 , H01J9/02 , H01J1/00
CPC分类号： H01J9/022 , H01J1/304 , H01J2201/30403 , H01J2329/00
摘要： A device comprising a conductor and an emitter electrode for emitting electrons formed on the conductor, the emitter electrode including a mass of a plurality of columnar crystals each containing .beta.-tungsten and having a sharpened tip end portion for emitting electrons, the plurality of columnar crystals being put in contact with one another.
摘要翻译：一种包括用于发射形成在导体上的电子的导体和发射电极的装置，发射电极包括多个柱状晶体的质量，每个柱状晶体包含β-钨，并且具有用于发射电子的尖锐尖端部分，多个柱状晶体互相接触。

4. 发明授权

US06541287B2 Temperature measuring method and apparatus, measuring method for the thickness of the formed film, measuring apparatus for the thickness of the formed film thermometer for wafers 失效
公开(公告)号：US06541287B2
公开(公告)日：2003-04-01
申请号：US09261972
申请日：1999-03-03
申请人： Tomomi Ino , Akira Soga , Yoshiaki Akama
发明人： Tomomi Ino , Akira Soga , Yoshiaki Akama
IPC分类号： G01R3226
CPC分类号： G01J5/0003
摘要： A temperature measuring apparatus, comprises a light splitting section for splitting the light radiated from a substrate into plural light components having wavelengths over a predetermined wavelength region, a detection section for detecting the intensities of the light components obtained by the light splitting section, an integrated value calculating section for calculating an integrated value of radiation intensity by cumulatively adding the intensities of the light components detected by the detecting section, and a surface temperature calculating section for calculating the surface temperature of the substrate from the integrated value, on the basis of reference data representing the relation between the temperature and the integrated value.

5. 发明授权

US06780657B2 Temperature measuring method and apparatus, measuring method for the thickness of the formed film, measuring apparatus for the thickness of the formed film thermometer for wafers 失效
标题翻译：温度测量方法和装置，成膜厚度的测量方法，用于晶片的成型薄膜温度计的厚度的测量装置
公开(公告)号：US06780657B2
公开(公告)日：2004-08-24
申请号：US10206186
申请日：2002-07-29
申请人： Tomomi Ino , Akira Soga , Yoshiaki Akama
发明人： Tomomi Ino , Akira Soga , Yoshiaki Akama
IPC分类号： H01L2166
CPC分类号： G01J5/0003
摘要： A temperature measuring apparatus, comprises a light splitting section for splitting the light radiated from a substrate into plural light components having wavelengths over a predetermined wavelength region, a detection section for detecting the intensities of the light components obtained by the light splitting section, an integrated value calculating section for calculating an integrated value of radiation intensity by cumulatively adding the intensities of the light components detected by the detecting section, and a surface temperature calculating section for calculating the surface temperature of the substrate from the integrated value, on the basis of reference data representing the relation between the temperature and the integrated value.
摘要翻译：一种温度测量装置，包括：分光部分，用于将从衬底辐射的光分成具有预定波长区域上的波长的多个光分量;检测部分，用于检测由光分离部分获得的光分量的强度，值计算部分，用于通过累积地加上由检测部分检测的光分量的强度来计算辐射强度的积分值;以及表面温度计算部分，用于根据参考值从积分值计算衬底的表面温度表示温度和积分值之间关系的数据。

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