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    • 2. 发明授权
    • Integrated sensor
    • 集成传感器
    • US5756899A
    • 1998-05-26
    • US846936
    • 1997-04-30
    • Seiichi UgaiYasunori ShojiYasushi Shimizu
    • Seiichi UgaiYasunori ShojiYasushi Shimizu
    • G01F23/14G01D21/00G01D21/02G01F1/38G01F23/18G01L9/00G01L13/06G01L19/00G01L19/06G01N27/06G01N33/18G01L7/00
    • G01L9/0072G01F1/383G01F23/18G01L19/0092G01L19/0627G01N33/18
    • The first glass substrate having the first pressure admitting entrance for leading the pressure of fluid to be measured, is arranged at a side of a diaphragm of a pressure sensor, for measuring differential pressure. The second glass substrate is arranged at the side opposite to the first glass substrate, a spacer being sandwiched therebetween. The second pressure admitting entrance is formed at the second glass substrate, at the position opposite to the first presser admitting entrance of the first glass substrate. The first conductive film and the second conductive film are formed on two surfaces facing to each other, of the first and second glass substrates, respectively. By measuring the specific conductance and the dielectric constant of the object fluid between the two conductive films, these physical constants indicating the quality of the fluid, the quality of the fluid can be also detected. Thus, it becomes possible to realize and provide an integrated sensor capable of measuring the differential pressure (flow rate) and the quality of fluid by using one transmitter.
    • 具有用于引导要测量的流体的压力的第一加压入口的第一玻璃基板布置在用于测量压差的压力传感器的隔膜的一侧。 第二玻璃基板布置在与第一玻璃基板相对的一侧,夹在其间的间隔件。 第二加压入口形成在第二玻璃基板的与第一玻璃基板的第一加压件入口相对的位置处。 第一导电膜和第二导电膜分别形成在彼此面对的第一和第二玻璃基板的两个表面上。 通过测量两个导电膜之间的物体流体的比电导率和介电常数,这些物理常数表示流体的质量,也可以检测流体的质量。 因此,可以实现并提供能够通过使用一个发射器来测量差压(流量)和流体质量的集成传感器。