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    • 1. 发明申请
    • Nitride semiconductor light-emitting device and method for fabrication thereof
    • 氮化物半导体发光器件及其制造方法
    • US20060192247A1
    • 2006-08-31
    • US11352336
    • 2006-02-13
    • Yasuhito UrashimaKatsuki Kusunoki
    • Yasuhito UrashimaKatsuki Kusunoki
    • H01L29/792
    • H01L33/20
    • A nitride semiconductor light-emitting device includes a substrate and a nitride semiconductor layer including a light-emitting layer stacked on the substrate, wherein a normal line relative to a lateral face of the nitride semiconductor layer is not perpendicular to a normal line relative to a principal plane of the substrate. A method for the production of a nitride semiconductor light-emitting device that includes a substrate and a nitride semiconductor layer including a light-emitting layer stacked on the substrate includes the steps of covering a first surface of the nitride semiconductor layer with a mask provided with a prescribed pattern, removing the nitride semiconductor layer in regions to be divided into component devices till the substrate, subjecting the nitride semiconductor layer to wet-etching treatment and dividing the nitride semiconductor layer into the component devices.
    • 氮化物半导体发光器件包括衬底和包括堆叠在衬底上的发光层的氮化物半导体层,其中相对于氮化物半导体层的侧面的法线不垂直于法线 基板的主平面。 一种生产氮化物半导体发光器件的方法,该氮化物半导体发光器件包括衬底和包括堆叠在衬底上的发光层的氮化物半导体层,包括以下步骤:用设置有掩模的掩模覆盖氮化物半导体层的第一表面 规定的图案,将要分割成分量器件的区域中的氮化物半导体层除去直到基板,对氮化物半导体层进行湿蚀刻处理并将氮化物半导体层分割成部件器件。
    • 2. 发明授权
    • Group III nitride semiconductor multilayer structure
    • III族氮化物半导体多层结构
    • US07935955B2
    • 2011-05-03
    • US10586543
    • 2005-01-25
    • Yasuhito Urashima
    • Yasuhito Urashima
    • H01L29/04H01L29/06H01L31/102
    • H01L21/02458H01L21/0237H01L21/02378H01L21/0243H01L21/0254H01L21/0262H01L21/02658H01L33/007
    • An object of the present invention is to provide a Group III nitride semiconductor multilayer structure having a smooth surface and exhibiting excellent crystallinity, which multilayer structure employs a low-cost substrate that can be easily processed. Another object is to provide a Group III nitride semiconductor light-emitting device comprising the multilayer structure.The inventive Group III nitride semiconductor multilayer structure comprises a substrate; an AlxGa1-xN (0≦x≦1) buffer layer which is provided on the substrate and has a columnar or island-like crystal structure; and an AlxInyGa1-x-yN (0≦x≦1, 0≦y≦1, 0≦x+y≦1) single-crystal layer provided on the buffer layer, wherein the substrate has, on its surface, non-periodically distributed grooves having an average depth of 0.01 to 5 μm.
    • 本发明的目的是提供一种具有光滑表面并具有优异结晶度的III族氮化物半导体多层结构,该多层结构采用易于加工的低成本基板。 另一个目的是提供一种包括多层结构的III族氮化物半导体发光器件。 本发明的III族氮化物半导体多层结构包括基底; Al x Ga 1-x N(0≦̸ x≦̸ 1)缓冲层,其设置在基板上并具有柱状或岛状晶体结构; 以及设置在缓冲层上的单晶层,其中所述衬底在其表面上具有非周期性的(例如, 平均深度为0.01〜5μm的分布槽。
    • 3. 发明授权
    • Nitride semiconductor light-emitting device and method for fabrication thereof
    • 氮化物半导体发光器件及其制造方法
    • US07803648B2
    • 2010-09-28
    • US11885974
    • 2006-02-15
    • Yasuhito Urashima
    • Yasuhito Urashima
    • H01L21/00H01L21/36H01L21/20
    • H01L33/20H01L33/32H01L33/46
    • A nitride semiconductor light-emitting device includes a substrate, a nitride semiconductor layer incorporating therein a first electroconductive semiconductor layer, a light-emitting layer and a second electroconductive semiconductor layer, a transparent electrode contiguous to at least part of a first surface of the second electroconductive semiconductor layer, and a second electrode contiguous to the first electroconductive semiconductor layer; wherein the substrate has a first surface thereof provided with a first region exposed by removal of a first part of the nitride semiconductor layer in a peripheral part of the device and a second region exposed by removal of at least a second part of the nitride semiconductor layer contiguous to the transparent electrode except the peripheral part of the device till the substrate. A method for the production of the device includes removing a first part of the nitride semiconductor layer in a peripheral part of the device till the substrate is exposed to form a first exposed region thereof and removing at least a second part of the nitride semiconductor layer contiguous to the transparent electrode except the peripheral part of the device till the substrate is reached to form a second exposed region thereof, wherein the steps are taken by combining the removal with a laser and the removal by wet etching.
    • 氮化物半导体发光器件包括衬底,其中结合有第一导电半导体层的氮化物半导体层,发光层和第二导电半导体层,与第二导电半导体层的第一表面的至少一部分相邻的透明电极 导电半导体层和与第一导电半导体层相邻的第二电极; 其中所述衬底具有第一表面,所述第一表面设置有通过在所述器件的周边部分中去除所述氮化物半导体层的第一部分而暴露的第一区域,以及通过去除所述氮化物半导体层的至少第二部分而暴露的第二区域 邻近透明电极,除了器件的周边部分直到基板。 一种制造该器件的方法包括去除器件周边部分中的氮化物半导体层的第一部分,直到该衬底暴露以形成其第一暴露区域,并且去除至少第二部分氮化物半导体层的连续 到除了设备的周边部分之外的透明电极,直到到达基板以形成其第二暴露区域,其中通过将去除与激光组合并通过湿法蚀刻去除来采取这些步骤。
    • 4. 发明授权
    • Gallium nitride-based semiconductor light emitting device and process for its production
    • 氮化镓基半导体发光器件及其制造方法
    • US07479663B2
    • 2009-01-20
    • US11519148
    • 2006-09-12
    • Yasuhito Urashima
    • Yasuhito Urashima
    • H01L27/15
    • H01L33/405H01L33/32
    • It is an object of the present invention to inhibit exposure of Ag in Ag-employing reflective electrodes caused by microdefects generated during the manufacturing process, and to prevent reduction in light emission output and deterioration in current-voltage characteristics resulting from shorting of the light emitting device.The semiconductor light emitting device comprises an n-type semiconductor layer, a light emitting layer and a p-type semiconductor layer in that order on a substrate, with a negative electrode and positive electrode each formed in contact with the n-type semiconductor layer and p-type semiconductor layer, respectively. The positive electrode comprises at least a contact metal layer composed of at least one type of metal selected from the group consisting of Pt, Ir, Rh, Pd, Ru and Re or their alloy in contact with the p-type semiconductor layer, a reflective layer composed of a metal or alloy containing Ag as the main component on the contact layer, and one or more protective metal layers containing no Ag, covering the top and side surfaces of the reflective layer.
    • 本发明的目的是抑制由制造过程中产生的微缺陷引起的Ag反射电极中的Ag的暴露,并且防止发光输出的减少和由发光的短路导致的电流 - 电压特性的劣化 设备。 半导体发光器件在衬底上依次包括n型半导体层,发光层和p型半导体层,其中负极和正极各自形成为与n型半导体层接触, p型半导体层。 正极包括至少一种由选自Pt,Ir,Rh,Pd,Ru和Re中的至少一种金属或与p型半导体层接触的合金构成的接触金属层,反射 由在接触层上含有Ag作为主要成分的金属或合金构成的层和覆盖反射层的顶面和侧面的不含Ag的一个以上的保护金属层。
    • 5. 发明申请
    • Gallium nitride-based semiconductor light emitting device and process for its production
    • 氮化镓基半导体发光器件及其制造方法
    • US20070057272A1
    • 2007-03-15
    • US11519148
    • 2006-09-12
    • Yasuhito Urashima
    • Yasuhito Urashima
    • H01L33/00
    • H01L33/405H01L33/32
    • It is an object of the present invention to inhibit exposure of Ag in Ag-employing reflective electrodes caused by microdefects generated during the manufacturing process, and to prevent reduction in light emission output and deterioration in current-voltage characteristics resulting from shorting of the light emitting device. The semiconductor light emitting device comprises an n-type semiconductor layer, a light emitting layer and a p-type semiconductor layer in that order on a substrate, with a negative electrode and positive electrode each formed in contact with the n-type semiconductor layer and p-type semiconductor layer, respectively. The positive electrode comprises at least a contact metal layer composed of at least one type of metal selected from the group consisting of Pt, Ir, Rh, Pd, Ru and Re or their alloy in contact with the p-type semiconductor layer, a reflective layer composed of a metal or alloy containing Ag as the main component on the contact layer, and one or more protective metal layers containing no Ag, covering the top and side surfaces of the reflective layer.
    • 本发明的目的是抑制由制造过程中产生的微缺陷引起的Ag反射电极中的Ag的暴露,并且防止发光输出的降低和由发光的短路引起的电流 - 电压特性的劣化 设备。 半导体发光器件在衬底上依次包括n型半导体层,发光层和p型半导体层,其中负极和正极各自形成为与n型半导体层接触, p型半导体层。 正极包括至少一种由选自Pt,Ir,Rh,Pd,Ru和Re中的至少一种金属或与p型半导体层接触的合金构成的接触金属层,反射 由在接触层上含有Ag作为主要成分的金属或合金构成的层和覆盖反射层的顶面和侧面的不含Ag的一个以上的保护金属层。
    • 7. 发明申请
    • Group III Nitride Semiconductor Multilayer Structure
    • III族氮化物半导体多层结构
    • US20080230780A1
    • 2008-09-25
    • US10586543
    • 2005-01-25
    • Yasuhito Urashima
    • Yasuhito Urashima
    • H01L33/00H01L21/205H01L29/24
    • H01L21/02458H01L21/0237H01L21/02378H01L21/0243H01L21/0254H01L21/0262H01L21/02658H01L33/007
    • An object of the present invention is to provide a Group III nitride semiconductor multilayer structure having a smooth surface and exhibiting excellent crystallinity, which multilayer structure employs a low-cost substrate that can be easily processed. Another object is to provide a Group III nitride semiconductor light-emitting device comprising the multilayer structure.The inventive Group III nitride semiconductor multilayer structure comprises a substrate; an AlxGa1-xN (0≦x≦1) buffer layer which is provided on the substrate and has a columnar or island-like crystal structure; and an AlxInyGa1-x-yN (0≦x≦1, 0≦y≦1, 0≦x+y≦1) single-crystal layer provided on the buffer layer, wherein the substrate has, on its surface, non-periodically distributed grooves having an average depth of 0.01 to 5 μm.
    • 本发明的目的是提供一种具有光滑表面并具有优异结晶度的III族氮化物半导体多层结构,该多层结构采用易于加工的低成本基板。 另一个目的是提供一种包括多层结构的III族氮化物半导体发光器件。 本发明的III族氮化物半导体多层结构包括基底; 设置在基板上并具有柱状或岛状晶体结构的Al x Ga 1-x N(0 <= x <= 1)缓冲层; 和(1≤y≤1,0≤x≤1,0≤n≤1,0≤x≤1,0≤n≤1,0≤n≤0.0) <= x + y <= 1)设置在缓冲层上的单晶层,其中基板在其表面上具有平均深度为0.01至5μm的非周期性分布的凹槽。
    • 9. 发明授权
    • Nitride semiconductor light-emitting device and method for fabrication thereof
    • 氮化物半导体发光器件及其制造方法
    • US07652299B2
    • 2010-01-26
    • US11352336
    • 2006-02-13
    • Yasuhito UrashimaKatsuki Kusunoki
    • Yasuhito UrashimaKatsuki Kusunoki
    • H01L33/00
    • H01L33/20
    • A nitride semiconductor light-emitting device includes a substrate and a nitride semiconductor layer including a light-emitting layer stacked on the substrate, wherein a normal line relative to a lateral face of the nitride semiconductor layer is not perpendicular to a normal line relative to a principal plane of the substrate. A method for the production of a nitride semiconductor light-emitting device that includes a substrate and a nitride semiconductor layer including a light-emitting layer stacked on the substrate includes the steps of covering a first surface of the nitride semiconductor layer with a mask provided with a prescribed pattern, removing the nitride semiconductor layer in regions to be divided into component devices till the substrate, subjecting the nitride semiconductor layer to wet-etching treatment and dividing the nitride semiconductor layer into the component devices.
    • 氮化物半导体发光器件包括衬底和包括堆叠在衬底上的发光层的氮化物半导体层,其中相对于氮化物半导体层的侧面的法线不垂直于法线 基板的主平面。 一种生产氮化物半导体发光器件的方法,该氮化物半导体发光器件包括衬底和包括堆叠在衬底上的发光层的氮化物半导体层,包括以下步骤:用设置有掩模的掩模覆盖氮化物半导体层的第一表面 规定的图案,将要分割成分量器件的区域中的氮化物半导体层除去直到基板,对氮化物半导体层进行湿蚀刻处理并将氮化物半导体层分割成部件器件。