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1. 发明申请

US20120114006A1 SURFACE EMITTING LASER 有权
标题翻译：表面发射激光
公开(公告)号：US20120114006A1
公开(公告)日：2012-05-10
申请号：US13284069
申请日：2011-10-28
申请人： Shoichi Kawashima , Yasuhiro Nagatomo
发明人： Shoichi Kawashima , Yasuhiro Nagatomo
IPC分类号： H01S5/00
CPC分类号： H01S5/105 , H01S5/125 , H01S5/18 , H01S5/32341 , H01S2301/14 , H01S2301/166
摘要： A surface emitting laser emitting a laser beam in a single transverse mode irrespective of an emission area while one-dimensionally aligning polarization of the output beam, including a two-dimensional photonic crystal, having resonance modes in directions of the primitive translation vector a1 and a2, lengths |a1| and |a2| of the primitive translation vectors a1 and a2 satisfied |a1|=p×(λ1/2neff1), |a2| =λ2/2neff2 described by a resonance wavelengths λ1 and λ2 in the resonance modes in the a1 and a2 directions, effective refractive indexes neff1 and neff2 determined by the resonance modes in the a1 and a2 directions, an integer p of 2 or more, the resonance wavelengths λ1 and λ2 satisfy λ2≦2×(neff2/(nout+neff2))×λ1 described by the effective refractive index neff2 and a refractive index nout of an external medium located out of the surface emitting laser.
摘要翻译：在与原始平移矢量a1和a2的方向上具有谐振模式的包括二维光子晶体的输出光束的一维排列极化的同时，以单一横向模式发射激光束的表面发射激光器，而不管发射区域，长度| a1 | 和| a2 | 的原始翻译向量a1和a2满足| a1 | = p×（λ1/ 2neff1），| a2 | 在a1和a2方向的谐振模式中由谐振波长λ1和λ2描述的λ2/ 2neff2，由a1和a2方向上的谐振模式确定的有效折射率neff1和neff2，整数p为2以上，谐振波长λ1和λ2满足由有效折射率neff2和位于表面发射激光器外部的外部介质的折射率nout所描述的λ2＆nlE; 2×（neff2 /（nout + neff2））×λ1。

2. 发明申请

US20110039364A1 MANUFACTURING METHOD OF MICROSTRUCTURE 有权
标题翻译：微结构的制造方法
公开(公告)号：US20110039364A1
公开(公告)日：2011-02-17
申请号：US12914939
申请日：2010-10-28
申请人： Takeshi Kawashima , Katsuyuki Hoshino , Shoichi Kawashima , Yasuhiro Nagatomo
发明人： Takeshi Kawashima , Katsuyuki Hoshino , Shoichi Kawashima , Yasuhiro Nagatomo
IPC分类号： H01L21/302 , H01L21/20
CPC分类号： H01S5/34333 , B82Y20/00 , H01L21/02389 , H01L21/0242 , H01L21/02458 , H01L21/02513 , H01L21/0254 , H01L21/0259 , H01L21/0262 , H01L21/02667 , H01S5/105 , H01S5/183 , H01S2304/04
摘要： A manufacturing method of a microstructure which enables production of a deep and narrow microstructure in a GaN semiconductor with high precision is provided. The manufacturing method of a microstructure for forming a microscopic structure in a semiconductor has a configuration having a first step of forming a first GaN semiconductor layer on a substrate, a second step of forming a first hole by using etching on the first GaN semiconductor layer formed in the first narrow, and a third step of performing heat-treatment at a temperature from 850° C. to 950° C. inclusive under a gas atmosphere including nitrogen, in order to form a second narrow in which a diameter of the first hole h formed in the second step is made narrower than the diameter of the first hole in an in-plane direction of the substrate.
摘要翻译：提供了能够高精度地生产GaN半导体中的深而窄的微结构的微结构的制造方法。用于在半导体中形成微结构的显微组织的制造方法具有在基板上形成第一GaN半导体层的第一步骤的结构，通过在形成的第一GaN半导体层上的蚀刻来形成第一孔的第二步骤以及在包括氮气的气体气氛下在850℃至950℃的温度下进行热处理的第一窄度和第三步骤，以形成第二狭缝，其中第一孔的直径 h形成为比基板的面内方向上的第一孔的直径窄。

3. 发明授权

US07830943B2 Vertical cavity surface emitting laser and method of manufacturing two-dimensional photonic crystal of vertical cavity surface emitting laser 有权
标题翻译：垂直腔表面发射激光器及制造垂直腔表面发射激光二维光子晶体的方法
公开(公告)号：US07830943B2
公开(公告)日：2010-11-09
申请号：US11678855
申请日：2007-02-26
申请人： Yasuhiro Nagatomo , Mamoru Uchida
发明人： Yasuhiro Nagatomo , Mamoru Uchida
IPC分类号： H01S3/08
CPC分类号： H01S5/18319 , B82Y20/00 , H01S5/105 , H01S5/18358 , H01S5/18386 , H01S5/3412 , H01S2301/18
摘要： A vertical cavity surface emitting laser includes an active layer between a first reflector and a second reflector and at least either the first reflector or the second reflector includes a two-dimensional photonic crystal. The two-dimensional photonic crystal has a structure 106 showing an ununiform effective refractive index distribution in the plane of the reflector to realize both a high reflectivity and transverse mode control at the same time.
摘要翻译：垂直腔表面发射激光器包括在第一反射器和第二反射器之间的有源层，并且至少第一反射器或第二反射器中的至少一个包括二维光子晶体。二维光子晶体具有示出反射器平面中不均匀有效折射率分布的结构106，以同时实现高反射率和横向模式控制。

4. 发明授权

US07769067B2 Vertical cavity surface emitting laser device 有权
标题翻译：垂直腔表面发射激光器件
公开(公告)号：US07769067B2
公开(公告)日：2010-08-03
申请号：US12185231
申请日：2008-08-04
申请人： Yuichiro Hori , Mamoru Uchida , Kobei Okamoto , Yasuhiro Nagatomo
发明人： Yuichiro Hori , Mamoru Uchida , Kobei Okamoto , Yasuhiro Nagatomo
IPC分类号： H01S5/00
CPC分类号： H01S5/18358 , H01S5/105 , H01S5/183 , H01S5/18308 , H01S5/2063 , H01S2301/166
摘要： A vertical cavity surface emitting laser device includes a first reflective mirror layer, a second reflective mirror layer, and an active layer disposed therebetween, wherein at least one of the first reflective mirror layer and the second reflective mirror layer includes a periodic-refractive-index structure in which the refractive index periodically changes in the in-plane direction and a part of the periodic-refractive-index structure includes a plurality of parts that disorder the periodicity.
摘要翻译：垂直腔表面发射激光器件包括第一反射镜层，第二反射镜层和设置在其间的有源层，其中第一反射镜层和第二反射镜层中的至少一个包括周期折射率折射率在面内方向周期性变化的结构，周期折射率结构的一部分包括使周期性紊乱的多个部分。

5. 发明申请

US20090262775A1 SURFACE EMITTING LASER 有权
标题翻译：表面发射激光
公开(公告)号：US20090262775A1
公开(公告)日：2009-10-22
申请号：US12425745
申请日：2009-04-17
申请人： Takeshi Uchida , Yasuhiro Nagatomo , Yuichiro Hori , Mitsuhiro Ikuta
发明人： Takeshi Uchida , Yasuhiro Nagatomo , Yuichiro Hori , Mitsuhiro Ikuta
IPC分类号： H01S5/18
CPC分类号： H01S5/187 , H01S5/105 , H01S5/3211 , H01S5/32341
摘要： A surface emitting laser which oscillates at a wavelength X of a blue band, including a photonic crystal layer including a photonic crystal structure, an active layer provided on one surface of the photonic crystal layer, and an electrode provided on the other surface of the photonic crystal layer for injecting electric current into the active layer. The photonic crystal structure has a thickness of 100 nm or more. A laser beam is emitted toward a direction opposite to a side of the photonic crystal layer on which the electrode is provided.
摘要翻译：一种表面发射激光器，其以包括光子晶体结构的光子晶体层，设置在光子晶体层的一个表面上的有源层和设置在光子晶体的另一个表面上的电极在蓝色波段的波长X处振荡用于将电流注入有源层的晶体层。光子晶体结构的厚度为100nm以上。激光束朝向与设置有电极的光子晶体层的一侧相反的方向发射。

6. 发明申请

US20090225805A1 PHOTONIC CRYSTAL AND SURFACE EMITTING LASER USING SUCH PHOTONIC CRYSTAL 有权
标题翻译：使用这种光子晶体的光子晶体和表面发射激光
公开(公告)号：US20090225805A1
公开(公告)日：2009-09-10
申请号：US12389491
申请日：2009-02-20
申请人： Yasuhiro Nagatomo
发明人： Yasuhiro Nagatomo
IPC分类号： H01S3/08 , G02B27/42
CPC分类号： H01S5/183 , B82Y20/00 , G02B1/005 , G02B5/203 , H01S5/105
摘要： A photonic crystal that can spatially control the resonance efficiency and reduce the leakage of light in transversal directions and a surface emitting laser that can be formed by using such a photonic crystal are provided. The photonic crystal has a first region and a second region having a same periodic structure as fundamental structures thereof and defects are introduced into the periodic structure of the first region, which is arranged around the second region.
摘要翻译：提供了可以空间控制共振效率并减少横向光的泄漏的光子晶体和可以通过使用这种光子晶体形成的表面发射激光器。光子晶体具有与其基本结构相同的周期性结构的第一区域和第二区域，并且将缺陷引入布置在第二区域周围的第一区域的周期性结构中。

7. 发明授权

US07499480B2 Photonic crystal structure and surface-emitting laser using the same 失效
标题翻译：光子晶体结构和表面发射激光器使用相同
公开(公告)号：US07499480B2
公开(公告)日：2009-03-03
申请号：US11936837
申请日：2007-11-08
申请人： Yasuhiro Nagatomo
发明人： Yasuhiro Nagatomo
IPC分类号： H01S5/00 , H01S3/08 , H01S3/082
CPC分类号： G02B6/1225 , B82Y20/00 , H01S5/105 , H01S5/12 , H01S5/183 , H01S5/34326
摘要： A structure includes a photonic crystal layer which has a first member having a first refractive index and having a surface with a plurality of holes periodically arranged therein, and includes a low-refractive-index layer adjacent to the photonic crystal layer and having a second refractive index that is lower than the first refractive index. The relative refractive index difference between the first refractive index and the second refractive index is 0.10 or lower. Third members having a third refractive index that is higher than 1.0 are disposed in the holes.
摘要翻译：一种结构包括光子晶体层，该光子晶体层具有具有第一折射率的第一部件，并具有周期性地布置有多个孔的表面，并且包括与光子晶体层相邻并具有第二折射率的低折射率层指数低于第一折射率。第一折射率和第二折射率之间的相对折射率差为0.10以下。具有高于1.0的第三折射率的第三构件设置在孔中。

8. 发明申请

US20080259984A1 STRUCTURE HAVING PHOTONIC CRYSTAL LAYER AND SURFACE EMITTING LASER INCLUDING THE SAME 有权
标题翻译：具有光子晶体层和表面发射激光的结构
公开(公告)号：US20080259984A1
公开(公告)日：2008-10-23
申请号：US12105454
申请日：2008-04-18
申请人： Yasuhiro Nagatomo
发明人： Yasuhiro Nagatomo
IPC分类号： H01S5/026 , G02B5/18
CPC分类号： G02B6/1225 , B82Y20/00 , H01S5/105 , H01S5/183
摘要： A structure has a photonic crystal layer comprising a first member made of a material having a first refractive index; and a second member made of a material having a second refractive index, wherein the first member has a plurality of holes periodically arranged, and the second member is placed in each of the holes so that a center of the second member is staggered from a center of the hole on a plane of the photonic crystal layer.
摘要翻译：一种结构具有光子晶体层，该光子晶体层包括由具有第一折射率的材料制成的第一构件; 以及由具有第二折射率的材料制成的第二构件，其中所述第一构件具有周期性地布置的多个孔，并且所述第二构件被放置在每个所述孔中，使得所述第二构件的中心与中心交错的光子晶体层的平面上的孔。

9. 发明申请

US20080117942A1 STRUCTURE USING PHOTONIC CRYSTAL AND SURFACE EMITTING LASER 失效
标题翻译：结构使用光子晶体和表面发射激光
公开(公告)号：US20080117942A1
公开(公告)日：2008-05-22
申请号：US11940124
申请日：2007-11-14
申请人： Yasuhiro Nagatomo , Yuichiro Hori , Mitsuhiro Ikuta
发明人： Yasuhiro Nagatomo , Yuichiro Hori , Mitsuhiro Ikuta
IPC分类号： G02B6/122 , H01S5/18
CPC分类号： G02B6/1225 , B82Y20/00 , H01S5/105 , H01S5/12 , H01S5/18 , H01S5/183 , H01S5/34326
摘要： A structure includes a photonic crystal layer including a first member having a high refractive index in which a plurality of holes are periodically arranged, and a second member having a low refractive index. A third member is disposed on the first member. The third member has a refractive index higher than 1.0 and lower than the refractive index of the first member. The holes of the photonic crystal layer have a depth in the range of 20% to 80% of the thickness of the first member.
摘要翻译：一种结构包括光子晶体层，其包括具有高折射率的第一部件，其中多个孔周期性地布置，以及具有低折射率的第二部件。第三构件设置在第一构件上。第三构件的折射率高于1.0且低于第一构件的折射率。光子晶体层的孔的深度在第一构件的厚度的20％至80％的范围内。

10. 发明申请

US20070201528A1 VERTICAL CAVITY SURFACE EMITTING LASER AND METHOD OF MANUFACTURING TWO-DIMENSIONAL PHOTONIC CRYSTAL OF VERTICAL CAVITY SURFACE EMITTING LASER 有权
标题翻译：垂直孔表面发射激光器及制造垂直孔表面发射激光二维光子晶体的方法
公开(公告)号：US20070201528A1
公开(公告)日：2007-08-30
申请号：US11678855
申请日：2007-02-26
申请人： Yasuhiro Nagatomo , Mamoru Uchida
发明人： Yasuhiro Nagatomo , Mamoru Uchida
IPC分类号： H01S5/00 , H01S3/08
CPC分类号： H01S5/18319 , B82Y20/00 , H01S5/105 , H01S5/18358 , H01S5/18386 , H01S5/3412 , H01S2301/18
摘要： A vertical cavity surface emitting laser includes an active layer between a first reflector and a second reflector and at least either the first reflector or the second reflector includes a two-dimensional photonic crystal. The two-dimensional photonic crystal has a structure 106 showing an ununiform effective refractive index distribution in the plane of the reflector to realize both a high reflectivity and transverse mode control at the same time.
摘要翻译：垂直腔表面发射激光器包括在第一反射器和第二反射器之间的有源层，并且至少第一反射器或第二反射器中的至少一个包括二维光子晶体。二维光子晶体具有示出反射器平面中不均匀有效折射率分布的结构106，以同时实现高反射率和横向模式控制。

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