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1. 发明授权

US06439447B1 Bump joining judging device and method, and semiconductor component production device and method 失效
标题翻译：凸块接合判断装置和方法，以及半导体部件生产装置和方法
公开(公告)号：US06439447B1
公开(公告)日：2002-08-27
申请号：US09763959
申请日：2001-02-28
申请人： Shozo Minamitani , Kazushi Higashi , Kenji Takahashi , Shinji Kanayama , Hiroshi Wada , Takafumi Tsujisawa , Makoto Akita , Kenji Okamoto , Shinzo Eguchi , Yasuhiro Kametani
发明人： Shozo Minamitani , Kazushi Higashi , Kenji Takahashi , Shinji Kanayama , Hiroshi Wada , Takafumi Tsujisawa , Makoto Akita , Kenji Okamoto , Shinzo Eguchi , Yasuhiro Kametani
IPC分类号： B23K106
CPC分类号： H01L22/12 , H01L24/75 , H01L24/81 , H01L2224/05568 , H01L2224/05573 , H01L2224/05644 , H01L2224/75 , H01L2224/759 , H01L2224/81801 , H01L2924/01006 , H01L2924/01033 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/12042 , H01L2924/14 , H01L2924/19041 , H01L2924/19043 , H01L2924/3011 , H01L2924/00 , H01L2924/00014
摘要： When electrodes on an electronic component and electrode portions on a circuit board are joined via bumps with the electronic component and the circuit board vibrated respectively, a vibration damping detect device and a deciding device detect damping of the vibration caused by a progress of joining between the bumps and the electrode portions, and then determine a good or defective of the joining on a basis of the damping of the vibration. Further, regarding an impedance of an ultrasonic oscillator, a movement amount of a nozzle, or a current supplying to a VCM, these waveforms during the joining are compared with waveforms of good joining thereof and then the good or defective is determined. According to the above constructions, the good or defective of the joining between the electronic component and the circuit board can be determined during the joining. Further, when a joining state becomes wrong during the joining, the joining state can be changed. Thus generation of defective components is prevented and a yield can be improved.
摘要翻译：当电子部件上的电极和电路板上的电极部分上的电极通过凸块与电子部件和电路板分别振动时，减振检测装置和判定装置检测由连接件凸起和电极部分，然后基于振动的阻尼确定接合的良好或有缺陷。此外，关于超声波振荡器的阻抗，喷嘴的移动量或向VCM供给的电流，将这些接合期间的这些波形与良好接合的波形进行比较，然后确定良好或有缺陷。根据上述结构，可以在接合期间确定电子部件和电路板之间的接合的良好或有缺陷。此外，当接合期间接合状态变得错误时，可以改变接合状态。因此，防止缺陷成分的产生，并且可以提高成品率。

2. 发明授权

US5086263A Bi-axial synchronous driving apparatus 失效
标题翻译：双轴同步驱动装置
公开(公告)号：US5086263A
公开(公告)日：1992-02-04
申请号：US634552
申请日：1990-12-27
申请人： Saburo Kubota , Hirotaka Mega , Yasuhiro Kametani
发明人： Saburo Kubota , Hirotaka Mega , Yasuhiro Kametani
IPC分类号： G05D3/00 , G05B19/23 , G05D3/12 , G05D3/20
CPC分类号： G05D3/20 , G05B19/232 , G05B2219/41194 , G05B2219/50216
摘要： A bi-axial synchronous driving apparatus which includes: a set of motors for respectively driving two axes; rotation detecting devices for detecting rotational positions of the respective motors; a set of deviation counters to which a common position instruction signal and detection signals of the respective rotation detecting devices are applied; a correcting unit to which deviation signals outputted from the respective deviation counters are applied, so as to form correction signals with respect to the respective deviation signals based on an integration of a difference between each one of the deviation signals and the other corresponding deviation signal; a set of adding devices for adding the deviation signals outputted from the respective deviation counters to the correction signals; and a set of driving devices for driving the respective motors based on control signals outputted from said respective adding devices.
摘要翻译：一种双轴同步驱动装置，包括：一组用于分别驱动两个轴的马达; 用于检测各个电动机的旋转位置的旋转检测装置; 设置公共位置指示信号和各旋转检测装置的检测信号的偏差计数器组; 校正单元，从各个偏差计数器输出的偏差信号被施加到基于每个偏差信号与另一个对应的偏差信号之间的差的积分而相对于各个偏差信号形成校正信号; 一组添加装置，用于将从各偏差计数器输出的偏差信号与校正信号相加; 以及一组用于根据从各个附加装置输出的控制信号来驱动各个电动机的驱动装置。

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