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    • 1. 发明授权
    • Thin film transistor substrate and method of manufacturing thereof
    • 薄膜晶体管基板及其制造方法
    • US08158470B2
    • 2012-04-17
    • US13018309
    • 2011-01-31
    • Jong Hyun ChoungHong Sick ParkSun Young HongBong Kyun KimBong Kyu ShinWon Suk ShinByeong Jin Lee
    • Jong Hyun ChoungHong Sick ParkSun Young HongBong Kyun KimBong Kyu ShinWon Suk ShinByeong Jin Lee
    • H01L21/336
    • H01L27/1288H01L27/124H01L27/1248
    • A thin film transistor substrate and a method of manufacturing the thin film transistor substrate comprises forming a gate line and a data line intersecting each other with a gate insulating layer interposed and defining a pixel area on the substrate, a thin film transistor electrically connected to the gate line and the data line, and a stepped-structure occurring pattern overlapping at least one of the gate line and the data line; forming a passivation layer having a stepped-structure portion formed by the stepped-structure occurring pattern on the substrate; forming a photoresist pattern having a second stepped-structure portion corresponding to the stepped-structure portion on the passivation layer; patterning the passivation layer using the photoresist pattern as a mask; forming a transparent conductive layer on the substrate; and removing the photoresist pattern where the transparent conductive layer is covered by a stripper penetrating through the stepped-structure portion of the photoresist pattern and forming a pixel electrode connected to the thin film transistor.
    • 薄膜晶体管基板和制造薄膜晶体管基板的方法包括:形成栅极线和数据线,其中栅极绝缘层相互插入并限定基板上的像素区域,薄膜晶体管电连接到 栅极线和数据线,以及与栅极线和数据线中的至少一个重叠的阶梯结构发生图案; 在所述基板上形成具有由阶梯状结构发生图案形成的台阶状部分的钝化层; 形成具有对应于所述钝化层上的阶梯状结构部分的第二阶梯结构部分的光致抗蚀剂图案; 使用光致抗蚀剂图案作为掩模来图案化钝化层; 在所述基板上形成透明导电层; 以及去除透明导电层被穿透光致抗蚀剂图案的台阶结构部分的剥离剂覆盖的光致抗蚀剂图案,并形成连接到薄膜晶体管的像素电极。
    • 5. 发明授权
    • Thin film transistor array panel and method of manufacture
    • 薄膜晶体管阵列面板及其制造方法
    • US07776633B2
    • 2010-08-17
    • US11696097
    • 2007-04-03
    • Jong-Hyun ChoungHong-Sick ParkJoo-Ae YoonJeong-Min ParkDoo-Hee JungSun-Young HongBong-Kyun KimWon-Suk ShinByeong-Jin Lee
    • Jong-Hyun ChoungHong-Sick ParkJoo-Ae YoonJeong-Min ParkDoo-Hee JungSun-Young HongBong-Kyun KimWon-Suk ShinByeong-Jin Lee
    • H01L21/00
    • H01L27/1288H01L27/1214
    • A method of manufacturing a thin film transistor array panel, including: forming gate lines on a substrate; forming a gate insulating layer on the gate lines; forming semiconductor layers on the gate insulating layer; forming data lines and drain electrodes on the semiconductor layers; depositing a passivation layer on the data lines and the drain electrodes; forming a first photoresist layer including a first portion and a second portion that is thinner than the first portion on the passivation layer; forming a first preliminary contact hole exposing the data lines by etching the passivation layer by using the first photoresist layer as a mask; removing the second portion of the first photoresist; forming a first contact hole by expanding the first preliminary contact hole and opening portions by etching the passivation layer by using the first portion of the first photoresist layer as a mask; depositing a conductor layer; and forming pixel electrodes in the opening portions and a first contact assistant member in the first contact hole by removing the first photoresist layer and the conductor layer located thereon.
    • 一种制造薄膜晶体管阵列面板的方法,包括:在衬底上形成栅极线; 在栅极线上形成栅极绝缘层; 在所述栅极绝缘层上形成半导体层; 在半导体层上形成数据线和漏电极; 在数据线和漏电极上沉积钝化层; 形成第一光致抗蚀剂层,其包括比钝化层上的第一部分更薄的第一部分和第二部分; 通过使用第一光致抗蚀剂层作为掩模,形成通过蚀刻钝化层而暴露数据线的第一预接触孔; 去除第一光致抗蚀剂的第二部分; 通过使用第一光致抗蚀剂层的第一部分作为掩模,通过蚀刻钝化层来扩展第一预接触孔和开口部来形成第一接触孔; 沉积导体层; 以及通过去除位于其上的第一光致抗蚀剂层和导体层,在开口部分中形成像素电极和第一接触孔中的第一接触辅助部件。