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1. 发明授权

US4987311A Electron-detector diode biassing scheme for improved writing by an electron beam lithography machine 失效
标题翻译：电子检测器二极管偏置方案，用于改进电子束光刻机的写入
公开(公告)号：US4987311A
公开(公告)日：1991-01-22
申请号：US391202
申请日：1989-08-08
申请人： William J. Devore
发明人： William J. Devore
IPC分类号： H01L21/027 , H01J37/244 , H01J37/317 , H01L21/30
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/244 , H01J37/3174 , H01J2237/2441 , H01J2237/24475 , H01J2237/2449 , H01J2237/24507 , H01J2237/24578
摘要： Disclosed is a biassing scheme for a beam position location apparatus (50) which comprises electron detector diodes (52) in an electron beam lithography machine (10) such that the detector diodes (52) deposit fewer secondary electrons (62) on a substrate (16) being processed by the electron beam (22) and thus reduce or eliminate any charge buildup on said substrate which deflect the electron beam (22) causing pattern distortion.

2. 发明授权

US06924494B2 Method of exposing a target to a charged particle beam 失效
标题翻译：将靶暴露于带电粒子束的方法
公开(公告)号：US06924494B2
公开(公告)日：2005-08-02
申请号：US10861876
申请日：2004-06-03
申请人： Lee H. Veneklasen , William J. DeVore
发明人： Lee H. Veneklasen , William J. DeVore
IPC分类号： G03F7/20 , G01Q30/18 , H01J37/141 , H01J37/305 , H01L21/027
CPC分类号： H01J37/141 , H01J2237/1035 , H01J2237/3175
摘要： An immersion lens for a charged particle beam lithography system includes a magnetically floating shield that limits a deflection magnetic field from creating eddy currents in electrically conductive components of the system downstream from the shield. The surface of the shield lies parallel or approximately parallel to a magnetic equipotential surface of the focusing magnetic field so that the shield does not affect the focusing magnetic field. The shield is, e.g., a ferrite disk or a hollow ferrite cone defining a central bore for passage of the charged particle beam.
摘要翻译：用于带电粒子束光刻系统的浸没透镜包括磁浮屏蔽，其限制偏转磁场在屏蔽体下游的系统的导电部件中产生涡流。屏蔽表面平行或近似平行于聚焦磁场的磁等势面，使屏蔽不影响聚焦磁场。屏蔽是例如铁氧体磁盘或中空铁素体磁体，限定用于带电粒子束通过的中心孔。

3. 发明授权

US06521896B1 Blanker assembly employing dielectric material 失效
标题翻译：使用电介质材料的擦拭组件
公开(公告)号：US06521896B1
公开(公告)日：2003-02-18
申请号：US09586473
申请日：2000-06-01
申请人： William J. DeVore , Michael John Penberth
发明人： William J. DeVore , Michael John Penberth
IPC分类号： H01J37147
CPC分类号： H01J37/045
摘要： A blanker assembly for an electron beam column obtains synchronicity between the beam blanking signal propagating through its blanker plates and the associated electron beam which is being blanked. Since the blanking signal travels faster than does the electron beam, the desired synchronicity is achieved by use of a dielectric material for propagating the blanking signal to slow down this signal to match the electron beam velocity. By using a dielectric material for high frequency (RF) blanking signals, there will be less signal reflection and greater blanking accuracy because the electron beam is continuously deflected. The blanker plates each include a substance having a relatively low dielectric constant for proipagating the blanking signal between an upper deflection region. The relative slowness of the propagation of the blanking signal between the upper and lower deflection regions provides a delay effect so as to synchronize the blanking signal with the associated electron beam.
摘要翻译：用于电子束柱的消隐组件获得通过其挡板传播的束消隐信号与被消隐的相关电子束之间的同步性。由于消隐信号比电子束行进更快，通过使用用于传播消隐信号的介电材料来减慢该信号以匹配电子束速度来实现期望的同步性。通过使用用于高频（RF）消隐信号的电介质材料，由于电子束被连续偏转，所以会产生更少的信号反射和更大的消隐精度。消隐板各自包括具有相对较低介电常数的物质，用于在上部偏转区域之间产生消隐信号。消隐信号在上偏转区域和下偏转区域之间传播的相对慢度提供延迟效应，以使消隐信号与相关联的电子束同步。

4. 发明授权

US07315029B2 Electrostatic deflection system with low aberrations and vertical beam incidence 有权
标题翻译：具有低像差和垂直光束入射的静电偏转系统
公开(公告)号：US07315029B2
公开(公告)日：2008-01-01
申请号：US11241880
申请日：2005-09-30
申请人： Dieter Winkler , Henry Pearce-Percy , Juergen Frosien , William J. Devore
发明人： Dieter Winkler , Henry Pearce-Percy , Juergen Frosien , William J. Devore
IPC分类号： G21K1/08 , H01J3/14 , H01J3/26 , H01J49/42
CPC分类号： H01J37/1477 , H01J2237/1518 , H01J2237/28 , H01J2237/3175
摘要： Embodiments of the present invention may be utilized to improve electron beam deflection. One embodiment provides an electrostatic deflection system with electrodes that minimize aberrations and to achieve vertical incidence simultaneously. By using at least two stages of deflection for a deflection direction, the present invention allows the deflected electron beam to pass a back focal plane of an objective lens while deflection capacitors are not disposed across the back focal plane. As a result, deflection electrodes can have an angle of 120° to minimize aberrations and simultaneously achieve vertical incidence of the electron beam on a target to avoid distortions or changes in magnification with height variations of the target or focus variations.
摘要翻译：本发明的实施例可用于改善电子束偏转。一个实施例提供一种静电偏转系统，其具有最小化像差并且同时实现垂直入射的电极。通过对偏转方向使用至少两个偏转级，本发明允许偏转的电子束通过物镜的后焦平面，而偏转电容器不跨过后焦平面设置。结果，偏转电极可以具有120°的角度以最小化像差并且同时实现电子束在靶上的垂直入射，以避免目标或焦点变化的高度变化引起的变形或放大变化。

5. 发明授权

US06392333B1 Electron gun having magnetic collimator 失效
标题翻译：具有磁准直仪的电子枪
公开(公告)号：US06392333B1
公开(公告)日：2002-05-21
申请号：US09263137
申请日：1999-03-05
申请人： Lee H. Veneklasen , William J. DeVore , Rudy F. Garcia
发明人： Lee H. Veneklasen , William J. DeVore , Rudy F. Garcia
IPC分类号： H05H100
CPC分类号： H01J1/304 , H01J37/073 , H01J2237/06316
摘要： An enhanced electron source in most respects similar to a standard cathode assembly for an electron gun includes an electron emitter surrounded by a suppressor electrode, the emitted electrons passing through an extractor electrode. Additionally, the suppressor electrode includes a small ring shaped permanent magnet surrounding the opening in the suppressor electrode through which the emitter tip protrudes. The resulting magnetic field is aligned with the beam axis, and includes a tail which forms a very short focal length magnetic lens immediately following the emitter tip. This magnetic field collimates the electron beam before it enters the downstream electrostatic gun lens, thus increasing the effective angular intensity of the cathode assembly. The aberrations of this collimating lens are very low so that its useful brightness is not reduced. Also the influence of guns lens aberrations is reduced because a smaller aperture angle in the gun lens may be used to obtain higher beam current.
摘要翻译：大多数类似于电子枪标准阴极组件的增强型电子源包括由抑制电极围绕的电子发射器，发射的电子通过提取器电极。此外，抑制电极包括围绕抑制电极的开口的小环形永磁体，发射极尖端突出穿过该开口。所得到的磁场与光束轴对齐，并且包括尾部，其形成紧跟发射极尖端的非常短的焦距磁性透镜。该磁场在电子束进入下游静电枪镜片之前使电子束准直，从而增加了阴极组件的有效角度强度。该准直透镜的像差非常低，因此其有用亮度不降低。此外，由于可以使用枪式透镜中较小的孔径角来获得更高的束流，所以减小了枪镜头像差的影响。

6. 发明授权

US07514682B2 Electron anti-fogging baffle used as a detector 失效
标题翻译：电子防雾挡板用作检测器
公开(公告)号：US07514682B2
公开(公告)日：2009-04-07
申请号：US11537062
申请日：2006-09-29
申请人： Benyamin Buller , William J. Devore , Juergen Frosien , Richard L. Lozes , Henry Pearce-Percy , Dieter Winkler
发明人： Benyamin Buller , William J. Devore , Juergen Frosien , Richard L. Lozes , Henry Pearce-Percy , Dieter Winkler
IPC分类号： H01J37/09 , G01N23/00 , G21K7/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J37/244 , H01J2237/004 , H01J2237/0213 , H01J2237/0262 , H01J2237/2448 , H01J2237/24571
摘要： Methods and apparatus to facilitate the measurement of the amount of scattered electrons collected by an anti-fogging baffle arrangement are provided. For some embodiments, by affixing a lead to an electrically isolated (floating) portion of the baffle arrangement, the amount of scattered electrons collected thereby may be read out, for example, as a current signal. Thus, for such embodiments, the baffle arrangement may double as a detector, allowing an image of surface (e.g., a mask or substrate surface) to be generated.
摘要翻译：提供了有助于测量由防雾挡板装置收集的散射电子量的方法和装置。对于一些实施例，通过将导线附接到挡板装置的电隔离（浮动）部分，由此收集的散射电子的量可以例如被读取为电流信号。因此，对于这样的实施例，挡板装置可以作为检测器加倍，从而允许产生表面（例如，掩模或衬底表面）的图像。

7. 发明授权

US06828996B2 Electron beam patterning with a heated electron source 失效
标题翻译：用加热的电子源进行电子束图案化
公开(公告)号：US06828996B2
公开(公告)日：2004-12-07
申请号：US09888256
申请日：2001-06-22
申请人： Glen E. Howard , William J. DeVore
发明人： Glen E. Howard , William J. DeVore
IPC分类号： B41J2435
CPC分类号： H01J37/075 , H01J2237/3175
摘要： An electron source has an anode and a cathode that is capable of being negatively biased relative to the anode, the cathode having an electron emitting portion and a cathode axis. An electromagnetic radiation source is adapted to generate an electromagnetic radiation beam to heat the cathode. A lens is adapted to direct the electromagnetic radiation beam onto the cathode, the lens having a lens axis that forms an acute angle with, or is substantially parallel to, the cathode axis of the electron emitting portion.
摘要翻译：电子源具有能够相对于阳极被负偏置的阳极和阴极，阴极具有电子发射部分和阴极轴线。电磁辐射源适于产生电磁辐射束以加热阴极。透镜适于将电磁辐射束引导到阴极上，透镜具有与电子发射部分的阴极轴形成锐角或基本平行的透镜轴。

8. 发明授权

US6002135A Magnetic lens and deflector with inner and outer pole pieces with conical inner pole piece 失效
标题翻译：磁性透镜和偏转器，内外极片与锥形内极片
公开(公告)号：US6002135A
公开(公告)日：1999-12-14
申请号：US7018
申请日：1998-01-14
申请人： Lee H. Veneklasen , William J. DeVore
发明人： Lee H. Veneklasen , William J. DeVore
IPC分类号： H01J37/141 , H01J37/147 , H01J3/22
CPC分类号： H01J37/141
摘要： A composite magnetic lens and deflector for particle beam optical systems has a concentric gap and concentric conical lower pole pieces arranged to allow more accurate magnetic deflection. The flux generated by a solenoidal lens coil is shared by magnetically soft inner and higher saturation flux outer pole pieces to minimize saturation effects, while the flux generated by internal deflection coils is confined to magnetically soft inner pole pieces that minimize flux leakage and associated eddy current settling effects. Shielding rings further contain leakage flux. The inner magnetic circuit is mounted and adhesively bonded to radial flexures to minimize thermal expansion drifts.
摘要翻译：用于粒子束光学系统的复合磁透镜和偏转器具有同心间隙和同心圆锥形下极片，其布置成允许更精确的磁偏转。螺线管透镜线圈产生的磁通量通过磁软内部和较高饱和磁通外极极共享，以最小化饱和效应，而内部偏转线圈产生的磁通限制在磁软内极片中，从而将漏磁和相关联的涡流最小化沉降效应屏蔽环进一步包含漏磁通。内部磁路被安装并且粘合到径向挠曲件上以最小化热膨胀漂移。

9. 发明授权

US5729022A Composite concentric-gap magnetic lens and deflector with conical pole pieces 失效
标题翻译：复合同心间隙磁透镜和带锥形极片的偏转器
公开(公告)号：US5729022A
公开(公告)日：1998-03-17
申请号：US721287
申请日：1996-09-26
申请人： Lee H. Veneklasen , William J. DeVore
发明人： Lee H. Veneklasen , William J. DeVore
IPC分类号： H01J37/141 , H01J37/147 , H01J3/22
CPC分类号： H01J37/141
摘要： A composite magnetic lens and deflector for particle beam optical systems has a concentric gap and concentric conical lower pole pieces arranged to allow more accurate magnetic deflection. The flux generated by a solenoidal lens coil is shared by magnetically soft inner and higher saturation flux outer pole pieces to minimize saturation effects, while the flux generated by internal deflection coils is confined to magnetically soft inner pole pieces that minimize flux leakage and associated eddy current settling effects. Shielding rings further contain leakage flux. The inner magnetic circuit is mounted and adhesively bonded to radial flexures to minimize thermal expansion drifts.
摘要翻译：用于粒子束光学系统的复合磁透镜和偏转器具有同心间隙和同心圆锥形下极片，其布置成允许更精确的磁偏转。螺线管透镜线圈产生的磁通量通过磁软内部和较高饱和磁通外极极共享，以最小化饱和效应，而内部偏转线圈产生的磁通限制在磁软内极片中，从而将漏磁和相关联的涡流最小化沉降效应屏蔽环进一步包含漏磁通。内部磁路被安装并且粘合到径向挠曲件上以最小化热膨胀漂移。

10. 发明授权

US4469948A Composite concentric-gap magnetic lens 失效
标题翻译：复合同心间隙磁透镜
公开(公告)号：US4469948A
公开(公告)日：1984-09-04
申请号：US342696
申请日：1982-01-26
申请人： Lee H. Veneklasen , William J. DeVore
发明人： Lee H. Veneklasen , William J. DeVore
IPC分类号： H01J37/141 , H01J37/30 , H01J37/305 , H01L21/027 , H01J3/22
CPC分类号： H01J37/3007 , H01J37/141
摘要： A composite objective lens for a particle beam lithographic system having deflection coils within the bore of the lens, a solenoidal excitation lens coil, a first set of two or more cylindrical pole pieces with a lens gap and a second set of cylindrical pole pieces arranged concentrically outside the first pole pieces but within the excitation lens coil. The second set of pole pieces is constructed of a high saturation material such as iron with a lens gap coextensive with the gap in the first set of pole pieces. The return flux from the deflection coils is carried by the inner cylindrical pole pieces only, while the flux generated by the lens coil is shared by both the inner and outer pole pieces. With this arrangement the linear relationship between the axial field strength and excitation current is maintained at all points along the axis of the lens, and saturation of the inner pole piece is avoided.
摘要翻译：一种用于粒子束光刻系统的复合物镜，其在透镜的孔内具有偏转线圈，螺线管激励透镜线圈，具有透镜间隙的第一组两个或多个圆柱形极片和同心排列的第二组圆柱形极片在第一极片之外但在激发透镜线圈内。第二组极片由诸如铁的高饱和度材料构成，其中透镜间隙与第一组极片中的间隙共同延伸。来自偏转线圈的返回磁通仅由内部圆柱形极片承载，而由透镜线圈产生的磁通量由内部和外部磁极片共享。通过这种布置，沿着透镜的轴线的所有点保持轴向场强和激励电流之间的线性关系，并且避免了内极片的饱和。

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