专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US08471652B2 Component that operates using acoustic waves and method for producing said component 有权
标题翻译：使用声波操作的部件和用于制造所述部件的方法
公开(公告)号：US08471652B2
公开(公告)日：2013-06-25
申请号：US11576981
申请日：2005-09-26
申请人： Veit Meister , Werner Ruile
发明人： Veit Meister , Werner Ruile
IPC分类号： H03H9/205 , H01L41/083 , H01L41/22
CPC分类号： H03H9/02228 , Y10T29/42
摘要： An acoustic wave component includes a layer system having a piezoelectric layer and a first metal layer arranged on the piezoelectric layer, a first resonator having a first electrode in the first metal layer, where the first metal layer includes electrode structures periodically arranged in a direction of propagation of a wave through the acoustic wave component, and a second resonator coupled to the first resonator and electrically isolated from the first resonator. The layer system includes a waveguide for guiding a guided bulk acoustic wave in a lateral direction of the acoustic wave component.
摘要翻译：声波分量包括具有压电层和布置在压电层上的第一金属层的层系，第一谐振器，具有在第一金属层中的第一电极，其中第一金属层包括周期性地沿着通过声波分量的波的传播，以及耦合到第一谐振器并与第一谐振器电隔离的第二谐振器。层系统包括用于在声波分量的横向方向上引导引导的体声波的波导。

2. 发明授权

US08283835B2 Guided bulk acoustic wave device having reduced height and method for manufacturing 有权
标题翻译：具有减小的高度的引导体声波装置和制造方法
公开(公告)号：US08283835B2
公开(公告)日：2012-10-09
申请号：US12771407
申请日：2010-04-30
申请人： Thomas Metzger , Christoph Eggs , Werner Ruile
发明人： Thomas Metzger , Christoph Eggs , Werner Ruile
IPC分类号： H01L41/04
CPC分类号： H03H9/02228 , H03H3/02 , H03H9/02015 , H03H9/02086 , H03H9/02102 , H03H9/0514 , H03H9/0542 , H03H9/0557 , H03H9/582 , Y10T29/42
摘要： Guided bulk acoustic wave devices and method for manufacturing guided bulk acoustic wave devices are provided. A guided bulk acoustic wave device includes a resonator structure with a piezoelectric layer, an electrode layer for exciting guided bulk acoustic waves and a wave guide layer. The thickness of the piezoelectric layer is less than or equal to 50 μm.
摘要翻译：提供引导体声波装置及制造引导体声波装置的方法。引导体声波器件包括具有压电层的谐振器结构，用于激发被引导的体声波的电极层和波导层。压电层的厚度小于或等于50μm。

3. 发明申请

US20110037538A1 Method for Producing an Electric Component Comprising at Least One Dielectric Layer, and Electric Component Comprising at Least One Dielectric Layer 有权
标题翻译：用于生产包含至少一个电介质层的电子部件的方法以及包含至少一个电介质层的电子部件
公开(公告)号：US20110037538A1
公开(公告)日：2011-02-17
申请号：US12861184
申请日：2010-08-23
申请人： Werner Ruile , Markus Hauser , Christoph Eggs , Hans-Peter Kirschner
发明人： Werner Ruile , Markus Hauser , Christoph Eggs , Hans-Peter Kirschner
IPC分类号： H03H9/02 , C25D5/44
CPC分类号： H03H9/25 , H01L21/02244 , H01L21/31683 , H03H3/08 , H03H9/0222 , Y10T29/49002 , Y10T29/49005 , Y10T29/4902 , Y10T29/4908 , Y10T29/4913 , Y10T29/49147
摘要： A method for producing an electric component including a dielectric layer on a substrate, includes the method steps of applying a metallic layer to the substrate and oxidizing the metallic layer to form a dielectric layer, wherein at least one partial region of the metallic layer is fully oxidized through the entire thickness of the layer.
摘要翻译：一种在基板上制造包括电介质层的电气部件的方法，包括以下步骤：向所述基板施加金属层并氧化所述金属层以形成电介质层，其中所述金属层的至少一个部分区域是完全的氧化层的整个厚度。

4. 发明申请

US20100231330A1 Component Working with Guided Bulk Acoustic Waves 审中-公开
标题翻译：使用引导体声波的组件
公开(公告)号：US20100231330A1
公开(公告)日：2010-09-16
申请号：US12558778
申请日：2009-09-14
申请人： Werner Ruile , Ulrike Roesler , Markus Hauser
发明人： Werner Ruile , Ulrike Roesler , Markus Hauser
IPC分类号： H03H9/02
CPC分类号： H03H9/0222 , H03H9/02834 , H03H9/14541
摘要： A component working with guided bulk acoustic waves is disclosed with at least one substrate and a layer system that is connected to this substrate and suitable for wave propagation. The layer system includes a metallization layer, a first dielectric layer, and a second dielectric layer. The velocity of the acoustic wave is greater in the second dielectric layer than in the first dielectric layer. At least one of the dielectric layers contains TeO2.
摘要翻译：公开了一种使用引导的体声波的部件，至少一个基板和层系统连接到该基板并且适于波浪传播。层系统包括金属化层，第一介电层和第二介电层。声波的速度在第二介电层中比在第一介电层中的速度更大。电介质层中的至少一层含有TeO 2。

5. 发明申请

US20100148285A1 MEMS Component and Method for Production 有权
标题翻译： MEMS组件和生产方法
公开(公告)号：US20100148285A1
公开(公告)日：2010-06-17
申请号：US12642357
申请日：2009-12-18
申请人： Christian Bauer , Hans Krueger , Werner Ruile , Alois Stelzl
发明人： Christian Bauer , Hans Krueger , Werner Ruile , Alois Stelzl
IPC分类号： H01L29/84 , H01L21/3205
CPC分类号： H03H9/02866 , H03H9/14538
摘要： A MEMS component includes a chip that has a rear side having a low roughness of less than one tenth of the wavelength at the center frequency of an acoustic wave propagating in the component. Metallic structures for scattering bulk acoustic waves are provided on the rear side of the chip and a material of the metallic structures is acoustically matched to a material of the chip.
摘要翻译： MEMS部件包括芯片，该芯片的后侧具有小于在部件中传播的声波的中心频率处波长的十分之一的粗糙度。用于散射体声波的金属结构设置在芯片的后侧，并且金属结构的材料与芯片的材料声学匹配。

6. 发明申请

US20080297277A1 Circuit Working With Acoustic Volume Waves And Component Connected To The Circuit 有权
标题翻译：电路工作与音量波和组件连接到电路
公开(公告)号：US20080297277A1
公开(公告)日：2008-12-04
申请号：US11576985
申请日：2005-09-23
申请人： Veit Meister , Werner Ruile
发明人： Veit Meister , Werner Ruile
IPC分类号： H03H9/205
CPC分类号： H03H9/02228 , H03H9/0095 , H03H9/584
摘要： A circuit for use with bulk acoustic waves includes a first electroacoustic system in a first branch and a second electroacoustic system in a second branch. The first electroacoustic system includes a first resonator and a second resonator that are in series in the first branch, and that are galvanically separated, and acoustically coupled, by a first coupling system. The second electroacoustic system includes a first resonator and a second resonator that are connected in series in the second branch, and that are galvanically separated, and acoustically coupled, by a second coupling system. The first and second electroacoustic systems are acoustically coupled via the first and second coupling systems and/or electrically coupled.
摘要翻译：用于体声波的电路包括第一分支中的第一电声系统和第二分支中的第二电声系统。第一电声系统包括第一谐振器和第二谐振器，该第一谐振器和第二谐振器在第一分支中串联并且通过第一耦合系统电流分离和声耦合。第二电声系统包括第一共振器和第二共振器，该第一谐振器和第二谐振器在第二分支中串联连接，并通过第二耦合系统电流分离和声耦合。第一和第二电声系统通过第一和第二耦合系统进行声学耦合和/或电耦合。

7. 发明授权

US07262676B2 Electroacoustic component and method for the production thereof 有权
标题翻译：电声部件及其制造方法
公开(公告)号：US07262676B2
公开(公告)日：2007-08-28
申请号：US11294077
申请日：2005-12-05
申请人： Werner Ruile , Ulrike Rösler
发明人： Werner Ruile , Ulrike Rösler
IPC分类号： H03H9/64
CPC分类号： H03H9/02228 , H01L23/481 , H01L2924/0002 , H01L2924/00
摘要： An electroacoustic component including a layer system disposed between two substrates and electroacoustic structures for exciting a guided bulk acoustic wave, the electroacoustic structures being devoid of cavities. The layer system includes a piezo-electric layer, at least one metal layer, and a planarizing layer, which includes a planar interface provided with a substrate disposed directly thereabove. Such a component can be produced at a low cost by direct wafer bonding of two wafers. The electroacoustic component structures are electrically connected to the external contacts through perpendicular electrical connections.
摘要翻译：电声部件包括设置在两个基板之间的层系统和用于激发引导的体声波的电声结构，所述电声结构没有空腔。层系统包括压电层，至少一个金属层和平坦化层，其包括设置有直接位于其上方的基板的平面界面。可以通过两片晶片的直接晶片接合以低成本制造这种部件。电声部件结构通过垂直的电连接与外部触点电连接。

8. 发明申请

US20060158061A1 Electroacoustic transducer for a surface wave operating component 有权
标题翻译：用于表面波操作部件的电声换能器
公开(公告)号：US20060158061A1
公开(公告)日：2006-07-20
申请号：US10547852
申请日：2003-12-16
申请人： Markus Hauser , Ulrike Roesler , Werner Ruile
发明人： Markus Hauser , Ulrike Roesler , Werner Ruile
IPC分类号： H03H9/145
CPC分类号： H03H9/14523 , H03H9/14517
摘要： The invention relates to an electroacoustic transducer for a component operating with surface waves, comprising two electrodes having alternately arranged fingers and stub fingers, each connected to a bus bar, the opposing fingers and stub fingers being separated from one another by gaps. In this case, the position of the gaps in the transverse direction preferably has a periodic variation. The pattern of the variation in the gap positions, which, in particular, influences the excitation intensity of the acoustic wave in the edge region of the transducer, is selected so that the excitation profile of the acoustic wave is adjusted to the predetermined energy density profile. As a result of such an adjustment, it is possible to significantly reduce signal losses at the resonant frequency.
摘要翻译：本发明涉及一种用于表面波操作的部件的电声换能器，包括两个具有交替排列的指状物和短针的电极，每个电极连接到汇流条，相对的指状物和短针通过间隙彼此分离。在这种情况下，横向上的间隙的位置优选具有周期性变化。选择间隙位置的变化的图案，其特别地影响换能器的边缘区域中的声波的激发强度，使得声波的激发分布被调整到预定的能量密度分布。作为这种调整的结果，可以显着降低谐振频率处的信号损耗。

9. 发明申请

US20060076852A1 Electroacoustic component and method for the production thereof 有权
标题翻译：电声部件及其制造方法
公开(公告)号：US20060076852A1
公开(公告)日：2006-04-13
申请号：US11294077
申请日：2005-12-05
申请人： Werner Ruile , Ulrike Rosler
发明人： Werner Ruile , Ulrike Rosler
IPC分类号： H01L41/08
CPC分类号： H03H9/02228 , H01L23/481 , H01L2924/0002 , H01L2924/00
摘要： An electroacoustic component including a layer system disposed between two substrates and electroacoustic structures for exciting a guided bulk acoustic wave, the electroacoustic structures being devoid of cavities. The layer system includes a piezo-electric layer, at least one metal layer, and a planarizing layer, which includes a planar interface provided with a substrate disposed directly thereabove. Such a component can be produced at a low cost by direct wafer bonding of two wafers. The electroacoustic component structures are electrically connected to the external contacts through perpendicular electrical connections.
摘要翻译：电声部件包括设置在两个基板之间的层系统和用于激发引导的体声波的电声结构，所述电声结构没有空腔。层系统包括压电层，至少一个金属层和平坦化层，其包括设置有直接位于其上方的基板的平面界面。可以通过两片晶片的直接晶片接合以低成本制造这种部件。电声部件结构通过垂直的电连接与外部触点电连接。

10. 发明授权

US6084503A Radio-interrogated surface-wave technology sensor 失效
标题翻译：无线电询问表面波技术传感器
公开(公告)号：US6084503A
公开(公告)日：2000-07-04
申请号：US945294
申请日：1997-10-17
申请人： Werner Ruile , Gerd Scholl , Thomas Ostertag , Leonhard Reindl , Valentin Magori
发明人： Werner Ruile , Gerd Scholl , Thomas Ostertag , Leonhard Reindl , Valentin Magori
IPC分类号： G01L9/00 , G01S13/75 , G01S13/76 , G01S13/79 , H03H9/145 , H04B1/40 , H04Q5/22
CPC分类号： G01S13/755
摘要： Radio-interrogated surface-wave technology sensor, in which the sensitive element (12) is an impedance which is electrically connected as termination to a surface-wave structure (26) of the sensor.
摘要翻译： PCT No.PCT / DE96 / 00471 Sec。 371日期1997年10月17日第 102（e）日期1997年10月17日PCT 1996年3月18日PCT公布。 WO96 / 33423 PCT公开号日期1996年10月24日辐射询问的表面波技术传感器，其中敏感元件（12）是作为终端电连接到传感器的表面波结构（26）的阻抗。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式