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1. 发明授权

US08829397B2 Corrosion-resistant multilayer ceramic member 有权
标题翻译：耐腐蚀多层陶瓷构件
公开(公告)号：US08829397B2
公开(公告)日：2014-09-09
申请号：US12285108
申请日：2008-09-29
申请人： Shoji Kano , Waichi Yamamura , Yoshihiro Kubota
发明人： Shoji Kano , Waichi Yamamura , Yoshihiro Kubota
IPC分类号： H05B3/68 , C23C16/00 , H01L21/683 , H02N13/00 , H01L21/687 , H05B3/14 , H01L21/67
CPC分类号： H01L21/6831 , H01L21/67103 , H01L21/6833 , H01L21/68757 , H02N13/00 , H05B3/143
摘要： The present invention relates to a corrosion-resistant multilayer ceramic member consisting at least of: a ceramic support substrate; an electrode layer formed on the ceramic support substrate; a power-supply member connected to the electrode layer; an insulating protection layer formed on the ceramic support substrate to cover the electrode layer; and a ceramic protection substrate of which at least a part is provided on the insulating protection layer. Thereby, there is provided a long-life corrosion-resistant multilayer ceramic member excellent in corrosion resistance even when exposed to a corrosive gas.
摘要翻译：本发明涉及一种耐腐蚀多层陶瓷构件，其至少包括：陶瓷支撑基板; 形成在所述陶瓷支撑基板上的电极层; 连接到所述电极层的电源构件; 形成在所述陶瓷支撑基板上以覆盖所述电极层的绝缘保护层; 以及陶瓷保护基板，其至少一部分设置在绝缘保护层上。由此，即使在暴露于腐蚀性气体的情况下，也能够提供耐腐蚀性优异的长寿命耐腐蚀性的多层陶瓷部件。

2. 发明申请

US20120100698A1 METHOD FOR FORMING AN ALUMINUM NITRIDE THIN FILM 有权
标题翻译：形成氮化铝薄膜的方法
公开(公告)号：US20120100698A1
公开(公告)日：2012-04-26
申请号：US13189006
申请日：2011-07-22
申请人： Koji Kato , Shoji Kano , Waichi Yamamura
发明人： Koji Kato , Shoji Kano , Waichi Yamamura
IPC分类号： H01L21/205
CPC分类号： C23C16/4404 , C23C16/34 , C23C16/45576
摘要： The method is adapted for forming an aluminum nitride thin film having a high density and a high resistance to thermal shock by a chemical vapor deposition process and includes steps of mixing a gas containing aluminum atoms (Al) and a gas containing nitrogen atoms (N) with a gas containing oxygen atoms (O) and feeding the mixture to a member to be covered by an aluminum nitride thin film.
摘要翻译：该方法适用于通过化学气相沉积工艺形成具有高密度和高耐热冲击性的氮化铝薄膜，并且包括将含有铝原子（Al）的气体和含有氮原子（N）的气体混合的步骤，含有含有氧原子（O）的气体，并将混合物供给要被氮化铝薄膜覆盖的构件。

3. 发明申请

US20070274021A1 Electrostatic chuck apparatus 审中-公开
标题翻译：静电吸盘装置
公开(公告)号：US20070274021A1
公开(公告)日：2007-11-29
申请号：US11797726
申请日：2007-05-07
申请人： Shoji Kano , Waichi Yamamura
发明人： Shoji Kano , Waichi Yamamura
IPC分类号： H01T23/00
CPC分类号： H01L21/6831
摘要： An electrostatic chuck apparatus for holding a workpiece such as a semiconductor wafer or glass substrate comprises a support substrate, an electrode formed on one surface of the support substrate, and an insulating layer covering the electrode and having a bearing surface for the workpiece. The insulating layer comprises pyrolytic boron nitride containing carbon and at least one element selected from silicon, aluminum, yttrium, and titanium, and has a Vickers hardness Hv of 50 to 1000.
摘要翻译：用于保持诸如半导体晶片或玻璃基板的工件的静电卡盘装置包括支撑基板，形成在支撑基板的一个表面上的电极以及覆盖电极并具有用于工件的支承面的绝缘层。绝缘层包含含碳的热解氮化硼和选自硅，铝，钇和钛的至少一种元素，维氏硬度Hv为50〜1000。

4. 发明申请

US20070253138A1 ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREOF 有权
标题翻译：静电切割及其制造方法
公开(公告)号：US20070253138A1
公开(公告)日：2007-11-01
申请号：US11685793
申请日：2007-03-14
申请人： Hideki Fujii , Waichi Yamamura
发明人： Hideki Fujii , Waichi Yamamura
IPC分类号： H01L21/683
CPC分类号： H01L21/6833
摘要： The invention provides an electrostatic chuck in which a workpiece-chucking surface is made flat. An electrostatic chuck with a built-in electric heating means comprises a base plate formed of carbon or a carbon-based composite material and, successively formed on one surface of the base plate, an insulating layer (a1), an electroconductive layer (a2) to serve as a chucking electrode and an dielectric layer (a3) to form a workpiece-chucking surface and, successively formed on the other surface of the base plate, an insulating layer (b1) and an electroconductive layer (b2) to serve as an electric heater element, the electrostatic chuck improved in that the workpiece-chucking surface of the electrostatic chuck and an opposite surface thereof are warped to have a relationship selected from concavo-convex and convexo-concave, and in that the warping of the surfaces is in a manner such that the workpiece-chucking surface of the dielectric layer is rendered flat when the opposite surface of the electrostatic chuck is fastened to a machine.
摘要翻译：本发明提供了一种静电卡盘，其中工件夹紧表面被制成平坦的。具有内置电加热装置的静电卡盘包括由碳或碳基复合材料形成的基板，并且在基板的一个表面上依次形成绝缘层（1），导电层（a） 2）用作夹持电极和介电层（a 3）以形成工件夹持表面，并且在基板的另一个表面上依次形成绝缘层（b 1）和导电层（b 2））用作电加热器元件时，静电卡盘的改进在于静电卡盘的工件夹紧表面和相对表面翘曲成具有从凹凸和凸凹选择的关系，并且由于翘曲的表面的方式使得当静电卡盘的相对表面紧固到机器时，电介质层的工件夹紧表面变平坦。

5. 发明授权

US06779362B2 Method of making an optical fiber preform where a second elongation is based on a mark on a glass rod 有权
标题翻译：制造光纤预制件的方法，其中第二伸长率基于玻璃棒上的标记
公开(公告)号：US06779362B2
公开(公告)日：2004-08-24
申请号：US10158904
申请日：2002-06-03
申请人： Yoshiaki Shimizu , Takaaki Nagano , Tadakatsu Shimada , Hideo Hirasawa , Masataka Watanabe , Kazuhisa Hatayama , Mitsukuni Sakashita , Minoru Taya , Waichi Yamamura , Shinji Suzuki , Jiro Moriya
发明人： Yoshiaki Shimizu , Takaaki Nagano , Tadakatsu Shimada , Hideo Hirasawa , Masataka Watanabe , Kazuhisa Hatayama , Mitsukuni Sakashita , Minoru Taya , Waichi Yamamura , Shinji Suzuki , Jiro Moriya
IPC分类号： C03B37027
CPC分类号： C03B23/047 , C03B37/01202 , C03B37/01205 , C03B37/0124 , C03B37/027 , C03B2205/47
摘要： A method for manufacturing an optical fiber comprises setting a heating condition for heating a glass rod, which is a parent material of the optical fiber, and an elongating speed of the glass rod based on a prescribed numerical value which changes with a progress of elongation of the glass rod; heating and elongating the glass rod to generate a preform based on the heating condition and the elongating speed which are set by the setting; and drawing the preform to a filament-like form by further heating the preform to generate the optical fiber.
摘要翻译：一种光纤的制造方法，其特征在于，设定用于加热作为所述光纤的母材的玻璃棒的加热条件和所述玻璃棒的拉伸速度，所述规定的数值随着伸长率的变化而变化玻璃棒; 加热和拉伸玻璃棒，以根据加热条件和通过设定设定的拉伸速度产生预成型件; 并通过进一步加热预成型件将预成型件拉丝成丝状，以产生光纤。

6. 发明申请

US20070104444A1 Method of stretching optical fiber base material and stretching apparatus 审中-公开
标题翻译：拉伸光纤基材和拉伸装置的方法
公开(公告)号：US20070104444A1
公开(公告)日：2007-05-10
申请号：US10582016
申请日：2004-12-02
申请人： Shinji Suzuki , Waichi Yamamura
发明人： Shinji Suzuki , Waichi Yamamura
IPC分类号： G02B6/00
CPC分类号： C03B37/01242 , Y02P40/57
摘要： A stretching method and apparatus of an optical fiber base material including gripping both ends in a longitudinal direction of an optical fiber base material by a pair of gripping devices, and, while pulling the optical fiber base material by moving one or both of the pair of the gripping devices in a first direction parallel to the longitudinal direction, moving a heating device relative to the optical fiber base material in a second direction opposite to the first direction, wherein stretch of the optical fiber base material is performed while changing the relative moving speed Vb(x) in accordance with expression (1): Vb·[Dmax/D(x)]2≦Vb(x)≦Vb·[Dmax/D(x)]3 (1) where Vb represents a reference speed, Dmax represents a maximum outer diameter of the optical fiber base material, D(x) represents an outer diameter at a heated position x of the optical fiber base material, and Vb(x) represents a relative moving speed of the heating device relative to the optical fiber base material at the heated position x.
摘要翻译：一种光纤基材的拉伸方法和装置，包括通过一对夹持装置在光纤基材的长度方向上夹持两端，并且通过移动所述一对夹持装置中的一个或两者来拉动光纤基材所述夹持装置在与所述长度方向平行的第一方向上，在与所述第一方向相反的第二方向上相对于所述光纤基材移动加热装置，在进行相对移动速度的同时进行所述光纤基材的拉伸 Vb（x）根据表达式（1）：<？in-line-formula description =“In-line formula”end =“lead”？> Vb。[D最大值/ D（x ）] 2 <= VB（x）<= VB。[D最大/ D（x）] 3（1） -line-formula description =“In-line Formulas”end =“tail”？>其中Vb表示参考速度，D 表示光纤基材的最大外径，D（x ）表示外径在光纤基材的加热位置x处，Vb（x）表示加热装置相对于加热位置x处的光纤基材的相对移动速度。

7. 发明授权

US06848276B2 Optical fiber manufacture method, preform manufacture method, and preform manufacture apparatus 有权
标题翻译：光纤制造方法，预制件制造方法和预制件制造装置
公开(公告)号：US06848276B2
公开(公告)日：2005-02-01
申请号：US10158801
申请日：2002-06-03
申请人： Yoshiaki Shimizu , Takaaki Nagano , Tadakatsu Shimada , Hideo Hirasawa , Masataka Watanabe , Kazuhisa Hatayama , Mitsukuni Sakashita , Minoru Taya , Waichi Yamamura , Shinji Suzuki , Jiro Moriya
发明人： Yoshiaki Shimizu , Takaaki Nagano , Tadakatsu Shimada , Hideo Hirasawa , Masataka Watanabe , Kazuhisa Hatayama , Mitsukuni Sakashita , Minoru Taya , Waichi Yamamura , Shinji Suzuki , Jiro Moriya
IPC分类号： C03B23/047 , C03B37/012 , C03B37/027 , C03B37/07
CPC分类号： C03B23/047 , C03B37/01202 , C03B37/01205 , C03B37/0124 , C03B37/027 , C03B2205/47
摘要： A method for manufacturing an optical fiber comprises setting a heating condition for heating a glass rod, which is a parent material of the optical fiber, and an elongating speed of the glass rod based on a prescribed numerical value which changes with a progress of elongation of the glass rod; heating and elongating the glass rod to generate a preform based on the heating condition and the elongating speed which are set by the setting; and drawing the preform to a filament-like form by further heating the preform to generate the optical fiber.
摘要翻译：一种光纤的制造方法，其特征在于，设定用于加热作为所述光纤的母材的玻璃棒的加热条件和所述玻璃棒的拉伸速度，所述规定的数值随着伸长率的变化而变化玻璃棒; 加热和拉伸玻璃棒，以根据加热条件和通过设定设定的拉伸速度产生预成型件; 并通过进一步加热预成型件将预成型件拉丝成丝状，以产生光纤。

8. 发明授权

US06742363B1 Straightening a glass rod for use in making an optical fiber preform 有权
标题翻译：矫直用于制造光纤预制棒的玻璃棒
公开(公告)号：US06742363B1
公开(公告)日：2004-06-01
申请号：US09522020
申请日：2000-03-08
申请人： Waichi Yamamura , Mitsukuni Sakashita , Tadakatsu Shimada , Hideo Hirasawa
发明人： Waichi Yamamura , Mitsukuni Sakashita , Tadakatsu Shimada , Hideo Hirasawa
IPC分类号： C03B3707
CPC分类号： C03B23/047 , C03B37/01202 , C03B37/01205 , C03B37/0124 , C03B37/027 , C03B2205/47
摘要： A method for manufacturing a glass rod (106), which is a parent material of an optical fiber (350), comprising: adjusting a vertical inclination of a standard rod (138) having a predetermined straightness; and heating and elongating a base material (102), which is a parent material of the glass rod (106), along an axis of the standard rod (138), the vertical inclination of which is adjusted, to generate the glass rod (106).
摘要翻译：一种用于制造作为光纤（350）的母材的玻璃棒（106）的方法，包括：调节具有预定直线度的标准杆（138）的垂直倾斜度; 并且沿着所述标准杆（138）的轴线加热和延长作为所述玻璃棒（106）的母材的基材（102），所述基材（102）的垂直倾斜度被调节以产生所述玻璃棒（106））。

9. 发明授权

US08440566B2 Method for forming an aluminum nitride thin film 有权
标题翻译：氮化铝薄膜的形成方法
公开(公告)号：US08440566B2
公开(公告)日：2013-05-14
申请号：US13189006
申请日：2011-07-22
申请人： Koji Kato , Shoji Kano , Waichi Yamamura
发明人： Koji Kato , Shoji Kano , Waichi Yamamura
IPC分类号： H01L21/44
CPC分类号： C23C16/4404 , C23C16/34 , C23C16/45576
摘要： The method is adapted for forming an aluminum nitride thin film having a high density and a high resistance to thermal shock by a chemical vapor deposition process and includes steps of mixing a gas containing aluminum atoms (Al) and a gas containing nitrogen atoms (N) with a gas containing oxygen atoms (O) and feeding the mixture to a member to be covered by an aluminum nitride thin film.
摘要翻译：该方法适用于通过化学气相沉积工艺形成具有高密度和高耐热冲击性的氮化铝薄膜，并且包括将含有铝原子（Al）的气体和含有氮原子（N）的气体混合的步骤，含有含有氧原子（O）的气体，并将混合物供给要被氮化铝薄膜覆盖的构件。

10. 发明授权

US07458234B2 Elongating method of optical fiber base material 有权
标题翻译：光纤基材伸长方法
公开(公告)号：US07458234B2
公开(公告)日：2008-12-02
申请号：US10593274
申请日：2005-03-07
申请人： Waichi Yamamura
发明人： Waichi Yamamura
IPC分类号： C03B37/02 , C03B37/025
CPC分类号： C03B37/01486 , C03B37/01466
摘要： There is provided an elongating method of an optical fiber base material which can easily correct a distorted portion of an optical fiber base material with it being possible to elongate the optical fiber base material to reduce its diameter. According to such an elongating method, in an elongating process of elongating an optical fiber base material by heating the optical fiber base material in a heating furnace so that a diameter of the optical fiber base material is reduced, before the optical fiber base material is elongated from an end thereof, a distorted portion of the optical fiber base material is connected by being heated to be softened in the heating furnace. To do so, the optical fiber base material is attached to a hanging mechanism so as to be hung in an electric furnace, the distorted portion of the optical fiber base material is heated to be softened. The elongation is stated after a difference between the elongation axis and an end of one of the optical fiber base material and the dummy rod attached to the optical fiber base material is reduced to be 10 mm or less. Here, the difference may be detected by using a noncontact position detecting apparatus, which may be one of a laser measuring device and an image processing apparatus.
摘要翻译：提供了一种光纤基材的伸长方法，其可以容易地校正光纤基材的变形部分，可以延长光纤基材以减小其直径。根据这样的延长方法，在通过在加热炉中加热光纤基材而使光纤基材延长使得光纤基材的直径减小的拉伸工序中，在光纤基材伸长之前从其端部，通过在加热炉中加热而使光纤基材的变形部分连接而软化。为了这样做，将光纤基材附着到悬挂机构上以悬挂在电炉中，将光纤基材的变形部分加热软化。伸长率在将光纤基材和附着于光纤基材的虚拟棒的伸长轴与端部之间的差减小到10mm以上之后进行说明。这里，可以通过使用可以是激光测量装置和图像处理装置之一的非接触位置检测装置来检测该差异。

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