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    • 2. 发明授权
    • Waveguide sensor for sensing
    • 波导传感器用于感测
    • US07653270B2
    • 2010-01-26
    • US12343959
    • 2008-12-24
    • Szuhan HuSazzadur Rahman KhanVisit ThaveeprungsripornNoriyuki Juni
    • Szuhan HuSazzadur Rahman KhanVisit ThaveeprungsripornNoriyuki Juni
    • G02B6/00
    • G01D5/34G01L1/242G01L1/247
    • A waveguide sensor according to an embodiment of the present invention includes: a substrate; a first underclad arranged on one side of the substrate; a first sensing core arranged on outer side of the first underclad and having a stripe pattern which extends in one direction; a first overclad arranged on outer side of the first sensing core; a second underclad arranged on another side of the substrate; a second sensing core arranged on outer side of the second underclad and having a stripe pattern which extends in a direction not parallel to the direction in which the first sensing core extends; and a second overclad arranged on outer side of the second sensing core. A first grooved part which extends in a direction not parallel to the direction in which the first sensing core extends is formed on the first overclad, so that the first grooved part and the first sensing core together form a first grating in a plane view. Furthermore, a second grooved part which extends in a direction not parallel to the direction in which the second sensing core extends is formed on the second overclad, so that the second grooved part and the second sensing core together form a second grating in a plane view.
    • 根据本发明实施例的波导传感器包括:基板; 布置在基板的一侧上的第一底层; 第一感测芯,布置在第一下包层的外侧,并且具有沿一个方向延伸的条纹图案; 布置在第一感测芯的外侧上的第一外包层; 布置在所述基板的另一侧上的第二底垫; 布置在所述第二底下的外侧上的第二检测芯,并且具有在不平行于所述第一感测芯延伸的方向的方向上延伸的条纹图案; 以及布置在第二感测芯的外侧上的第二外包层。 在第一外包层上形成有在不平行于第一感测芯延伸的方向的方向上延伸的第一沟槽部分,使得第一沟槽部分和第一感测芯一起在平面图中形成第一光栅。 此外,在第二外包层上形成有在不平行于第二感测芯延伸的方向延伸的方向上延伸的第二沟槽部分,使得第二沟槽部分和第二感测芯一起在平面图中形成第二光栅 。