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    • 2. 发明申请
    • APPARATUS FOR HIGH SPEED PROBING OF FLAT PANEL DISPLAYS
    • 用于平板显示器高速探测的装置
    • WO2005106510A2
    • 2005-11-10
    • PCT/US2005013785
    • 2005-04-21
    • CHIDAMBARAM MAHENDRANVAYARDO LALO RUIZ
    • VAYARDO LALO RUIZ
    • G01R31/00G01R31/28
    • G01R31/2889
    • The invention includes an apparatus for high speed probing of flat panel displays. In this invention the above said system apparatus consists of a frame, a precision dual gantry mechanism which houses two Z translation devices, a vision unit, two rotary direct drive mechanisms for positioning and two probe cards. A substrate holding device holds the display under test. In brief the system works as follows to achieve the function of high speed probing. A large substrate to be electrically tested is placed on the fixed substrate holding device and held down with vacuum. A dual gantry system which houses the Z translation devices holds two probing devices. The gantry's are independently controlled and are brought in close proximity to the display under test so the pins can make accurate contact to several bond pads located in both horizontal and vertical directions. Testing is then conducted by passing electrical signals from the tester mounted in close proximity to the display under test. Testing is then repeated for different displays located on the substrate at a very high speed using the dual gantry stages.
    • 本发明包括用于平板显示器的高速探测的装置。 在本发明中,上述系统装置由框架,容纳两个Z平移装置的精密双门架机构,视觉单元,用于定位的两个旋转直接驱动机构和两个探针卡组成。 基板保持装置保持待测显示。 简而言之,系统工作如下,以实现高速探测的功能。 将待电气测试的大基片放置在固定的基板保持装置上并用真空压紧。 容纳Z翻译装置的双门架系统具有两个探测装置。 龙门架是独立控制的,并且靠近被测显示器,使得销可以准确地接触位于水平和垂直方向的多个接合垫。 然后通过传递来自安装在紧邻被测显示器的测试仪的电信号进行测试。 然后使用双龙门架台以非常高的速度对位于基板上的不同显示器进行测试。