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    • 3. 发明授权
    • Efficient polarization independent single photon detector
    • 高效偏振无关单光子探测器
    • US09240539B2
    • 2016-01-19
    • US13869802
    • 2013-04-24
    • Sae Woo NamBurm BaekFrancesco MarsilliVarun Verma
    • Sae Woo NamBurm BaekFrancesco MarsilliVarun Verma
    • C04B35/45H01L39/02H01L39/24G01J1/42H01L39/10H01L39/12
    • H01L39/02G01J1/42H01L39/10H01L39/12H01L39/24
    • A superconducting nanowire single photon detector (SN-SPD) microelectronic circuit is described which has higher quantum efficiency and signal-to-noise than any SN-SPD's known in the art. The material and configuration of the microelectronic circuit eliminates the polarization dependence and shows improved signal-to-noise over SN-SPD microelectronic circuits known in the art. The higher efficiency, polarization independence, and high signal-to-noise is achieved by vertically stacking two tungsten-silicide (TS) SN-SPDs and electrically connecting them in parallel. This structure forms a multilayer superconducting nanowire avalanche photo-detector (SNAP). A single photon detection device employing the multilayer (SNAP) microelectronic circuit demonstrates a peak system detection efficiency of 87.7% and a polarization dependence of less than 2%. This represents nearly an order of magnitude improvement in both system detection efficiency and reduction of polarization dependence compared to conventional SNSPDs.
    • 描述了超导纳米线单光子检测器(SN-SPD)微电子电路,其具有比本领域已知的任何SN-SPD更高的量子效率和信噪比。 微电子电路的材料和配置消除了偏振相关性,并且显示出与本领域已知的SN-SPD微电子电路相比改进的信噪比。 通过垂直堆叠两个硅化钨(TS)SN-SPD并并联电连接来实现更高的效率,极化独立性和高信噪比。 该结构形成多层超导纳米线雪崩光电探测器(SNAP)。 使用多层(SNAP)微电子电路的单光子检测装置显示出87.7%的峰值系统检测效率和小于2%的极化依赖性。 与传统的SNSPD相比,这在系统检测效率和极化依赖性的降低方面都几乎提高了一个数量级。