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    • 2. 发明申请
    • PRE-TREATMENT APPARATUS AND METHOD FOR IMPROVING ADHESION OF THIN FILM
    • 用于改善薄膜粘附性的预处理装置和方法
    • WO2012005539A3
    • 2012-04-26
    • PCT/KR2011005004
    • 2011-07-08
    • UNIV AJOU IND COOP FOUNDATIONKO KYUNG HYUNLEE HYUK JUN
    • KO KYUNG HYUNLEE HYUK JUN
    • C23C24/04B05B7/14C23C14/02
    • C23C4/08B05B7/1626C23C4/02C23C24/04
    • Provided are a pre-treatment apparatus and method for improving an adhesion of a thin film. The pre-treatment apparatus includes: a gas compressor that compresses gas supplied from the outside and contained, and supplies a process gas that is compressed; a powder feeder for supplying a coating powder including a single metal or alloy supplied from the outside and contained; and a spray nozzle through which the process gas supplied from the gas compressor and the coating powder supplied from the powder feeder are cold sprayed on a surface of a base metal on which a thin film is to be deposited so as to form a porous metal coating layer on the surface of the base metal. The pre-treatment method includes: preparing a base metal including a single metal or alloy; preparing a coating powder including powder of one or more single metals or an alloy thereof; forming a porous metal coating layer on a surface of the base metal, on which a thin film is to be deposited, by cold-spraying the coating powder and a process gas to the surface of the base metal; and depositing the thin film on the coating layer, wherein the thin film includes metal.
    • 提供了用于改进薄膜的粘附性的预处理设备和方法。 该预处理装置包括:气体压缩机,压缩从外部供给的气体并容纳并供给被压缩的工艺气体; 粉末供料器,用于供应包含从外部供应的单一金属或合金并且包含的​​涂料粉末; 以及喷嘴,通过该喷嘴将从气体压缩机供应的处理气体和从粉末供应器供应的涂布粉末冷喷涂在待沉积有薄膜的基体金属的表面上,以形成多孔金属涂层 在基底金属的表面上形成一层。 预处理方法包括:制备包括单一金属或合金的基底金属; 制备包含一种或多种单金属或其合金的粉末的涂料粉末; 通过将所述涂覆粉末和工艺气体冷喷涂到所述基体金属的表面,在其上将沉积薄膜的所述基体金属的表面上形成多孔金属涂层; 以及在涂层上沉积薄膜,其中薄膜包括金属。