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1. 发明授权

US4954842A Diamond pen type marking device for substrates 失效
标题翻译：金刚石笔型标记装置
公开(公告)号：US4954842A
公开(公告)日：1990-09-04
申请号：US220182
申请日：1988-07-11
申请人： Isao Hashimoto , Tsuyoshi Hidehira
发明人： Isao Hashimoto , Tsuyoshi Hidehira
IPC分类号： B25H7/04 , B41F17/36 , G01D15/02 , H01L21/66
CPC分类号： G01D15/02
摘要： This invention relates to a pen type marking device whose marking pen tip is made of diamond and which is used for marking necessary for production control and quality control of substrates such as wafers. It features that said diamond pen type marking device is provided with a rotary absorption disk in order to take out a substrate on the main stage which is located with right angle to a substrate passage almost at the middle position of said substrate passage from a loading station to an unloading station the rotary absorption disk is furnished with a pair of absorption through-holes at the peripheral part thereof and rotated by 180 degrees intermittently, thereby continuously providing substrates to the main stage, said main stage is furnished with a pen means and its control means thereon, said pen means is of a diamond pen in a pen supporting cylinder thereof, and said pen supporting means is so composed that its pen impression pressure and pen drop speed can be freely changed by means of electric control circuits according to objectives to be marked.
摘要翻译：本发明涉及一种笔式标记装置，其标记笔尖由金刚石制成，用于生产控制和诸如晶片等基板的质量控制所需的标记。其特征在于，所述金刚石笔型打标装置设置有旋转吸收盘，以便从位于与基板通道成直角位置的主台上的基板，从基板通道的中间位置离开装载台旋转吸收盘在其周边部分设置有一对吸收通孔并且间歇地旋转180度，从而连续地向主台提供基板，所述主台具有笔装置和所述笔装置是笔支承圆柱体中的金刚石笔，并且所述笔支撑装置的组合使得其笔压力和笔落下速度可以通过根据目的的电控电路自由地改变被标记

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