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    • 2. 发明申请
    • PROBE AND CANTILEVER
    • 探测器和CANTILEVER
    • US20090038382A1
    • 2009-02-12
    • US12089349
    • 2006-10-06
    • Kouji KoyamaToshiro KotakiKazuhiko Sunagawa
    • Kouji KoyamaToshiro KotakiKazuhiko Sunagawa
    • G12B21/02
    • G01Q60/38G01Q70/10
    • [Object of the Invention] To provide a probe 1 for use in a cantilever 2 of an scanning probe microscope (SPM) manufacturable in a simple manufacturing process and usable while allowing full use of the properties of single-crystalline material and a cantilever 2 using that probe.[Solution] A probe 1 disposed at the tip of beam part 2a of a cantilever 2 used for an SPM, wherein the probe 1 comprises a needle-like part 1a having a length of not less than 10 μm or and a flat plate part 1b having a face contacting a beam part of the cantilever, the needle-like part 1a and the flat plate part 1b are integrally formed with a single-crystalline material, and at least one side face of the flat plate part 1b contains a flat surface 1c in order to indicate the crystal orientation of the single-crystalline material.
    • 本发明的目的在于提供一种用于可在简单的制造工艺中制造的扫描探针显微镜(SPM)的悬臂2中的探针1,并且可以充分利用单晶材料和悬臂梁2的性质使用 那个探头。 [解决方案]设置在用于SPM的悬臂2的梁部2a的前端的探针1,其中探针1包括长度不小于10um的针状部分1a和平板部分1b 具有与悬臂的梁部接触的面,针状部1a和平板部1b与单晶材料一体形成,平板部1b的至少一个侧面包含平坦面1c 以表示单晶材料的晶体取向。
    • 3. 发明授权
    • Probe and cantilever
    • 探头和悬臂
    • US08104332B2
    • 2012-01-31
    • US12837171
    • 2010-07-15
    • Kouji KoyamaToshiro KotakiKazuhiko Sunagawa
    • Kouji KoyamaToshiro KotakiKazuhiko Sunagawa
    • G01Q60/38G01Q70/10G01Q70/14G01Q70/16
    • G01Q60/38G01Q70/10
    • To provide a probe 1 for use in a cantilever 2 of an scanning probe microscope (SPM) manufacturable in a simple manufacturing process and usable while allowing full use of the properties of single-crystalline material and a cantilever 2 using that probe. A probe 1 disposed at the tip of beam part 2a of a cantilever 2 used for an SPM, wherein the probe 1 comprises a needle-like part 1a having a length of not less than 10 μm or and a flat plate part 1b having a face contacting a beam part of the cantilever, the needle-like part 1a and the flat plate part 1b are integrally formed with a single-crystalline material, and at least one side face of the flat plate part 1b contains a flat surface 1c in order to indicate the crystal orientation of the single-crystalline material.
    • 提供探针1用于扫描探针显微镜(SPM)的悬臂2,该扫描探针显微镜(SPM)可以在简单的制造过程中制造并可使用,同时可充分利用单晶材料的性质和使用该探针的悬臂2。 设置在用于SPM的悬臂2的梁部2a的前端的探针1,其中探针1包括长度不小于10μm的针状部分1a,以及具有面的平板部分1b 接触悬臂的梁部分,针状部分1a和平板部分1b与单晶材料整体形成,并且平板部分1b的至少一个侧面包含平坦表面1c,以便 表示单晶材料的晶体取向。
    • 4. 发明申请
    • PROBE AND CANTILEVER
    • 探测器和CANTILEVER
    • US20100293675A1
    • 2010-11-18
    • US12837171
    • 2010-07-15
    • Kouji KOYAMAToshiro KOTAKIKazuhiko SUNAGAWA
    • Kouji KOYAMAToshiro KOTAKIKazuhiko SUNAGAWA
    • G01Q70/08G01R1/067
    • G01Q60/38G01Q70/10
    • To provide a probe 1 for use in a cantilever 2 of an scanning probe microscope (SPM) manufacturable in a simple manufacturing process and usable while allowing full use of the properties of single-crystalline material and a cantilever 2 using that probe.A probe 1 disposed at the tip of beam part 2a of a cantilever 2 used for an SPM, wherein the probe 1 comprises a needle-like part 1a having a length of not less than 10 m or and a flat plate part 1b having a face contacting a beam part of the cantilever, the needle-like part 1a and the flat plate part 1b are integrally formed with a single-crystalline material, and at least one side face of the flat plate part 1b contains a flat surface 1c in order to indicate the crystal orientation of the single-crystalline material.
    • 提供探针1用于扫描探针显微镜(SPM)的悬臂2,该扫描探针显微镜(SPM)可以在简单的制造过程中制造并可使用,同时可充分利用单晶材料的性质和使用该探针的悬臂2。 探针1设置在用于SPM的悬臂2的梁部2a的前端,其中探针1包括长度不小于10μm的针状部分1a,以及具有面部的平板部分1b 接触悬臂的梁部分,针状部分1a和平板部分1b与单晶材料整体形成,并且平板部分1b的至少一个侧面包含平坦表面1c,以便 表示单晶材料的晶体取向。