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    • 1. 发明专利
    • Film material discharging apparatus and liquid material vacuum film depositing apparatus
    • 薄膜材料放电装置和液体材料真空膜沉积装置
    • JP2014009389A
    • 2014-01-20
    • JP2012148160
    • 2012-07-02
    • Toshio Negishi根岸 敏夫
    • NEGISHI TOSHIO
    • C23C16/448C23C16/44H01L51/50H05B33/10
    • PROBLEM TO BE SOLVED: To provide a liquid material vacuum film depositing apparatus improving material use efficiency, precise patterning and film thickness controllability which are problems in the conventional film depositing technology, and realizing productivity improvement and cost reduction of organic thin film depositing.SOLUTION: The liquid material vacuum film depositing apparatus comprises: a film material discharging apparatus which includes a material discharging section discharging film material to the outer space, a liquid vaporizing section supplying vaporized film material into the material discharging section, a liquid bypass section supplying the film material in liquid state into the material discharging section, and a liquid supplying section supplying the film material in liquid state to the liquid vaporizing section or the liquid bypass section, and in which the film material supplied from a tank in the liquid supplying section is ejected to the space inside the material discharging section through an ejecting valve in the material discharging section in vapor state after vaporizing by a vaporizer in the liquid vaporizing section or in liquid state not through the liquid vaporizing section; and a vacuum tank which is connected to the material discharging section and in which the film material supplied into the material discharging section is, after separation by a separating section, discharged from a discharging port into the inside space.
    • 要解决的问题:提供一种提高材料使用效率,精确图案化和膜厚控制性的液体材料真空膜沉积设备,这在常规的成膜技术中是问题,并且实现有机薄膜沉积的生产率提高和成本降低。 液体材料真空成膜装置包括:薄膜材料排出装置,其包括向外部空间排出薄膜材料的材料排出部分,将气化薄膜材料供应到材料排出部分的液体蒸发部分,供应薄膜材料的液体旁路部分 液体状态的液体供给部,液体供给部,液体供给部,液体供给部,液体供给部,液体供给部,液体供给部,液体供给部,液体供给部,液体供给部,液体供给部, m内的空间 空气排出部,其通过蒸发器在液体蒸发部分中蒸发之后的液体蒸发部分中的气态物质排出部分中的排出阀,或液体状态不通过液体蒸发部分; 以及真空槽,其连接到所述材料排出部分,并且其中供给到所述材料排出部分中的膜材料在被分离部分离之后被从排出口排出到所述内部空间中。
    • 3. 发明授权
    • Switch valve
    • 开关阀
    • US08181666B2
    • 2012-05-22
    • US12868121
    • 2010-08-25
    • Toshio NegishiTatsuhiko Koshida
    • Toshio NegishiTatsuhiko Koshida
    • F16K13/10F16K11/04
    • F16K17/38F16K1/42F16K13/10F16K25/00Y10T137/4643Y10T137/86879
    • A switch valve having a long span of life is provided. The switch valve 70 of the present invention has a low-melting-point metal 76 having a surface on which a blocking member contacts, with the low-melting-point metal 76 melted, thereby a closed state appears in which an inner space of the switch valve 70 is split up into an inner space and an outer space of the blocking member 72. When the inner space and the outer space of the blocking member 72 are connected in the inner space of the switch valve 70, outside devices are blocked from each other in the closed state. The outside devices are connected to each other in an opened state in which the lower end of the blocking member 72 is spaced away from the low-melting-point metal 76.
    • 提供寿命长的开关阀。 本发明的切换阀70具有低熔点金属76,该低熔点金属76具有阻挡部件接触的表面,低熔点金属76熔化,从而形成闭合状态,其中内部空间 切换阀70分成阻挡构件72的内部空间和外部空间。当阻挡构件72的内部空间和外部空间连接在开关阀70的内部空间中时,外部装置被阻挡 彼此处于关闭状态。 外部装置在打开状态彼此连接,其中阻挡构件72的下端与低熔点金属76间隔开。
    • 4. 发明申请
    • VAPOR GENERATOR AND VAPOR DEPOSITION APPARATUS
    • 蒸汽发生器和蒸气沉积装置
    • US20110008539A1
    • 2011-01-13
    • US12855349
    • 2010-08-12
    • Toshio NEGISHI
    • Toshio NEGISHI
    • C23C16/00
    • C23C14/12B05D1/60C23C14/243H01L51/001
    • An organic thin film having excellent film quality is formed. A vapor generator of the present invention has an evaporation chamber, a dispense head and a tank. A vapor deposition material is in the liquid state, stored in the tank, and fed to the dispense head from the tank. The dispense head dispenses the vapor deposition material fed inside thereof from a dispense orifice and disposes the vapor deposition material on a heating member inside the evaporation chamber. The dispense head accurately feeds the vapor deposition material by a required amount. Because only the required amount of the vapor deposition material is heated, an organic thin film excellent in film quality is formed without deterioration.
    • 形成膜质优异的有机薄膜。 本发明的蒸汽发生器具有蒸发室,分配头和罐。 气相沉积材料处于液态,储存在罐中,并从罐中进给到分配头。 分配头从分配孔分配供给到其内部的蒸镀材料,并将蒸镀材料配置在蒸发室内的加热部件上。 分配头将蒸镀材料精确地供给所需量。 由于仅需要量的蒸镀材料被加热,所以形成膜质量优异的有机薄膜而不劣化。
    • 5. 发明授权
    • Display device, apparatus for producing display device, and method for producing display device
    • 显示装置,显示装置的制造装置及其制造方法
    • US07857673B2
    • 2010-12-28
    • US12544665
    • 2009-08-20
    • Toshio Negishi
    • Toshio Negishi
    • H01J9/00
    • H01J1/70H01L27/3244H01L51/5246H01L51/5253H01L51/529Y10T156/10
    • A display device free from a deterioration in luminescence efficiency is provided. In the display device of the present invention, since an inorganic film is formed after concave parts in which luminescence portions are positioned are filled with a filling film, no crack is formed in the inorganic film. Since the inorganic film is made of a material having high gas tightness and heat conductivity (such as, diamond-like carbon or AlN), water and oxygen will hardly penetrate the luminescence portions, and heat of the luminescence portions will be conducted to the inorganic film, so that the luminescence portions do not reach high temperatures. Further, since a gap between first and second panels is filled with a resin film, the atmosphere does not enter from the outside. Because the luminescence portions are free from damage from water, oxygen and heat, the display device of the present invention has a prolonged life.
    • 提供了没有发光效率劣化的显示装置。 在本发明的显示装置中,由于在其中配置有发光部分的凹部填充有填充膜之后形成无机膜,所以在无机膜中不会形成裂纹。 由于无机膜由具有高气密性和导热性的材料(例如类金刚石碳或AlN)制成,所以水和氧几乎不会渗入发光部分,并且发光部分的热量将被传导到无机膜 膜,使得发光部分不达到高温。 此外,由于第一和第二面板之间的间隙填充有树脂膜,因此气氛不会从外部进入。 由于发光部分没有水,氧气和热量的损害,本发明的显示装置具有延长的使用寿命。
    • 6. 发明申请
    • METHOD OF MANUFACTURING ORGANIC THIN FILM
    • 制造有机薄膜的方法
    • US20100178424A1
    • 2010-07-15
    • US12718398
    • 2010-03-05
    • Toshio NEGISHI
    • Toshio NEGISHI
    • C23C16/455
    • C23C14/246C23C14/12C23C14/228H01L51/001
    • A thin film of a uniform film thickness is formed even without increasing the film deposition rate. The temperature of an evaporation device disposed in an evaporation chamber is raised in advance, and an organic material is dropped from a supply unit onto an evaporation surface of the evaporation device; and when the organic material is evaporated, a heated carrier gas is introduced into the evaporation chamber, and is mixed in the evaporation chamber and is introduced into a discharger. While a molecular flow is formed in the discharger in a case that only the organic material vapor is introduced into the discharger, the pressure within the discharger is raised due to the carrier gas, so that a viscous flow is formed and the mixed gas is filled in the discharger and is uniformly discharged. The organic material may be supplied by a small amount and the film deposition rate may not become too high.
    • 即使不增加膜沉积速率,也形成均匀膜厚的薄膜。 设置在蒸发室中的蒸发装置的温度预先升高,并且有机材料从供应单元落到蒸发装置的蒸发表面上; 并且当有机材料蒸发时,将加热的载气引入蒸发室,并在蒸发室中混合并引入到排放器中。 虽然在只有有机材料蒸气被引入排放器的情况下在排放器中形成分子流,但是由于载气,排出器内的压力升高,从而形成粘性流动并填充混合气体 在放电器中并均匀排出。 有机材料可以少量供应,并且成膜速度可能不会变得太高。
    • 9. 发明申请
    • SWITCH VALVE
    • 开关阀
    • US20110048563A1
    • 2011-03-03
    • US12868121
    • 2010-08-25
    • Toshio NEGISHITatsuhiko Koshida
    • Toshio NEGISHITatsuhiko Koshida
    • F16K11/065
    • F16K17/38F16K1/42F16K13/10F16K25/00Y10T137/4643Y10T137/86879
    • A switch valve having a long span of life is provided. The switch valve 70 of the present invention has a low-melting-point metal 76 having a surface on which a blocking member contacts, with the low-melting-point metal 76 melted, thereby a closed state appears in which an inner space of the switch valve 70 is split up into an inner space and an outer space of the blocking member 72. When the inner space and the outer space of the blocking member 72 are connected in the inner space of the switch valve 70, outside devices are blocked from each other in the closed state. The outside devices are connected to each other in an opened state in which the lower end of the blocking member 72 is spaced away from the low-melting-point metal 76.
    • 提供寿命长的开关阀。 本发明的切换阀70具有低熔点金属76,该低熔点金属76具有阻挡部件接触的表面,低熔点金属76熔化,从而形成闭合状态,其中内部空间 切换阀70分成阻挡构件72的内部空间和外部空间。当阻挡构件72的内部空间和外部空间连接在开关阀70的内部空间中时,外部装置被阻挡 彼此处于关闭状态。 外部装置在打开状态彼此连接,其中阻挡构件72的下端与低熔点金属76间隔开。