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    • 4. 发明授权
    • Micro-electromechanical system inertial sensor
    • 微机电系统惯性传感器
    • US07640803B1
    • 2010-01-05
    • US10982044
    • 2004-11-05
    • Roman C. GutierrezTony K. Tang
    • Roman C. GutierrezTony K. Tang
    • G01P9/04
    • G01P15/14G01C19/5719G01P15/097G01P15/125G01P15/18
    • A micro-machined MEMS resonator gyroscope and accelerometer is fabricated from an epilayer semiconductor wafer to incorporate a substantially planar, H-shaped resonator mass suspended from a support plate by two opposed elongated springs that couple to the relatively short crossbar member of the H. The masses are harmonically oscillated relative to the support plate and a baseplate portion, and two orthogonal modes of the structure corresponding to the two nearly degenerate fundamental torsional modes thereof are used for sensing angular rate about one axis, and linear acceleration along two axes, of the sensor. The H-shaped mass advantageously incorporates a relatively high length-to-width aspect ratio, and in one embodiment, the springs may advantageously incorporate either a square cross-section, such that the structure can be tuned to substantially match the fundamental frequencies of the two resonance modes of the structure by removing, e.g., by an etching process, a small amount of material from the upper surfaces of the springs.
    • 微机械加工MEMS谐振器陀螺仪和加速度计由外延半导体晶片制成,以将通过两个相对的细长弹簧悬挂在支撑板上的基本平坦的H形谐振器块,该相对的细长弹簧连接到H的相对短的横杆构件。 质量相对于支撑板和基板部分谐波振荡,并且使用与两个几乎简单的基本扭转模式对应的结构的两个正交模式来感测围绕一个轴的角速度和沿着两个轴的线性加速度 传感器。 有利地,H形块结合了相当高的长宽比纵横比,并且在一个实施例中,弹簧可以有利地包括正方形横截面,使得该结构可被调整为基本上匹配 通过例如通过蚀刻处理从弹簧的上表面去除少量的材料,结构的两个共振模式。
    • 6. 发明授权
    • Inertial sensor and method of use
    • 惯性传感器和使用方法
    • US06584845B1
    • 2003-07-01
    • US09502403
    • 2000-02-10
    • Roman C. GutierrezTony K. Tang
    • Roman C. GutierrezTony K. Tang
    • G01P1508
    • G01P15/131G01C19/56G01P15/097G01P2015/084G01P2015/0842
    • The inertial sensor of the present invention utilizes a proof mass suspended from spring structures forming a nearly degenerate resonant structure into which a perturbation is introduced, causing a split in frequency of the two modes so that the mode shape become uniquely defined, and to the first order, remains orthogonal. The resonator is provided with a mass or inertia tensor with off-diagonal elements. These off-diagonal elements are large enough to change the mode shape of the two nearly degenerate modes from the original coordinate frame. The spring tensor is then provided with a compensating off-diagonal element, such that the mode shape is again defined in the original coordinate frame. The compensating off-diagonal element in the spring tensor is provided by a biasing voltage that softens certain elements in the spring tensor. Acceleration disturbs the compensation and the mode shape again changes from the original coordinate frame. By measuring the change in the mode shape, the acceleration is measured.
    • 本发明的惯性传感器利用悬挂在弹簧结构上的检测质量,形成几乎简单的谐振结构,其中引入扰动,导致两种模式的频率分裂,使得模式形状被唯一地限定,并且到第一 顺序,保持正交。 谐振器设置有具有非对角元件的质量或惯性张量。 这些非对角线元素足够大以从原始坐标系改变两个几乎退化模式的模式形状。 然后弹簧张力器设置有补偿对角线元件,使得模式形状再次在原始坐标系中定义。 弹簧张力中的补偿非对角线元件是通过使弹簧张力中某些元件软化的偏置电压来提供的。 加速度会干扰补偿,并且模式形状再次从原始坐标系变化。 通过测量模式形状的变化,测量加速度。
    • 8. 发明授权
    • Low insertion loss non-blocking optical switch
    • 低插入损耗无阻塞光开关
    • US06516109B2
    • 2003-02-04
    • US09853514
    • 2001-05-11
    • Roman C. GutierrezTony K. Tang
    • Roman C. GutierrezTony K. Tang
    • G02B626
    • G02B6/3518G02B6/3556G02B6/3564G02B6/3582G02B26/0833
    • An optical switch is provided, in which input light from a fiber is directed across a free-space region to a corresponding one of a first set of beam steering elements, such as moveable mirrors, which then re-directs the light beam back through the free-space region to a desired one of a second set of beam steering elements. This beam steering element sends the light back again through the free-space region to a corresponding output fiber. The interfaces to both the input and output fibers include a collimating element, such as a lens. In other embodiments, an optical switch has fibers and moveable mirrors only on one substrate of the switch. The other substrate has at least a stationary mirror. The moveable mirrors and the stationary mirror direct light to the fibers such that the fibers can be used as either inputs or outputs of the switch, thereby allowing switch re-configurability.
    • 提供一种光学开关,其中来自光纤的输入光被引导穿过自由空间区域到第一组光束操纵元件(例如可移动反射镜)中的对应的一个,其然后将光束重新引导通过 自由空间区域到第二组波束操纵元件中期望的一个。 该光束操纵元件将光再次通过自由空间区域发送到相应的输出光纤。 与输入和输出光纤的接口包括诸如透镜的准直元件。 在其他实施例中,光开关仅在开关的一个基板上具有光纤和可移动的反射镜。 另一基板至少具有固定镜。 可移动反射镜和固定镜将光引导到光纤,使得光纤可以用作开关的输入或输出,从而允许开关重新配置。