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    • 1. 发明授权
    • Method and apparatus of surface inspection of a disk
    • 盘的表面检查方法和装置
    • US6011618A
    • 2000-01-04
    • US215496
    • 1998-12-18
    • Tetsuya IwataShigeru Tsuchida
    • Tetsuya IwataShigeru Tsuchida
    • G01B11/30G01N21/88G01N21/94G01N21/95G11B5/84G01N21/00
    • G01N21/9506
    • An apparatus for inspecting a surface of a disk comprises an indexing table having chucks for holding said disks respectively, said chucks being arranged angularly at regular intervals on the indexing table. Each of disks held by the respective chucks is moved by indexing revolution of the indexing table sequentially from a loading station where the disk is loaded onto the chuck, to an inspection station where the disk is inspected for a surface of the disk and then to an unloading station where the inspected disk is unloaded to the outside of the apparatus. The disk loaded onto a chuck at the loading station is driven to rotate until the disk gets to a predetermined rate of revolution before the disk arrives at the inspection station. The disk which has already get to the predetermined rate of revolution can be immediately inspected for the surface of the disk in the inspection station by an inspection device.
    • 用于检查盘的表面的装置包括具有用于分别保持所述盘的卡盘的分度台,所述卡盘在分度台上以规则的间隔成角度地布置。 由相应卡盘保持的每个盘通过将分度表的旋转顺序地从盘装载到卡盘上的装载站顺序地移动到检查盘,其中检查盘被检查到盘的表面,然后到 卸载站,被检查的盘被卸载到设备的外部。 驱动装载站上的卡盘上的盘旋转,直到盘到达检查台前达到预定的转速。 已经达到预定转速的盘可以通过检查装置立即检查检查台中盘的表面。