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    • 1. 发明申请
    • Silicon wafer reclamation method and reclaimed wafer
    • 硅片回收方法和回收晶圆
    • US20070007245A1
    • 2007-01-11
    • US10571781
    • 2004-08-24
    • Takanobu UchidaKazuhide IijimaTetsuo YamazakiShinichi TomaruFumiaki Maruyama
    • Takanobu UchidaKazuhide IijimaTetsuo YamazakiShinichi TomaruFumiaki Maruyama
    • B44C1/22C03C25/68C23F1/00
    • H01L21/02079H01L21/02032H01L21/3221
    • The present invention is a method for reclaiming a silicon wafer in which a thin film has been formed on its surface, at least, comprising a thin-film removing step for removing the thin film having been formed on the silicon wafer and a mirror-polishing step for mirror-polishing at least one side of the thin-film-removed silicon wafer, wherein, before performing the mirror-polishing step, gettering-site forming treatment for applying damage load to at least one side of the silicon wafer is performed and then the silicon wafer is subjected to heat treatment, thereby impurities inside the silicon wafer are reduced. Thereby, there is provided a method for reclaiming a silicon wafer, in which a thin film such as a metal thin film having been formed on a silicon wafer can be removed, and impurities having diffused inside the wafer can be also reduced, thereby silicon wafers having very little metal contamination can be stably obtained.
    • 本发明是一种用于回收在其表面上形成薄膜的硅晶片的方法,至少包括用于去除在硅晶片上形成的薄膜的薄膜去除步骤和镜面抛光 在进行镜面抛光步骤之前,进行用于对硅晶片的至少一侧施加损伤负荷的吸杂位置形成处理,进行用于对去除薄膜的硅晶片的至少一个侧面进行镜面抛光的步骤, 然后对硅晶片进行热处理,从而减小硅晶片内的杂质。 因此,提供了一种用于回收硅晶片的方法,其中可以除去已经形成在硅晶片上的诸如金属薄膜的薄膜,并且还可以减少在晶片内扩散的杂质,从而硅晶片 可以稳定地获得金属污染很少。
    • 2. 发明授权
    • Shockproof optical reproduction device
    • 防震光学再现装置
    • US5818801A
    • 1998-10-06
    • US655348
    • 1996-05-21
    • Tomofumi WatanabeTetsuo Yamazaki
    • Tomofumi WatanabeTetsuo Yamazaki
    • G11B7/0037G11B7/005G11B19/04G11B20/10G11B27/30G11B17/22
    • G11B7/0037G11B19/04G11B20/10527G11B27/3063G11B2020/10824G11B7/005
    • A data reproduction apparatus is provided to supply audio data without sound skipping caused by positional deviation in read position, while avoiding an increase in circuit area. In one embodiment, the data reproduction apparatus includes a reading unit for optically reading data recorded on a recording medium. A first signal processing circuit produces a format data signal based on the data read by the reading unit. A second signal processing circuit performs a demodulation process on the format data signal to produce a demodulated format data signal including main data and subcode data. The second signal processing circuit also subjects the main data signal to a decoding process to produce a reproduced data signal. A buffer memory temporally stores the reproduced data signal. A shockproof controller controls the writing and reading of the reproduced data signal into and from the buffer memory. An operation controller causes the shockproof controller to stop the writing of the reproduced data signal in the buffer memory and causes the reading unit to repeat the reading of the data associated with the interrupted format data signal when the format data signal produced by the first signal processing circuit is interrupted. Further, when one of the operation controller and the shockproof controller receives the subcode data signal from the second signal processing circuit, the shockproof controller restarts the writing into the buffer memory of the reproduced data signal associated with the repeated reading of the data associated with the interrupted format data signal.
    • 提供数据再现装置,以便在避免电路面积的增加的同时提供音频数据,而不会由于读取位置的位置偏差而导致声音跳过。 在一个实施例中,数据再现装置包括用于光学读取记录在记录介质上的数据的读取单元。 第一信号处理电路基于由读取单元读取的数据产生格式数据信号。 第二信号处理电路对格式数据信号执行解调处理,以产生包括主数据和子码数据的解调格式数据信号。 第二信号处理电路还使主数据信号进行解码处理,以产生再现的数据信号。 缓冲存储器暂时存储再现的数据信号。 防震控制器控制将再生数据信号写入和读出缓冲存储器。 操作控制器使得防震控制器停止对缓冲存储器中再现的数据信号的写入,并且当由第一信号处理产生的格式数据信号时,读取单元重复读取与中断格式数据信号相关联的数据 电路中断。 此外,当操作控制器和防震控制器中的一个接收到来自第二信号处理电路的子代码数据信号时,防震控制器重新开始向缓冲存储器写入与重复读取与数据相关联的数据相关联的再现数据信号 中断格式数据信号。
    • 3. 发明申请
    • VALVE ACTUATION APPARATUS OF INTERNAL COMBUSTION ENGINE
    • 内燃机阀门执行装置
    • US20130019831A1
    • 2013-01-24
    • US13470383
    • 2012-05-14
    • Tetsuo YamazakiNoriomi Hosaka
    • Tetsuo YamazakiNoriomi Hosaka
    • F01L1/18F01L1/12
    • F01L1/185F01L1/2405F01L1/267F01L2013/0073F01L2105/00F01L2250/04
    • In a valve actuation apparatus of a multi-cylinder engine employing a drive shaft rotatably arranged to extend over a plurality of cylinders, a drive cam attached to the drive shaft, and a motion transmitter provided for each of the cylinders for converting a rotary motion of the drive cam into an oscillating motion, a rockable-cam structural member is provided for each of the cylinders in a state where a shaft is inserted through inner peripheries of the rockable-cam structural members, for operating engine valves by the transmitted oscillating motion. A plain bearing is provided in at least one axial position between the axially-spaced rockable-cam structural members. An inner periphery of the plain bearing is in contact with an outer periphery of the shaft, whereas an outer periphery of the plain bearing is in contact with an inner periphery of a bearing portion mounted on the engine.
    • 在采用可旋转地布置成在多个气缸上延伸的驱动轴的多缸发动机的气门致动装置中,安装在驱动轴上的驱动凸轮以及为每个气缸设置的运动变送器,用于转换旋转运动 驱动凸轮成为摆动运动,在轴通过可摆动凸轮结构构件的内周插入的状态下,为每个气缸设置摇摆凸轮结构构件,以通过所发送的摆动运动来操作发动机气门。 滑动轴承设置在轴向间隔的可摆动凸轮结构构件之间的至少一个轴向位置。 滑动轴承的内周与轴的外周接触,而滑动轴承的外周与安装在发动机上的轴承部分的内周接触。