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1. 发明授权

US06300631B1 Method of thinning an electron transparent thin film membrane on a TEM grid using a focused ion beam 失效
标题翻译：使用聚焦离子束在TEM网格上稀化电子透明薄膜的方法
公开(公告)号：US06300631B1
公开(公告)日：2001-10-09
申请号：US09414221
申请日：1999-10-07
申请人： Terri L. Shofner
发明人： Terri L. Shofner
IPC分类号： G01N2300
CPC分类号： G01N23/04 , G21K5/10 , H01J2237/31745
摘要： A method of thinning a cut electron transparent membrane used in transmission electron microscopy is disclosed. An electron transparent thin film membrane is cut from a sample that is positioned within a focused ion beam device by focusing an ion beam in a predetermined direction onto the sample to mill the sample and cut the transparent thin film membrane from the sample. The membrane is mounted onto a transmission electron microscope grid having a mesh surface and carbon coating. It is mounted in a vertical orientation onto a support stage of a focused ion beam device such that the membrane is mounted vertically and parallel with the incident focused ion beam produced by the focused ion beam device. The support stage is tilted a predetermined amount to orient the membrane at an angle incident to the focused ion beam. The ion beam is focused at a glancing angle into a predetermined portion of the membrane for thinning the membrane by cutting a thin portion from the membrane.
摘要翻译：公开了一种使透射电子显微镜中使用的切割电子透明膜变薄的方法。通过将预定方向上的离子束聚焦到样品上以研磨样品并从样品切割透明薄膜膜，从位于聚焦离子束装置内的样品切割电子透明薄膜膜。将膜安装在具有网表面和碳涂层的透射电子显微镜网格上。它以垂直取向安装到聚焦离子束装置的支撑台上，使得膜垂直并且与由聚焦离子束装置产生的入射聚焦离子束平行地安装。将支撑台倾斜预定量以使入射到聚焦离子束的角度定向膜。离子束以扫掠角聚焦到膜的预定部分中，用于通过从膜切割薄部分来使膜变薄。

2. 发明授权

US06250143B1 Method of mapping a surface using a probe for stylus nanoprofilometry having a non-circular cross-section 有权
标题翻译：使用具有非圆形横截面的触笔纳米流变测定法的探针绘制表面的方法
公开(公告)号：US06250143B1
公开(公告)日：2001-06-26
申请号：US09386711
申请日：1999-08-31
申请人： Jeffrey B. Bindell , Erik C. Houge , Larry E. Plew , Terri L. Shofner , Frederick A. Stevie
发明人： Jeffrey B. Bindell , Erik C. Houge , Larry E. Plew , Terri L. Shofner , Frederick A. Stevie
IPC分类号： G01H2300
CPC分类号： G01Q60/38 , G01Q70/10 , H01L22/12 , Y10S977/878
摘要： The present invention provides an apparatus and a method of manufacturing that apparatus. More specifically, to a method of manufacturing probes for a stylus nanoprofilometer having a non-circular probe tip geometry and a method of measurement of semiconductor wafer features using the same. In one embodiment, the probe comprises an upper portion couplable to the stylus nanoprofilometer and a probative portion coupled to the upper portion. The probative portion has a cross section that is substantially thinner than a cross section of the upper portion. The probative portion further has a terminus distal the upper portion and a reentrant angle from the terminus to the upper portion.
摘要翻译：本发明提供一种制造该装置的装置和方法。更具体地，涉及一种制造具有非圆形探针尖端几何形状的触针式纳米探针计探针的探针的方法和使用其的半导体晶片特征的测量方法。在一个实施例中，探针包括可与触针纳米玻璃体计量器耦合的上部和耦合到上部的识别部分。证明部分具有比上部的横截面更薄的横截面。证明部分还具有远离上部的终端和从终端到上部的折返角。

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