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    • 1. 发明授权
    • Integrated circuit structures for preventing charging damage
    • 用于防止充电损坏的集成电路结构
    • US07470959B2
    • 2008-12-30
    • US11275482
    • 2006-01-09
    • Terence Blackwell HookJeffery Scott Zimmerman
    • Terence Blackwell HookJeffery Scott Zimmerman
    • H01L23/62
    • H01L27/0251G06F17/5045H01L21/84
    • Disclosed is a circuit for preventing charging damage in an integrated circuit design, for example, a design having silicon over insulator (SOI) transistors. The circuit prevents damage from charging during processing to the gate of IC devices by assigning regions to the IC design such that the devices located within the regions have electrically independent nets, identifying devices that may have a voltage differential between the source or drain, and gate as susceptible devices within a given region, and connecting an element across the source or drain, and the gate of each of the susceptible devices such that the element is positioned within the region. Alternatively, the method/circuit provides for connecting compensating conductors to an element to eliminate potential charging damage.
    • 公开了一种用于防止集成电路设计中的充电损坏的电路,例如具有硅绝缘体(SOI)晶体管的设计。 该电路通过向IC设计分配区域来防止在处理到IC器件的栅极期间的充电损坏,使得位于区域内的器件具有电独立的网络,识别可能在源极或漏极之间具有电压差的器件,以及栅极 作为给定区域内的敏感装置,并且跨过源极或漏极以及每个敏感装置的栅极连接元件,使得元件位于该区域内。 或者,方法/电路提供将补偿导体连接到元件以消除潜在的充电损坏。
    • 5. 发明授权
    • Trench isolation and method of fabricating trench isolation
    • 沟槽隔离和制造沟槽隔离的方法
    • US08012848B2
    • 2011-09-06
    • US11839585
    • 2007-08-16
    • Terence Blackwell HookJeffrey Bowman JohnsonJames Spiros Nakos
    • Terence Blackwell HookJeffrey Bowman JohnsonJames Spiros Nakos
    • H01L21/76
    • H01L21/76224H01L21/76237H01L21/76283H01L21/82H01L21/823878H01L21/823892
    • Trench isolation structure and method of forming trench isolation structures. The structures includes a trench in a silicon region of a substrate, the trench extending from a top surface of the substrate into the silicon region; an ion implantation stopping layer over sidewalls of the trench; a dielectric fill material filling remaining space in the trench, the dielectric fill material not including any materials found in the stopping layer; an N-type dopant species in a first region of the silicon region on a first side of the trench; the N-type dopant species in a first region of the dielectric material adjacent to the first side of the trench; a P-type dopant species in a second region of the silicon region on a second side of the trench; and the P-type dopant species in a second region of the dielectric material adjacent to the second side of the trench.
    • 沟槽隔离结构和形成沟槽隔离结构的方法。 所述结构包括在衬底的硅区域中的沟槽,所述沟槽从所述衬底的顶表面延伸到所述硅区域中; 在沟槽的侧壁上的离子注入停止层; 填充沟槽中的剩余空间的介电填充材料,所述介电填充材料不包括在所述停止层中发现的任何材料; 在所述沟槽的第一侧上的所述硅区域的第一区域中的N型掺杂剂物质; 所述N型掺杂剂物质在所述电介质材料的与所述沟槽的第一侧相邻的第一区域中; 在沟槽的第二侧上的硅区域的第二区域中的P型掺杂物种; 以及邻近沟槽第二侧的电介质材料的第二区域中的P型掺杂剂物质。