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    • 3. 发明申请
    • Saw device manufacturing method
    • 锯装置制造方法
    • US20060150381A1
    • 2006-07-13
    • US10559238
    • 2004-06-01
    • Tatsuya AnzaiYuji OgawaYasuhide Onozawa
    • Tatsuya AnzaiYuji OgawaYasuhide Onozawa
    • H04R17/00
    • H03H9/1085H01L2224/0554H01L2224/05568H01L2224/05573H01L2224/16225H01L2924/00014H03H3/08Y10T29/42H01L2224/05599H01L2224/0555H01L2224/0556
    • To provide a high quality SAW device with enhanced productivity, wherein an outer face of a SAW chip mounted on a mounting substrate is covered with a heat-softened resin sheet and resin is filled on the SAW chip to form an airtight space below an IDT in the SAW device. A method for manufacturing the SAW device includes: a step of flip-chip mounting the SAW chip on the mounting substrate, a step of placing the resin sheet on an upper face of the SAW chip; a laminating step of setting ambient environment to pressure-reduced or vacuum atmosphere and covering the outer face of the SAW chip with resin while securing the airtight space by pressurizing the resin sheet while heating the resin sheet; a press forming step of curing the resin while maintaining the airtight space by maintaining pressurized and heated state in the laminating step; and a post-curing step of performing heating at a temperature and for a time in which the resin completely cures, wherein a thickness tr of the resin sheet before the laminating step satisfies an equation of L/{(X+Gx)(Y+Gy)}≦tr.
    • 为了提供提高生产率的高品质SAW器件,其中安装在安装基板上的SAW芯片的外表面被热软化的树脂片覆盖,树脂填充在SAW芯片上,以在IDT下方形成气密空间 SAW器件。 一种制造SAW器件的方法包括:将SAW芯片倒装安装在安装基板上的步骤,将树脂片放置在SAW芯片的上表面上的步骤; 将周围环境设置为减压或真空气氛并用树脂覆盖SAW芯片的外表面的层压步骤,同时通过在加热树脂板的同时加压树脂板来确保气密空间; 压制成形步骤,通过在层叠步骤中保持加压和加热状态,同时保持气密空间而固化树脂; 以及在树脂完全固化的温度和时间进行加热的后固化步骤,其中层压步骤之前的树脂片的厚度tr满足方程式<?in-line-formula description =“In 线/公式“end =”lead“?> L / {(X + Gx)(Y + Gy)} <= tr。 <?in-line-formula description =“In-line Formulas”end =“tail”?>
    • 6. 发明授权
    • Method for manufacturing surface acoustic wave device
    • 声表面波装置的制造方法
    • US07183125B2
    • 2007-02-27
    • US10559238
    • 2004-06-01
    • Tatsuya AnzaiYuji OgawaYasuhide Onozawa
    • Tatsuya AnzaiYuji OgawaYasuhide Onozawa
    • H01L21/00H01L41/00
    • H03H9/1085H01L2224/0554H01L2224/05568H01L2224/05573H01L2224/16225H01L2924/00014H03H3/08Y10T29/42H01L2224/05599H01L2224/0555H01L2224/0556
    • To provide a high quality SAW device with enhanced productivity, wherein an outer face of a SAW chip mounted on a mounting substrate is covered with a heat-softened resin sheet and resin is filled on the SAW chip to form an airtight space below an IDT in the SAW device. A method for manufacturing the SAW device includes: a step of flip-chip mounting the SAW chip on the mounting substrate, a step of placing the resin sheet on an upper face of the SAW chip; a laminating step of setting ambient environment to pressure-reduced or vacuum atmosphere and covering the outer face of the SAW chip with resin while securing the airtight space by pressurizing the resin sheet while heating the resin sheet; a press forming step of curing the resin while maintaining the airtight space by maintaining pressurized and heated state in the laminating step; and a post-curing step of performing heating at a temperature and for a time in which the resin completely cures, wherein a thickness tr of the resin sheet before the laminating step satisfies an equation of L/{(X+Gx)(Y+Gy)}≦tr.
    • 为了提供提高生产率的高品质SAW器件,其中安装在安装基板上的SAW芯片的外表面被热软化的树脂片覆盖,树脂填充在SAW芯片上,以在IDT下方形成气密空间 SAW器件。 一种制造SAW器件的方法包括:将SAW芯片倒装安装在安装基板上的步骤,将树脂片放置在SAW芯片的上表面上的步骤; 将周围环境设置为减压或真空气氛并用树脂覆盖SAW芯片的外表面的层压步骤,同时通过在加热树脂板的同时加压树脂板来确保气密空间; 压制成形步骤,通过在层叠步骤中保持加压和加热状态,同时保持气密空间而固化树脂; 以及在树脂完全固化的温度和时间进行加热的后固化步骤,其中层压步骤之前的树脂片的厚度tr满足方程式<?in-line-formula description =“In 线/公式“end =”lead“?> L / {(X + Gx)(Y + Gy)} <= tr。 <?in-line-formula description =“In-line Formulas”end =“tail”?>