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    • 3. 发明申请
    • LAMB WAVE DEVICE
    • 拉姆波设备
    • US20080179989A1
    • 2008-07-31
    • US12099839
    • 2008-04-09
    • Takashi OGAMIKansho YAMAMOTOMichio KADOTA
    • Takashi OGAMIKansho YAMAMOTOMichio KADOTA
    • H03H9/25
    • H03H9/02559H03H3/10H03H9/02228
    • A Lamb wave device includes a base substrate, a piezoelectric thin film which is provided on the base substrate and which has a floating portion floating above the base substrate, the floating portion having a first surface facing the base substrate and a second surface opposite to the first surface, and an IDT electrode disposed on at least one of the first and the second surfaces of the piezoelectric thin film. The piezoelectric thin film is made of LiTaO3 or LiNbO3, and the c-axis of the piezoelectric thin film is set in approximately the same direction as that of a line substantially perpendicular to the first and the second surfaces of the piezoelectric thin film, and the crystal structure of the piezoelectric thin film is a rotation twin crystal having the c-axis functioning as the rotation axis.
    • 兰姆波装置包括基底基板和压电薄膜,其设置在基底基板上并具有浮置在基底基板上方的浮动部分,浮动部分具有面向基底基板的第一表面和与基底基板相对的第二表面 第一表面和设置在压电薄膜的第一表面和第二表面中的至少一个表面上的IDT电极。 压电薄膜由LiTaO 3或LiNbO 3 3制成,并且压电薄膜的c轴被设定为与实质上相当的线的大致相同的方向 垂直于压电薄膜的第一表面和第二表面,并且压电薄膜的晶体结构是具有用作旋转轴的c轴的旋转双晶体。
    • 5. 发明授权
    • Lamb wave device
    • 兰波装置
    • US07535152B2
    • 2009-05-19
    • US12099839
    • 2008-04-09
    • Takashi OgamiKansho YamamotoMichio Kadota
    • Takashi OgamiKansho YamamotoMichio Kadota
    • H03H9/25
    • H03H9/02559H03H3/10H03H9/02228
    • A Lamb wave device includes a base substrate, a piezoelectric thin film which is provided on the base substrate and which has a floating portion floating above the base substrate, the floating portion having a first surface facing the base substrate and a second surface opposite to the first surface, and an IDT electrode disposed on at least one of the first and the second surfaces of the piezoelectric thin film. The piezoelectric thin film is made of LiTaO3 or LiNbO3, and the c-axis of the piezoelectric thin film is set in approximately the same direction as that of a line substantially perpendicular to the first and the second surfaces of the piezoelectric thin film, and the crystal structure of the piezoelectric thin film is a rotation twin crystal having the c-axis functioning as the rotation axis.
    • 兰姆波装置包括基底基板和压电薄膜,其设置在基底基板上并具有浮置在基底基板上方的浮动部分,浮动部分具有面向基底基板的第一表面和与基底基板相对的第二表面 第一表面和设置在压电薄膜的第一表面和第二表面中的至少一个表面上的IDT电极。 压电薄膜由LiTaO 3或LiNbO 3构成,压电薄膜的c轴设定成与基本上垂直于压电薄膜的第一和第二表面的线大致相同的方向,并且 压电薄膜的晶体结构是具有作为旋转轴线的c轴的旋转双晶体。