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1. 发明授权

US06317203B1 Narrowband module inspection device 有权
标题翻译：窄带模块检测装置
公开(公告)号：US06317203B1
公开(公告)日：2001-11-13
申请号：US09270656
申请日：1999-03-16
申请人： Osamu Wakabayashi , Takanori Nakaike
发明人： Osamu Wakabayashi , Takanori Nakaike
IPC分类号： G01J2100
CPC分类号： G03F7/70575 , G01M11/00
摘要： A light that radiates in the wavelength region of a narrowband laser beam is generated, this light is converted to a collimated beam after passing through a slit, and the converted light is incident on a narrowband module. The outputted light from the narrowband module is condensed, and this condensed light is incident on a light detector. A total reflection mirror is provided in a removable manner on the optical path in front of the narrowband module, the ratio between the output of the light detector in a state in which the total reflection mirror is provided on the optical path, and the output of the light detector in a state in which the total reflection mirror is removed, is determined, and the narrowband efficiency of the above-mentioned narrowband module is inspected based on the determined ratio.
摘要翻译：产生在窄带激光束的波长区域中发光的光，该光在通过狭缝后转换为准直光束，并且转换的光入射到窄带模块上。来自窄带模块的输出光被冷凝，并且该会聚的光入射到光检测器上。在窄带模块前面的光路上以可移动的方式设置全反射镜，在光路上设置全反射镜的状态下的光检测器的输出与输出确定去除全反射镜的状态下的光检测器，并且基于所确定的比率来检查上述窄带模块的窄带效率。

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