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1. 发明申请

WO03078838B1 VACUUM PUMP CONTROL DEVICE, AND VACUUM DEVICE 审中-公开
标题翻译：真空泵控制装置和真空装置
公开(公告)号：WO03078838B1
公开(公告)日：2003-10-30
申请号：PCT/JP0303447
申请日：2003-03-20
申请人： RICOH KK , YAMAMOTO HIDEMI , TSUJI KOHJI
发明人： YAMAMOTO HIDEMI , TSUJI KOHJI
IPC分类号： F04D19/04 , F04B37/14 , F04B37/16 , F04B49/00 , F04B49/06 , F04B49/10 , F04B49/20 , F04D27/00
CPC分类号： F04B49/20 , F04B37/14 , F04B49/00 , F04B2203/0204 , F04B2205/01 , F04D19/04 , F04D27/02
摘要： A vacuum pump control device capable of suppressing a power consumption by a vacuum pump by varying the speed of the vacuum pump according to the operating conditions of a vacuum device, wherein a condition set part (4) sets a relation between the operating conditions of the vacuum device (10) and the rotational speed of the vacuum pump (2) for vacuating the vacuum device (10) to a proper value so that the rotational speed of the vacuum pump (2) does not reach a rotational speed more than that required, a control part (6) inputs external signals such as S1 to Sn in correspondence with the operating conditions of the vacuum device (10), reads the rotating speed of the vacuum pump (2) in correspondence with the external signals from the condition set part (4), and outputs the rotational speed, and an inverter (8) controls the rotational speed of the vacuum pump based on the output from the control part (6).
摘要翻译：一种真空泵控制装置，其能够通过根据真空装置的运行条件改变真空泵的速度来抑制真空泵的功率消耗，其中条件设定部件（4）设定真空泵的运行条件之间的关系，真空装置（10）和用于使真空装置（10）真空化的真空泵（2）的旋转速度达到适当的值，使得真空泵（2）的旋转速度没有达到比所需要的转速更高的转速控制部（6）根据真空装置（10）的运转状况输入S1〜Sn等外部信号，根据来自条件集的外部信号读取真空泵（2）的旋转速度部分（4），并输出转速，逆变器（8）根据控制部（6）的输出来控制真空泵的旋转速度。

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