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1. 发明申请

WO2012096529A3 SPRAY MEMBER FOR USE IN SEMICONDUCTOR MANUFACTURE, AND PLASMA TREATMENT APPARATUS HAVING SAME 审中-公开
标题翻译：半导体制造用喷雾部件及具有该部件的等离子体处理装置
公开(公告)号：WO2012096529A3
公开(公告)日：2012-11-15
申请号：PCT/KR2012000297
申请日：2012-01-12
申请人： KOOKJE ELECTRIC KOREA CO LTD , HITACHI INT ELECTRIC INC , PARK YONG SUNG , LEE SOUNG KWANG , KIM DONG YEUL , TOYODA KAZUYUKI , KASAHARA OSAMU , INADA TETSUAKI
发明人： PARK YONG SUNG , LEE SOUNG KWANG , KIM DONG YEUL , TOYODA KAZUYUKI , KASAHARA OSAMU , INADA TETSUAKI
IPC分类号： H05H1/34 , H01L21/205
CPC分类号： H01L21/203 , C23C16/45563 , C23C16/45591 , C23C16/4584 , C23C16/4585 , C23C16/50 , H01J37/3244 , H01J37/32449 , H01J37/32633 , H01J37/32733 , H01L21/3065
摘要： The present invention relates to a plasma treatment apparatus comprising: a process chamber in which a plurality of substrates are accommodated and a plasma treatment process is performed; a support member installed in the process chamber such that the plurality of substrates are placed on the same plane of the support member; a spray member which is arranged opposite the support member, and which has a plurality of independent baffles for independently spraying at least one reaction gas and purge gas from a position corresponding to each of the plurality of substrates placed on the support member; and a driving unit which rotates the support member or the spray member such that the baffles of the spray member may sequentially circle around and above each of the plurality of substrates placed on the support member. The spray member includes a plasma generator installed in at least one baffle which sprays reaction gas among the plurality of baffles, so as to generate plasma from the reaction gas being sprayed onto the substrate.
摘要翻译：等离子体处理装置技术领域本发明涉及一种等离子体处理装置，其包括：容纳多个基板并进行等离子体处理工序的处理室; 支撑构件，所述支撑构件安装在所述处理室中，使得所述多个基板放置在所述支撑构件的同一平面上; 喷雾构件，与所述支撑构件相对地设置，并具有多个独立挡板，用于独立地喷洒来自与放置在所述支撑构件上的所述多个基板中的每个基板相对应的位置处的至少一种反应气体和净化气体; 以及驱动单元，其使所述支撑构件或所述喷射构件旋转，使得所述喷射构件的所述挡板可以顺序地围绕并放置在布置在所述支撑构件上的所述多个基板中的每一个的周围。该喷雾构件包括等离子体发生器，该等离子体发生器安装在至少一个挡板上，该挡板在多个挡板之间喷射反应气体，以便从喷射到基板上的反应气体产生等离子体。

2. 发明专利

JP2001000856A AIR PURIFYING MATERIAL 失效
公开(公告)号：JP2001000856A
公开(公告)日：2001-01-09
申请号：JP17839899
申请日：1999-06-24
申请人： TOYODA KAZUYUKI , SHOJI YOSHINOBU , SUGIHARA YOUTATSU
发明人： TOYODA NAGATAKE , SHOJI YOSHINOBU , SUGIHARA YOUTATSU
IPC分类号： B01D53/02 , B01J20/02 , B01J20/10
摘要： PROBLEM TO BE SOLVED: To make it possible to lower then carbon dioxide concentration in air by incorporating particles of natural ores of specific grain sizes as effective components into an air purifying material. SOLUTION: The carbon dioxide concentration on the earth is gradually increased by the exhaust gases of automobiles, etc., and particularly recently, the increase of the carbon dioxide concentration is considered to be a direct factor to a global warming effect. In view of such aspect, the particles of the natural ores having the grain size of 0.5 to 3.0 μm are incorporated as the effective components into the air purifying material. The grain sizes of the particles of the natural ores are preferably specified to 0.7 to 2.0 μm, further preferably 0.9 to 1.1 μm. HIRATSU feldspars are preferably used as the natural ores. As a result, the dealing with the carbon dioxide concentration gradually increased by the exhaust gases of the automobiles, etc., is made possible, resultantly, the dealing with a problem such as a global warming effect is made possible as well. Not only the carbon dioxide but hazardous materials, such as carbon monoxide, nitrogen oxide and sulfur oxide, may be decreased.

3. 发明专利

JP2012057140A Method for producing aroma composition 有权
标题翻译：生产芳族化合物的方法
公开(公告)号：JP2012057140A
公开(公告)日：2012-03-22
申请号：JP2010217826
申请日：2010-09-09
申请人： ▲濱▼町英世 , Hamamachi Hideyo , Kojima Kosuke , Morooka Tetsuhide , Tani Mitsumasa , Toyoda Kazuyuki , Makoto Yafuji , 眞八藤 , 小嶋航介 , 諸岡哲秀 , 谷光正 , 豊田一幸
发明人： YAFUJI MAKOTO
IPC分类号： C11B9/02
摘要： PROBLEM TO BE SOLVED: To provide a method for producing an aroma composition similar to a natural product from a perfume, and to provide a method for producing a perfume composition such as perfume water using the obtained aroma composition.SOLUTION: A perfume (perfume component) to which divalent or higher metal ion-containing liquid 16 is added is subjected to high-voltage processing 18, and then the divalent or higher metal ion-containing liquid is added to the perfume, and ethyl alcohol 20 subjected to high-voltage processing is added thereto, to thereby extract and produce the aroma composition. Many kinds of aroma compositions 28 obtained by this way are mixed and placed still in a closed space 26, and then subjected to high-voltage processing, while being placed still, to thereby produce the perfume composition. According to the method, an aroma component (aroma composition) similar to a natural product can be produced from a perfume simply in a short period, and a development period of a perfume composition such as perfume water can be shortened greatly by using the aroma composition similar to a natural product, and an effect equivalent to natural aging can be imparted easily to the perfume composition.
摘要翻译：待解决的问题：提供一种生产类似于香料的天然产物的芳香组合物的方法，并提供使用所得香料组合物制备香料组合物如香水的方法。溶液：对其中添加有二价或更高级含金属离子的液体16的香料（香料成分）进行高压处理18，然后将二价或更高的含金属离子的液体加入到香料中，加入进行高压处理的乙醇20，从而提取并生成香料组合物。通过这种方式获得的许多种类的香气组合物28被混合并静置在封闭空间26中，然后在静置的同时进行高压处理，从而产生香料组合物。根据该方法，可以简单地在短时间内由香料制造与天然产物相似的香气成分（香气成分），通过使用香料组合物可以大大缩短香水等香料组合物的显影时间类似于天然产物，并且可以容易地赋予香料组合物相当于自然时效的效果。版权所有（C）2012，JPO＆INPIT

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