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    • 1. 发明申请
    • NEAR FIELD EXPOSURE MASK, METHOD OF FORMING RESIST PATTERN USING THE MASK, AND METHOD OF PRODUCING DEVICE
    • 近场曝光掩模,使用掩模形成电阻图案的方法,以及制造装置的方法
    • WO2008047733A1
    • 2008-04-24
    • PCT/JP2007/070015
    • 2007-10-05
    • CANON KABUSHIKI KAISHAITO, ToshikiMIZUTANI, NatsuhikoTERAO, Akira
    • ITO, ToshikiMIZUTANI, NatsuhikoTERAO, Akira
    • G03F1/14G03F7/20
    • G03F7/2014B82Y10/00G03F1/50G03F7/70325
    • Provided are a near field exposure mask which can suppress heat generation of a mask during exposure and can also suppress variation in size of a resist pattern for each shot, and a resist pattern forming method using the same. The near field exposure mask includes a transparent mask matrix 10; a light shielding layer 12 @formed above the transparent mask matrix 10 and containing silicon; a reflective layer 11 formed between the transparent mask matrix 10 and the light shielding layer 12; and an opening pattern provided in the reflective layer 11 and the light shielding layer 12 and being less in size than an exposure wavelength É (nm), wherein the reflectance at an interface between the transparent mask matrix 10 and the reflective layer 11 is higher than a reflectance at an interface between a transparent mask matrix and a light shielding layer formed on the transparent mask matrix and containing silicon of a near field exposure mask which has no reflective layer between the transparent mask matrix and the light shielding layer.
    • 提供一种能够抑制曝光时的掩模的发热的近场曝光掩模,并且还可以抑制每个镜头的抗蚀剂图案的尺寸的变化,以及使用其的抗蚀剂图案形成方法。 近场曝光掩模包括透明掩模矩阵10; 形成在透明掩模矩阵10上方并含有硅的遮光层12; 形成在透明掩模矩阵10和遮光层12之间的反射层11; 以及设置在反射层11和遮光层12中并且尺寸小于曝光波长É(nm)的开口图案,其中透明掩模矩阵10和反射层11之间的界面处的反射率高于 在透明掩模矩阵和形成在透明掩模矩阵上的遮光层之间的界面处的反射率,并且包含在透明掩模矩阵和遮光层之间没有反射层的近场曝光掩模的硅。
    • 3. 发明专利
    • Ip telephone answering system over internet
    • IP电话在互联网上的答复系统
    • JP2006140697A
    • 2006-06-01
    • JP2004327594
    • 2004-11-11
    • Terao AkiraTerao HarukaTerao JunkoTerao Nozomi寺尾 望寺尾 耀寺尾 遙寺尾 順子
    • TERAO KENJI
    • H04M3/42H04M3/00H04M11/00
    • PROBLEM TO BE SOLVED: To build such a system that the user utilizes more simply and cheaply for utilizing telephone communication services over internet and the system avoids unauthorized use such as unauthorized accesses, etc. to simplify the charge collecting mechanism. SOLUTION: The telephone answering system is composed of a contents provider 1 for showing a WEB screen intended for telephone answering services, a telephone answer request person 2 for requesting a telephone answered person 3 shown in the WEB screen to answer a telephone call, an ITSP 4 for providing IP telephone services, and a telephone answer server 5 serving as the agent of the telephone answer services. When the telephone answer request person 2 requests the telephone answered person 3 to answer a call, the telephone answer server 5 confirms at least either the telephone answer request person 2 or the telephone answered person 3 is a party to the contract with the ITSP 4 and answers communications. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:为了构建这样的系统,用户利用互联网上的电话通信服务更简单且更便宜地利用系统,并且系统避免未经授权的使用,例如未经授权的访问等,以简化电荷收集机制。 解决方案:电话应答系统由用于显示用于电话应答业务的WEB屏幕的内容提供商1,用于请求WEB屏幕中显示的电话应答人员3的电话应答请求人2组成,以应答电话呼叫 ,用于提供IP电话业务的ITSP 4,以及作为电话应答业务代理的电话应答服务器5。 当电话应答请求人2请求电话应答人3接听电话时,电话应答服务器5至少确认了电话应答请求人2或电话应答人3是与ITSP 4的合同的一方, 回答沟通。 版权所有(C)2006,JPO&NCIPI