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    • 10. 发明申请
    • CATHODE FOR VACUUM SPUTTERING TREATMENT MACHINE
    • 用于真空溅射处理机的阴极
    • WO2004008478A2
    • 2004-01-22
    • PCT/FR0302110
    • 2003-07-08
    • TECMACHINEAULAGNER MICHELLABALME LIONEL
    • AULAGNER MICHELLABALME LIONEL
    • H05H1/24C23C14/34H01J37/32H01J37/34
    • H01J37/3435
    • The invention concerns a cathode for vacuum sputtering treatment machine comprising a target plate (2) mounted on a support (3) arranged to act as cooler. The invention is characterized in that the support (3) is secured to a frame (5) defining a closed space (6) for positioning and centering the target (2), said frame (5) including peripherally a profiled catching rim (5d) designed to co-operate with an assembly of independent toe-in elements (8) having complementary catching shapes (8a) adapted to allow a tilting effect of said elements (8) producing a clamping action exerted on members (9), engaged in the thickness of the elements, and supported on part of the catching rim of the frame (5), such that under said tilting effect part of the catching shapes of the assembly of toe-in elements (8), is supported through the front on the peripheral rim of the target (2) for fixing it.
    • 本发明涉及一种用于真空溅射处理机器的阴极,包括安装在用作冷却器的支撑件(3)上的靶板(2)。 本发明的特征在于,支架(3)固定在框架(5)上,框架(5)限定了用于定位和定心靶(2)的封闭空间(6),所述框架(5)包括外围的成型捕获边缘(5d) 设计成与具有互补捕获形状(8a)的独立前束元件(8)的组合配合,所述互补捕获形状(8a)适于允许所述元件(8)的倾斜效应产生施加在构件(9)上的夹紧作用, 并且支撑在框架(5)的部分捕获边缘上,使得在所述倾斜作用下,所述趾部元件(8)的组件的捕获形状的一部分通过所述框架 靶(2)的周边边缘用于固定它。