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    • 5. 发明申请
    • METHOD FOR MANUFACTURING LIQUID CRYSTAL DISPLAY DEVICE
    • 制造液晶显示装置的方法
    • WO2004109381A1
    • 2004-12-16
    • PCT/IB2004/050834
    • 2004-06-03
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.TANAKA, Hideo
    • TANAKA, Hideo
    • G02F1/1368
    • G02F1/133553G02F1/136227G02F1/1368G02F2001/136231G02F2001/136236G02F2001/13685
    • A semiconductor film is formed in a gap between a source electrode and a drain electrode of a thin film transistor in an active-matrix type liquid crystal display device. A metal film for a gate electrode is formed on said semiconductor film via a gate insulating film. A photo-resist film, having a thick portion in region including the gap and having an opening portion in contact-­hole forming region, is formed on the metal film. A contact-hole is formed in the gate insulating film by using the organic material film as a mask. The organic material film is left on the region including the gap. A gate electrode is formed on the region including the gap by etching the first metal film by using the remained organic material film as a mask. An organic material film, having projections and depressions, is formed on a reflective region except the contact-hole forming region. A reflective electrode is formed on the organic material film having projections and depressions
    • 半导体膜形成在有源矩阵型液晶显示装置中的薄膜晶体管的源极和漏极之间的间隙中。 通过栅极绝缘膜在所述半导体膜上形成用于栅电极的金属膜。 在金属膜上形成具有包含该间隙的区域中具有厚度部分并且在接触孔形成区域中具有开口部分的光致抗蚀剂膜。 通过使用有机材料膜作为掩模在栅极绝缘膜中形成接触孔。 有机材料膜留在包括间隙的区域上。 通过使用剩余的有机材料膜作为掩模,通过蚀刻第一金属膜,在包括间隙的区域上形成栅电极。 在除了接触孔形成区域之外的反射区域上形成具有凹凸的有机材料膜。 在具有凹凸的有机材料膜上形成反射电极