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    • 7. 发明授权
    • Filter, color filter array, method of manufacturing the color filter array, and image sensor
    • 过滤器,滤色器阵列,制造滤色器阵列的方法和图像传感器
    • US07875947B2
    • 2011-01-25
    • US11668120
    • 2007-01-29
    • Chang-rok MoonKoe-hyun PaikDuck-hyung LeeSung-ho Hwang
    • Chang-rok MoonKoe-hyun PaikDuck-hyung LeeSung-ho Hwang
    • H01L27/146H01L31/0232
    • G02B5/201G02B5/285H01L27/14609H01L27/14621H01L27/14627H01L27/14685
    • Provided are color filters formed of alternately stacked inorganic materials having different refractive indices, a color filter array, a method of manufacturing the color filter array, and an image sensor. A color filter can include a substrate and first and second inorganic films configured to filter light of a specific wavelength corresponding to a predetermined color, wherein the first and second inorganic films can be alternately stacked on the substrate and have different refractive indices from each other. The refractive index difference between the first inorganic film and the second inorganic film is at least 0.8. The color filter can be formed by alternately stacking the first and second inorganic films. The first inorganic film and the second inorganic film can have a refractive index of 1.3 to 6.0 in a visible light region of 400 to 700 nm, and can be formed of a material selected from the group consisting of SiO2, SiON, SiN, and Si.
    • 提供了由具有不同折射率的交替堆叠的无机材料形成的滤色器,滤色器阵列,制造滤色器阵列的方法和图像传感器。 滤色器可以包括基板和被配置为过滤对应于预定颜色的特定波长的光的第一和第二无机膜,其中第一和第二无机膜可以交替堆叠在基板上并且具有彼此不同的折射率。 第一无机膜与第二无机膜的折射率差为0.8以上。 可以通过交替堆叠第一和第二无机膜来形成滤色器。 第一无机膜和第二无机膜在400〜700nm的可见光区域的折射率可以为1.3〜6.0,可以由选自SiO 2,SiON,SiN和Si的材料形成 。