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    • 3. 发明授权
    • Liquid ejection head and method of producing same
    • 液体喷射头及其制造方法
    • US07494206B2
    • 2009-02-24
    • US11357187
    • 2006-02-21
    • Noriaki OkazawaNobuhiko YamauchiSumio Arai
    • Noriaki OkazawaNobuhiko YamauchiSumio Arai
    • B41J2/04
    • B41J2/1626B41J2/14274B41J2/1612B41J2202/11
    • A method of producing a liquid ejection head comprising: a flow path forming substrate in which a space including pressure generating chambers and an ink reserving chamber is formed; a nozzle plate which is stacked on one face of the flow path forming substrate; and a vibration plate which is stacked on the other face of the flow path forming substrate is provided. The flow path forming substrate is formed by a monocrystal silicon substrate in which a plane of crystal plane orientation of (110) is the surface. When the ink reserving chamber penetrating from the one face of the substrate to the other face is formed by anisotropically etching the (110) plane of the flow path forming substrate, a (111) plane which is inclined with respect to the (110) plane is caused to appear, whereby a step portion which extends in the plate face direction of the substrate, and in which an inner wall face of the flow path forming substrate on the side of the nozzle plate is inward projected is formed on an inner wall face of the ink reserving chamber.
    • 一种制造液体喷射头的方法,包括:流路形成基板,其中形成有包括压力产生室和墨水储存室的空间; 层叠在流路形成基板的一个面上的喷嘴板; 并且设置层叠在流路形成基板的另一面上的振动板。 流路形成基板由(110)的晶面取向面为表面的单晶硅基板形成。 当通过各向异性蚀刻流路形成基板的(110)面形成从基板的一面穿透到另一面的墨水储存室时,相对于(110)面倾斜的(111)面 ,由此在基板的板面方向上延伸的台阶部分,其中流道形成基板在喷嘴板侧的内壁面向内突出形成在内壁面上 的储墨室。