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    • 4. 发明授权
    • Shallow trench isolation
    • 浅沟隔离
    • US6146975A
    • 2000-11-14
    • US113583
    • 1998-07-10
    • Stephen Carl KuehneAlvaro Maury
    • Stephen Carl KuehneAlvaro Maury
    • H01L21/762H01L21/76H01L29/00
    • H01L21/76229
    • The specification describes a dual patterned polish stop layer technique for shallow trench isolation. The shallow trenches are formed by etching trenches in a semiconductor substrate wafer, backfilling with oxide, and polishing by chemical-mechanical polishing (CMP) to produce a planar, trench isolated, wafer. To ensure planarity of the wafer after CMP, and avoid dishing of the field oxide, a dual silicon nitride polish stop layer is used. The first polish stop layer is applied selectively to protect the active device regions, and the second polish stop layer is applied selectively to protect the field oxide regions.
    • 该说明书描述了用于浅沟槽隔离的双重图案化抛光停止层技术。 浅沟槽通过蚀刻半导体衬底晶片中的沟槽,用氧化物回填和通过化学机械抛光(CMP)进行抛光来形成,以产生平面的,沟槽隔离的晶片。 为了确保CMP之后的晶片的平面度,并且避免场氧化物的凹陷,则使用双重氮化硅抛光停止层。 选择性地施加第一抛光停止层以保护有源器件区域,并且选择性地施加第二抛光停止层以保护场氧化物区域。