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1. 发明授权

US06702419B2 System and method for delivering droplets 有权
标题翻译：用于输送液滴的系统和方法
公开(公告)号：US06702419B2
公开(公告)日：2004-03-09
申请号：US10139703
申请日：2002-05-03
申请人： Matthias Stoessel , Stephan Roeger , Dirk Buchhauser
发明人： Matthias Stoessel , Stephan Roeger , Dirk Buchhauser
IPC分类号： B41J29393
CPC分类号： B41J29/393
摘要： Systems and methods are described for delivering droplets. One embodiment provides a system comprising nozzles adapted to deliver droplets to target points on the substrate, a first camera, and means for determining an angular rotation of the substrate in a coordinate system. In some embodiments the means for determining the angular rotation includes a second camera. The substrate has a top surface and alignment marks. The nozzles have droplet delivery openings oriented towards the substrate for delivery of the droplets. The first camera is oriented substantially towards the nozzle openings, and the second camera is oriented substantially towards the substrate top surface.
摘要翻译：描述了用于输送液滴的系统和方法。一个实施例提供了一种系统，其包括适于将液滴输送到基板上的目标点的喷嘴，第一相机，以及用于确定坐标系中基板的角旋转的装置。在一些实施例中，用于确定角度旋转的装置包括第二相机。基板具有顶表面和对准标记。喷嘴具有朝向基板定向的液滴传送开口，用于传送液滴。第一相机基本上朝向喷嘴开口定向，并且第二相机基本朝向基板顶表面定向。

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