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1. 发明授权

US07999213B2 Compact high-speed thin micromachined membrane deformable mirror 有权
标题翻译：紧凑型高速薄型微加工膜可变形镜
公开(公告)号：US07999213B2
公开(公告)日：2011-08-16
申请号：US12241993
申请日：2008-09-30
申请人： Bruce K. Winker , Yu-Hua K Lin , Sridhar Narayanaswamy , Bing Wen
发明人： Bruce K. Winker , Yu-Hua K Lin , Sridhar Narayanaswamy , Bing Wen
IPC分类号： G01J1/20 , G02B7/188
CPC分类号： G02B26/06 , G02B26/0825
摘要： Provided is a compact, high-speed deformable mirror for use with an adaptive optic. The mirror or wavefront correction device corrects and/or compensates for wavefront aberrations present in a wavefront received by the optics. The mirror includes a deformable membrane which may be made of a semiconductive, metallic or insulating material. Positioned in close proximity to a front surface of the membrane is a transparent conductor, which may be covered by a window having an anti-reflective coating. A plurality of electrostatic actuators is located in close proximity to a back surface of the membrane, the conductor and actuators separated by a gap of approximately 10 μm. In operation, a bias voltage is applied to the transparent conductor and an actuator voltage is applied to the plurality of actuators. The resultant voltage differential across the membrane defines the amount of membrane deformation, which in turn compensates for distortions in a subsequently reflected wavefront.
摘要翻译：提供了一种紧凑型高速可变形镜，可与自适应光学元件一起使用。镜或波前校正装置校正和/或补偿由光学器件接收的波前中存在的波前像差。反射镜包括可由半导体，金属或绝缘材料制成的可变形膜。靠近膜的前表面定位的是透明导体，其可被具有防反射涂层的窗口覆盖。多个静电致动器位于膜的后表面附近，导体和致动器由大约10μm的间隙隔开。在操作中，向透明导体施加偏置电压，并且向多个致动器施加致动器电压。跨过膜的合成电压差定义了膜变形的量，其又补偿随后反射的波前的失真。

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