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    • 2. 发明授权
    • Electric field emission device having a triode structure fabricated by using an anodic oxidation process and method for fabricating same
    • 具有通过使用阳极氧化工艺制造的三极管结构的电场发射器件及其制造方法
    • US07554255B2
    • 2009-06-30
    • US10522572
    • 2003-07-30
    • Kun-Hong LeeSun-Kyu HwangSoo-Hwan Jeong
    • Kun-Hong LeeSun-Kyu HwangSoo-Hwan Jeong
    • H01J1/62H01J63/04
    • H01J21/105H01J9/025
    • An electric field emission device having a triode structure is fabricated by using an anodic oxidation process. The device includes a supporting substrate, a bottom electrode layer to be used as an cathode electrode of the device, a gate insulating layer having a plurality of first sub-micro holes, a gate electrode layer having a plurality of second sub-micro holes connecting to the first sub-micro holes, an anode insulating layer having a plurality of third sub-micro holes connecting to the second sub-micro holes, a top electrode layer for hermetically sealing the device, the top electrode layer being used as an anode of the device and a plurality of emitters formed in the first sub-micro holes. The emitters are formed so as to come into as close contact as possible to the electrodes of the device, which results in decreasing a driving voltage.
    • 通过使用阳极氧化工艺制造具有三极管结构的电场发射器件。 该器件包括支撑衬底,用作器件的阴极电极的底部电极层,具有多个第一子微孔的栅极绝缘层,具有多个第二子微孔的栅极电极层 对于第一子微孔,具有连接到第二子微孔的多个第三子微孔的阳极绝缘层,用于气密密封器件的顶电极层,顶电极层用作阳极的阳极 所述装置和形成在所述第一子微孔中的多个发射器。 发射体形成为尽可能接近器件的电极,导致驱动电压降低。
    • 7. 发明授权
    • Optical recording medium with phase transition layer and method of manufacturing the optical recording medium
    • 具有相变层的光记录介质和制造光记录介质的方法
    • US06998162B2
    • 2006-02-14
    • US10441122
    • 2003-05-20
    • In-kyeong YooSoo-hwan JeongIn-sook Kim
    • In-kyeong YooSoo-hwan JeongIn-sook Kim
    • B32B3/02
    • G11B7/26G11B7/24035G11B7/241Y10T428/21
    • An optical recording medium having a phase transition material film and a method of manufacturing the optical recording medium are provided. In the method, first, a phase transition material film, a sacrificial film, and a metal film are sequentially stacked on a substrate. Next, the metal film is anodized to form a metal oxide film having a plurality of holes, and portions of the sacrificial film exposed through the holes are anode-oxidized to form oxide films. Thereafter, the phase transition material film is patterned by removing the metal oxide film and by etching the sacrificial film and the phase transition material film using the oxide films as a mask. Then, the oxide films are removed from the sacrificial film, and an upper insulation film, a reflection film, and a protection film are deposited on the upper surface of the patterned phase transition material film. The optical recording medium can be simply manufactured by using a self-alignment method and can have a highly-integrated large-capacity memory.
    • 提供具有相变材料膜的光记录介质和制造光记录介质的方法。 在该方法中,首先,将相变材料膜,牺牲膜和金属膜依次层叠在基板上。 接下来,金属膜被阳极化以形成具有多个孔的金属氧化物膜,并且通过孔露出的部分牺牲膜被阳极氧化以形成氧化物膜。 此后,通过去除金属氧化物膜并且通过使用氧化膜作为掩模蚀刻牺牲膜和相变材料膜来对相变材料膜进行图案化。 然后,从牺牲膜上除去氧化物膜,并且在图案化的相变材料膜的上表面上沉积上绝缘膜,反射膜和保护膜。 光记录介质可以通过使用自对准方法简单地制造,并且可以具有高度集成的大容量存储器。